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Micro cavity plasma arrays have numerous applications, such as the treatment of volatile organic compounds or the generation of new species. In recent years, the focus has also shifted to plasma catalysis, in which catalytic surfaces are combined with plasmas. The key to all of these applications is the generation of reactive species such as atomic oxygen within the plasma. Typically, atomic oxygen densities can be measured by laser spectroscopic methods. In the case of a micro plasma array, which consists of thousands of cavities with a diameter between 50 and 200 µm, optical access is limited. For this reason, an optical emission spectroscopy approach, helium state enhanced actinometry, is used. 2D resolved narrow bandwidth measurements are performed by using an ICCD camera in combination with a tunable bandpass filter (550–1000 nm). The discharge is operated in helium with an oxygen admixture of 0.1%. An argon admixture of 0.05% is used as actinometer gas. The triangular excitation voltage is varied between amplitudes of 400 and 800 V at a frequency of 15 kHz. Very high dissociation degrees up to nearly complete dissociation are observed. Time resolved measurements show significant differences in oxygen density between the increasing and the decreasing potential phase.

The rapid advances in the field of cold plasma research led to the development of many plasma jets for various purposes. The COST plasma jet was created to set a comparison standard between different groups in Europe and the world. Its physical and chemical properties are well studied, and diagnostics procedures are developed and benchmarked using this jet. In recent years, it has been used for various research purposes. Here, we present a brief overview of the reported applications of the COST plasma jet. Additionally, we discuss the chemistry of the plasma-liquid systems with this plasma jet, and the properties that make it an indispensable system for plasma research.

A new actinometry approach, helium state enhanced actinometry (SEA), is presented. This diagnostic uses the emission of the atomic states O(3p3P) (λ = 844.6 nm), Ar(2p1) (λ = 750.4 nm) and He(33S) (λ = 706.5 nm) and allows the atomic oxygen density and the mean electron energy to be determined simultaneously from the spectral line intensity ratios. Here, the atomic states are selected in a way that they cover a wide range of the electron energy distribution function (EEDF). The method is compared to the classical actinometry approach and energy resolved actinometry (ERA) based on measurements on the COST microplasma jet. In addition, a benchmark against two-photon absorption laser induced fluorescence measurements is performed. Both atomic oxygen densities and mean electron energies are in good agreement with the literature. Furthermore, SEA offers a number of advantages over known approaches. Firstly, the experimental complexity is significantly reduced by using time-integrated spectra instead of phase-resolved measurements, as used in the original ERA approach. Secondly, the precision of the electron energy measurement can be significantly improved by the use of the helium state. In addition, known uncertainties e.g. due to excitation of oxygen excited levels via metastable oxygen states can be reduced.

The electric field is a fundamental parameter for plasma sources and devices. Its knowledge is a dominant setscrew for many processes such as controllable fluxes and energies of charged particles onto surfaces and for the electron energy distribution function. However, experimental data of electric field strengths in micro-structured surface dielectric barrier discharges are rare. Due to geometric configurations and dimensions in micrometer scale, probe-based investigations are challenging. To tackle these issues, we exploit the optical access into micro cavities of a plasma array operated with pure helium to use the Stark effect of the allowed 492.19 nm ( D 1 ↦ P 0 1 ) and forbidden 492.06 nm helium line ( F 0 1 ↦ P 0 1 ) . Based on it, we present spatially-integrated and time-resolved electric field strengths in a range between 20 kV cm−1 and 60 kV cm−1 depending on various parameters such as cavity diameters in 100 μm range and excitation properties. The obtained electric fields can be controlled just by bipolarity of applied voltage and show a good agreement to previous simulated field strengths in pore and silicon-based devices. As expected from simulation dealing with discharges in pores, a smaller cavity dimension yields higher electric field strengths. Due to these high electric fields and the option of this plasma source to easily integrate a catalyst in the discharge volume, this micro cavity plasma array promises further insights into plasma-enhanced catalysis.

