Back to Search
Start Over
Focused Ion Beam Lithography
- Publication Year :
- 2011
- Publisher :
- IntechOpen, 2011.
-
Abstract
- Focused Ion Beam Lithography
- Subjects :
- Science / Physics / Condensed Matter
Subjects
Details
- Language :
- English
- ISBN :
- 978-953-307-602-7
953-307-602-X - ISBNs :
- 9789533076027 and 953307602X
- Database :
- Open Research Library
- Accession number :
- edsors.1c994f0d.1a1c.43a0.b1b0.1ed489c4c4ff
- Document Type :
- CHAPTER