A zero-dimensional (volume-averaged) and a pseudo-one-dimensional plug-flow (spatially resolved) model are developed to investigate atmospheric-pressure plasma jets operated with He, He/O2, He/N2 and He/N2/O2 mixtures. The models are coupled with the Boltzmann equation under the two-term approximation to self-consistently calculate the electron energy distribution function. An agreement is obtained between the zero-dimensional model calculations and the spatially averaged values of the plug-flow simulation results. The zero-dimensional model calculations are verified against spatially resolved simulation results and validated against a wide variety of measurement data from the literature. The nitric oxide (NO) concentration is thoroughly characterized for a variation of the gas mixture ratio, helium flow rate and absorbed power. An ‘effective’ and a hypothetical larger rate coefficient value for the reactive quenching N 2 ( A 3 Σ , B 3 Π ) + O ( P 3 ) → N O + N ( D 2 ) are used to estimate the role of the species N2(A3Σ, B3Π; v > 0) and multiple higher N2 electronically excited states instead of only N2(A3Σ, B3Π; v = 0) in this quenching. The NO concentration measurements at low power are better and almost identically captured by the simulations using the ‘effective’ and hypothetical values, respectively. Furthermore, the O ( P 3 ) density measurements under the same operation conditions are also better predicted by the simulations adopting these values. It is found that the contribution of the vibrationally excited nitrogen molecules N2(v ⩾ 13) to the net NO formation rate gains more significance at higher power. The vibrational distribution functions (VDFs) of molecular oxygen O2(v < 41) and nitrogen N2(v < 58) are investigated regarding their formation mechanisms and their responses to the variation of operation parameters. It is observed that the N2 VDF shows a stronger response than the O2 VDF. The sensitivity of the simulation results with respect to a variation of the VDF resolutions, wall reaction probabilities and synthetic air impurity levels is presented. The simulated plasma properties are sensitive to the variation, especially for a feed gas mixture containing nitrogen. The plug-flow model is validated against one-dimensional experimental data in the gas flow direction, and it is only used in case an analysis of the spatially resolved plasma properties inside the jet chamber is of interest. The increasing NO spatial concentration in the gas flow direction is saturated at a relatively high power. A stationary O2 VDF is obtained along the direction of the mass flow, while a continuously growing N2 VDF is observed until the jet nozzle.

In recent years, non-thermal atmospheric pressure plasmas have been used extensively for surface treatments, in particular, due to their potential in biological applications. However, the scientific results often suffer from reproducibility problems due to unreliable plasma conditions as well as complex treatment procedures. To address this issue and provide a stable and reproducible plasma source, the COST-Jet reference source was developed. In this work, we propose a detailed protocol to perform reliable and reproducible surface treatments using the COST reference microplasma jet (COST-Jet). Common issues and pitfalls are discussed, as well as the peculiarities of the COST-Jet compared to other devices and its advantageous remote character. A detailed description of both solid and liquid surface treatment is provided. The described methods are versatile and can be adapted for other types of atmospheric pressure plasma devices.

Spokes are patterns of increased light emission, observed to rotate in front of the targets of magnetron sputtering discharges. They move through the plasma at velocities of several km s−1 in or against the E → × B → direction of the discharge. The high velocity and their initial creation at arbitrary positions render measurements of spokes challenging. For more demanding plasma diagnostic techniques that require data acquisition over multiple discharge pulses, synchronisation to the spoke movement is necessary. In this publication, we present optical emission spectroscopy of spokes in both high power impulse magnetron sputtering (HiPIMS) as well as direct current magnetron sputtering (DCMS) discharges, performed by triggering a camera on the spoke movement. Optical filters between plasma and camera allow us to isolate emission lines of metal and working gas neutrals and ions. Based on these optical measurements and previous probe studies, the dynamics of electrons drifting through spokes in both DCMS and HiPIMS is discussed. In HiPIMS, the much shorter mean free path for inelastic electron collisions enables strong ionisation inside the spoke, causing a sudden variation in electron density which leads to the distinct spoke shape. In contrast, the spoke shape for DCMS discharges seems to rather be indicative of electron energy variations.

Two-dimensional spatially resolved absolute atomic oxygen densities are measured within an atmospheric pressure micro plasma jet and in its effluent. The plasma is operated in helium with an admixture of 0.5% of oxygen at 13.56 MHz and with a power of 1 W. Absolute atomic oxygen densities are obtained using two photon absorption laser induced fluorescence spectroscopy. The results are interpreted based on measurements of the electron dynamics by phase resolved optical emission spectroscopy in combination with a simple model that balances the production of atomic oxygen with its losses due to chemical reactions and diffusion. Within the discharge, the atomic oxygen density builds up with a rise time of 600 µs along the gas flow and reaches a plateau of 8 × 1015 cm−3. In the effluent, the density decays exponentially with a decay time of 180 µs (corresponding to a decay length of 3 mm at a gas flow of 1.0 slm). It is found that both, the species formation behavior and the maximum distance between the jet nozzle and substrates for possible oxygen treatments of surfaces can be controlled by adjusting the gas flow.

Here, a microplasma channel was investigated. The design was developed from a recently presented modular microplasma array. The setup consists of three stacked layers: a magnet, a dielectric foil and two nickel foils that are separated by a 120 μm wide gap. The magnet is grounded while the two nickel foils are powered. The channel is in two dimensions identical (50 μm high and 120 μm wide) to a single cavity of the microplasma arrays while it is two orders of magnitude longer. Unlike the microplasma arrays, the channel provides an additional optical access to the inside of the cavity from the side. The setup was operated with a triangular voltage with a frequency of 10 kHz and an amplitude of up to 700 V at atmospheric pressure. Phase resolved emission images were used to investigate the microplasma channel dynamics with line of sight from the top and from the side to the inside of the cavity. The top view images revealed that the discharge in the microplasma channel and the microplasma arrays behave similar. The already known asymmetric discharge behavior, the self-pulsing and the wavelike ignition was also observed in the microplasma channel. For the wavelike ignition in the channel a simple one dimensional model was proposed. With the additional side view images the asymmetric discharge behavior was examined more thoroughly. Unlike in the microplasma arrays, the discharge expands here in both half periods of the applied voltage above the upper edge of the powered electrodes. The discharge extends over a larger width in the half period, in which the potential of the upper electrodes is increasing, while it extends over a larger height in the other half period. Phase resolved images were also used to investigate the ignition phase of the discharge. The discharge ignites in the two half periods on a different height. This was explained by modeling the drift and diffusion of the charged particles between two discharge pulses. The new insights into the discharge dynamics in the microplasma channel will help to understand the behavior of the discharge in the microplasma arrays.

Laser induced fluorescence spectroscopy (LIF) is used to measure absolute ground state densities of nitric oxide (NO) in the effluent of the COST reference microplasma jet (COST-jet) with three-dimensional spatial resolution. The jet is operated in helium with a nitrogen/oxygen admixture. The experiments are performed with the jet expanding into open air and into a controlled He/synthetic air atmosphere. The most efficient production of NO is found at a 0.5% admixture of N2/O2 at a ratio of 4/1, that is considered to be synthetic air. Maximum NO densities of 3.25 × 1014 cm−3 and 4.5 × 1014 cm−3 are measured in the air and He/synthetic air atmosphere, respectively, at an axial distance of 2 mm from the nozzle. The distribution patterns are found to transit into a turbulent regime for air atmosphere at greater axial distances, while in the He/synthetic air atmosphere this effect is not observed. It is found that the expansion of the region of high NO density in the effluent is strongly coupled to the helium flow. Furthermore, the NO density is found to depend on the absolute feed gas flow, i.e. its maximum decreases as a function of the gas flow. This is a result of the longer residence time of the gas in the active plasma volume at lower gas flows and higher energy densities. For very high values of the applied radio frequency power the NO density is saturated. From time resolved measurements of the LIF signals the quenching coefficient for the NO(A 2Σ+) state by air is found to be k u,air = 4.2(±0.5) × 10−11 cm3 s−1, while quenching by He is negligible, k u,He ⩽ 1 × 10−14 cm3 s−1. The amount of ambient air intruding the helium effluent is determined as well.

Thiol moieties are major targets for cold plasma-derived nitrogen and oxygen species, making CAPs convenient tools to modulate redox-signaling pathways in cells and tissues. The underlying biochemical pathways are currently under investigation but especially the role of CAP derived RNS is barely understood. Their potential role in protein thiol nitrosylation would be relevant in inflammatory processes such as wound healing and improving their specific production by CAP would allow for enhanced treatment options beyond the current application. The impact of a modified kINPen 09 argon plasma jet with nitrogen shielding on cysteine as a thiol-carrying model substance was investigated by FTIR spectroscopy and high-resolution mass spectrometry. The deposition of short-lived radical species was measured by electron paramagnetic resonance spectroscopy, long-lived species were quantified by ion chromatography (NO2-, NO3-) and xylenol orange assay (H2O2). Product profiles were compared to samples treated with the so-called COST jet, being introduced by a European COST initiative as a reference device, using both reference conditions as well as conditions adjusted to kINPen gas mixtures. While thiol oxidation was dominant under all tested conditions, an Ar + N2/O2 gas compositions combined with a nitrogen curtain fostered nitric oxide deposition and the desired generation of S-nitrosocysteine. Interestingly, the COST-jet revealed significant differences in its chemical properties in comparison to the kINPen by showing a more stable production of RNS with different gas admixtures, indicating a different ���NO production pathway. Taken together, results indicate various chemical properties of kINPen and COST-jet as well as highlight the potential of plasma tuning not only by gas admixtures alone but by adjusting the surrounding atmosphere as well.

Here, we present a modular constructed metal-grid micro cavity plasma array as a flexible, robust, and simple alternative to micro-structured devices based on silicon. They show great potential for applications requiring large-area treatment, catalytic conversion or decomposition of volatile organic compounds. The metal-grid array is an easily assembled layered structure consisting of a metal grid, a dielectric foil and a magnet. The grid contains between hundreds and thousands of uniformly arranged cavities with a diameter of 150 μm. The whole system is kept together by magnetic force. This also allows disassembling and exchange of the components independently. Typically, the arrays are operated close to atmospheric pressure with an alternating voltage of up to 1.4 kV peak-to-peak in the kHz range. For a first comparison with silicon-based configurations, the metal-grid array is examined from two different perspectives using phase-resolved imaging. The individual cavities show the same asymmetric discharge behaviour as in the silicon-based arrays. In addition, the expansion width of the discharge from the cavities could be measured. The same interaction between the cavities with the propagation of an ionization wave with velocities in the km/s range is observed as for the silicon-based devices. Thus, with respect to the most basic discharge properties, both configurations show the same behaviour, although they are different in structure and composition.

An atmospheric-pressure argon plasma jet with varying admixtures of molecular oxygen was used to study the etching mechanism of poly(ether ether ketone) (PEEK). Furthermore, a correlation between plasma-based etching processes on PEEK with the generation of chemically reactive plasma species is proposed. The surface analysis was performed by X-ray photoelectron spectroscopy, atomic force microscopy, and surface profilometry which showed a dramatic increase in the content of oxygen functionalities and surface roughness after long-time Ar/O2-plasma treatment. For the plasma diagnostics, two-photon absorption laser-induced fluorescence spectroscopy was applied. The obtained etching mass as well as the surface roughness for different molecular oxygen admixtures revealed a strong dependence on the atomic-oxygen density. Furthermore, the radial surface profile, affected by plasma etching, might be attributed to the distribution of plasma-generated oxygen species in the plasma jet effluent.

Global models of high-power impulse magnetron sputtering (HiPIMS) plasmas in the literature predict a unique connection between target current waveform and oxidation state of the target (metallic versus poisoned): in the metallic mode, the current waveform reaches a plateau due to metal atom recycling, in the poisoned mode a triangular current waveform is predicted driven by plasma gas recycling. This hypothesis of such a unique connection is tested by measuring the surface chemical composition of chromium magnetron targets directly during reactive high-power impulse magnetron sputtering (r-HiPIMS) by spatially resolved x-ray photoelectron spectroscopy (XPS). The sputtering setup was connected to the ultra-high vacuum XPS spectrometer so that the targets could be transferred between the two chambers without breaking the vacuum. The O2/Ar feed gas ratio, the input power and the pulse frequency of the HiPIMS plasmas were varied. The racetrack oxidation state was measured for different plasma parameters and correlated to the target current waveform shape. It was found that a shift of the target operation from the poisoned mode at low powers to the metallic mode at high powers when operating the discharge at 20 Hz pulse frequency occurs. The transition between these modes was directly correlated with analysis of the Cr2p core level peak on the complete target area. A unique correlation between the metallic and poisoned state of the target and the plateau and triangular current waveform was identified for very low powers and very high powers. In the intermediate power range, such a unique connection is absent. It is argued that the presence of already a small fraction of metal on the target may induce a plateau current waveform despite a significant oxidation of the target. This implies a finite contribution of metal sputtering during the pulse that dominates the recycling and leads to a plateau current waveform. Consequently, the shape of current waveforms cannot easily be connected to target poisoning, but a more detailed modeling of the recycling mechanisms is required.

Diagnostic-based modeling (DBM) actively combines complementary advantages of numerical plasma simulations and relatively simple optical emission spectroscopy (OES). DBM is applied to determine spatial absolute atomic oxygen ground-state density profiles in a micro atmospheric-pressure plasma jet operated in He–O2. A 1D fluid model with semi-kinetic treatment of the electrons yields detailed information on the electron dynamics and the corresponding spatio-temporal electron energy distribution function. Benchmarking this time- and space-resolved simulation with phase-resolved OES (PROES) allows subsequent derivation of effective excitation rates as the basis for DBM. The population dynamics of the upper O(3p3P) oxygen state (λ = 844 nm) is governed by direct electron impact excitation, dissociative excitation, radiation losses, and collisional induced quenching. Absolute values for atomic oxygen densities are obtained through tracer comparison with the upper Ar(2p1) state (λ = 750.4 nm). The resulting spatial profile for the absolute atomic oxygen density shows an excellent quantitative agreement to a density profile obtained by two-photon absorption laser-induced fluorescence spectroscopy.

International audience; Atomic oxygen, considered to be a determining reactant in plasma applications at ambient pressure, is routinely detected by two-photon absorption laser induced fluorescence (TALIF). Here, pressure broadening of the (2 p 4 3 P 2 ?????3 p 3 P J =0,1,2 ) two-photon transition in oxygen atoms was investigated using a high-resolution TALIF technique in normal and Doppler-free configurations. The pressure broadening coefficients determined were ##IMG## [http://ej.iop.org/images/0963-0252/25/6/06LT03/psstaa4481ieqn001.gif] γ_\textO_2 ??=??0.40??±??0.08? cm ?1 /bar for oxygen molecules and ##IMG## [http://ej.iop.org/images/0963-0252/25/6/06LT03/psstaa4481ieqn002.gif] γ_\textHe ??=??0.46??±??0.03?cm ?1 /bar for helium atoms. These correspond to pressure broadening rate constants ##IMG## [http://ej.iop.org/images/0963-0252/25/6/06LT03/psstaa4481ieqn003.gif] k_\textPB^\textO_2 ??=??9 · 10 ?9 cm 3 s ?1 and ##IMG## [http://ej.iop.org/images/0963-0252/25/6/06LT03/psstaa4481ieqn004.gif] k_\textPB^\textHe ??=??4 · 10 ?9 cm 3 s ?1 , respectively. The well-known quenching rate constants of O(3 p 3 P J ) by O 2 and He are at least one order of magnitude smaller, which signifies that non-quenching collisions constitute the main line-broadening mechanism. In addition to providing new insights into collisional processes of oxygen atoms in electronically excited 3 p 3 P J state, reported pressure broadening parameters are important for quantification of oxygen TALIF line profiles when both collisional and Doppler broadening mechanisms are important. Thus, the Doppler component (and hence the temperature of oxygen atoms) can be accurately determined from high resolution TALIF measurements in a broad range of conditions.

High power impulse magnetron sputtering (HiPIMS) is a versatile technology to deposit thin films with superior properties. During HiPIMS, the power is applied in short pulses of the order of 100 μs at power densities of kW to a magnetron target creating a torus shaped dynamic high density plasma. This plasma torus is not homogeneous, but individual ionization zones become visible, which rotate along the torus with velocities of 10 km . Up to now, however, any direct measurement of the electron density inside these rotating ionization zones is missing. Here, we probe the electron density by measuring the target current locally by using small inserts embedded in an aluminium target facing the plasma torus. By applying simple sheath theory, a plasma density of the order of at the sheath edge can be inferred. The plasma density increases with increasing target current. In addition, the dynamics of the local target current variation is consistent with the dynamics of the traveling ionization zone causing a modulation of the local current density by 25%.

In-vacuum characterization of magnetron targets after High Power Impulse Magnetron Sputtering (HiPIMS) has been performed by X-ray photoelectron spectroscopy (XPS). Al-Cr composite targets (circular, 50 mm diameter) mounted in two different geometries were investigated: an Al target with a small Cr disk embedded at the racetrack position and a Cr target with a small Al disk embedded at the racetrack position. The HiPIMS discharge and the target surface composition were characterized in parallel for low, intermediate, and high power conditions, thus covering both the Ar-dominated and the metal-dominated HiPIMS regimes. The HiPIMS plasma was investigated using optical emission spectroscopy and fast imaging using a CCD camera; the spatially resolved XPS surface characterization was performed after in-vacuum transfer of the magnetron target to the XPS chamber. This parallel evaluation showed that (i) target redeposition of sputtered species was markedly more effective for Cr atoms than for Al atoms; (ii) oxid...

International audience; The failure mechanisms of micro hollow cathode discharges (MHCD) in silicon have been investigated using their I-V characteristics, high speed photography and scanning electron microscopy. Experiments were carried out in helium. We observed I–V instabilities in the form of rapid voltage decreases associated with current spikes. The current spikes can reach values more than 100 times greater than the average MHCD current. (The peaks can be more than 1 Ampere for a few 10’s of nanoseconds.) These current spikes are correlated in time with 3–10 μm diameter optical flashes that occur inside the cavities. The SEM characterizations indicated that blister-like structures form on the Si surface during plasma operation. Thin Si layers detach from the surface in localized regions. We theorize that shallow helium implantation occurs and forms the ‘blisters’ whenever the Si is biased as the cathode. These blisters ‘explode’ when the helium pressure inside them becomes too large leading to the transient micro-arcs seen in both the optical emission and the I–V characteristics. We noted that blisters were never found on the metal counter electrode, even when it was biased as the cathode (and the Si as the anode). This observation led to a few suggestions for delaying the failure of Si MHCDs. One may coat the Si cathode (cavities) with blister resistant material; design the MHCD array to operate with the Si as the anode rather than as the cathode; or use a gas additive to prevent surface damage. Regarding the latter, tests using SF6 as the gas additive successfully prevented blister formation through rapid etching. The result was an enhanced MHCD lifetime.

Summary form only given. High Power Pulsed Magnetron Sputtering (HPPMS) is a recently developed Ionized Physical Vapor Deposition (IPVD) technique. A bias voltage is applied to the target for a few hundred microseconds with a frequency of a few hundreds of Hertz, delivering several kW cm−2 of power to the target. This results in the production of an ultra dense plasma with a high ionization degree, showing some peculiar behaviors.

A time-resolved analysis of the emission of power impulse magnetron sputtering plasmas reveals inhomogeneities in the form of rotating spokes. The shape of these spokes depends on the target material in a characteristic manner; the peculiar shape of the emission profiles is explained by the localization of the sputtering process as being governed by Ar gas rarefaction and the local dynamics of secondary electrons generation. This general picture is able to explain the observed emission patterns for different target materials as presented.

International audience; Silicon-based microdischarge arrays are of high interest as they enable nonthermal plasmas at atmospheric pressure. However, due to their small dimensions, they are highly sensitive to instabilities that can lead to the destruction of the confining structures. The damage, in particular of the top dielectric surface of these devices, can be directly correlated with a destructive operation mode. Images present the emission and destruction structures, which both show a circular pattern along the edges of the cavities.

Gas and heat dynamics of the 'Cooperation on Science and Technology (COST) Reference Microplasma Jet' (COST-jet), a European lead reference device for low temperature atmospheric pressure plasma application, are investigated. Of particular interest to many biomedical application scenarios, the temperature characteristics of a surface impacted by the jet are revealed. Schlieren imaging, thermocouple measurements, infrared thermal imaging and numerical modelling are employed. Temperature spatial profiles in the gas domain reveal heating primarily of the helium fraction of the gas mixture. Thermocouple and model temporal data show a bounded exponential temperature growth described by a single characteristic time parameter to reach ~63% or (1-1/e) fraction of the temperature increase. Peak temperatures occurred in the gas domain where the carrier jet exits the COST-jet, with values ranging from ambient temperatures to in excess of 100 °C in 'α-mode' operation. In a horizontal orientation of the COST-jet a curved trajectory of the helium effluent at low gas flows results from buoyant forces. Gas mixture profiles reveal significant containment of the helium concentrations for a surface placed in close proximity to the COST-jet. Surface heating of a quartz plate follows a similar bounded exponential temporal temperature growth as device heating. Spatial profiles of surface heating are found to correlate strongly to the impacting effluent where peak temperatures occur in regions of maximum surface helium concentration.

A microscale atmospheric-pressure plasma jet is a remote plasma jet, where plasma-generated reactive particles and photons are involved in substrate treatment. Here, we summarize our efforts to develop and characterize a particle- or photon-selective set of otherwise identical jets. In that way, the reactive species or photons can be used separately or in combination to study their isolated or combined effects to test whether the effects are additive or synergistic. The final version of the set of three jets—particle-jet, photon-jet and combined jet—is introduced. This final set realizes the highest reproducibility of the photon and particle fluxes, avoids turbulent gas flow, and the fluxes of the selected plasma-emitted components are almost identical in the case of all jets, while the other component is effectively blocked, which was verified by optical emission spectroscopy and mass spectrometry. Schlieren-imaging and a fluid dynamics simulation show the stability of the gas flow. The performance of these selective jets is demonstrated with the example of the treatment of E. coli bacteria with the different components emitted by a He-only, a He/N2 and a He/O2 plasma. Additionally, measurements of the vacuum UV photon spectra down to the wavelength of 50 nm can be made with the photon-jet and the relative comparison of spectral intensities among different gas mixtures is reported here. The results will show that the vacuum UV photons can lead to the inactivation of the E.coli bacteria.

Cold atmospheric pressure plasmas are a promising alternative therapy for treatment of chronic wounds, as they have already shown in clinical trials. In this study an air dielectric barrier discharge (DBD) developed for therapeutic use in dermatology is characterized with respect to the plasma produced reactive oxygen species, namely atomic oxygen and ozone, which are known to be of great importance to wound healing. To understand the plasma chemistry of the applied DBD, xenon-calibrated two-photon laser-induced fluorescence spectroscopy and optical absorption spectroscopy are applied. The measured spatial distributions are shown and compared to each other. A model of the afterglow chemistry based on optical emission spectroscopy is developed to cross-check the measurement results and obtain insight into the dynamics of the considered reactive oxygen species. The atomic oxygen density is found to be located mostly between the electrodes with a maximum density of cm. Time resolved measurements reveal a constant atomic oxygen density between two high voltage pulses. The ozone is measured up to 3?mm outside the active plasma volume, reaching a maximum value of cm between the electrodes.

Investigations on the self-pulsing operation regime of a modified micro-scaled atmospheric pressure plasma jet (μ-APPJ) are presented. Using a wedge-shaped electrode configuration, a self-pulsing behavior of the device is achieved, which is characterized by the repetitive ignition of a constricted 'γ-mode-like' discharge at the gas inlet, which propagates with the gas flow towards the nozzle, where it extinguishes. The 'γ-mode-like' feature coexists with the homogeneous alpha-glow. Synchronized voltage/current and optical emission measurements are presented in order to correlate the evolution of electrical quantities such as voltage, current, dissipated power and phase with changes in the discharge structure. First insights are gained into the underlying discharge dynamics responsible for a stable self-sustainment, propagation and extinction of the constricted discharge. The results indicate that processes induced by helium metastables play a major role. Maximal electron densities on the order of ne = 3.2 1012 cm−3 and dissipated power of 18.9 W are achieved in this novel operation regime.

Measurements of collisional de-excitation (quenching) coefficients required for the interpretation of emission and fluorescence spectroscopic measurements are reported. Particular attention is turned on argon transitions which are of interest for actinometric determinations of atomic ground state populations and on fluorescence lines originating from excited atoms and noble gases in connection with two-photon excitation (TALIF) of atomic radicals. A novel method is described which allows to infer quenching coefficients for collisions with molecular hydrogen of noble gas states in the energy range up to 24 eV. The excitation is performed in these experiments by collisions of energetic electrons in the sheath of an RF excited hydrogen plasma during the field reversal phase which lasts about 10 ns. We describe in addition a calibration method -including quenching effectsf o-r the determination by TALIF of absolute atomic radical densities of hydrogen, nitrogen and oxygen using two-photon resonances in noble gases close by the resonances of the species mentioned. The paper closes with first ideas on a novel technique to bypass quenching effects in TALIF by introducing an additional, controllable loss by photoionization that will allow quenching-free determination of absolute atomic densities with prevalent nanosecond laser systems in situations where collisional de-excitation dominates over spontaneous emission.

Space- and time-resolved helium metastable densities (3S1) have been measured in a radio-frequency driven self-pulsing atmospheric pressure microplasma jet (SP μ-APPJ) using tuneable diode laser absorption spectroscopy. Density maps of metastable atoms have been deduced for different times during a self-pulsing cycle with a time resolution of 20 µs, revealing the metastable dynamics in the discharge. The plasma exhibits a bright propagating constricted discharge during every pulse, co-existing with a homogeneous glow-mode (α-mode). The profiles show significantly increased metastable densities over the whole electrode gap in the region of the constricted discharge. In the sheath region, densities reach the order of 1013 cm−3. These densities are three orders of magnitude higher than the densities that were measured in the homogeneous glow-mode. Time-resolved measurements show that the increased metastable density propagates with the constricted discharge from the gas inlet to the nozzle. Between two pulses the metastable density drops down to the level of the glow-mode. Decay times of the metastables in the order of 100 µs have been measured. The propagation velocity of the constricted discharge has been determined from the movement of the metastable maximum.

The behaviour of Cu and Cr HiPIMS (high power impulse magnetron sputtering) discharges was investigated by a combination of optical emission spectroscopy, energy-resolved mass spectrometry and optical imaging, for the complete current–voltage characteristic range achievable within our experimental conditions. Inflection points typical of HiPIMS current–voltage characteristics separate plasma regimes perfectly differentiated in terms of flux composition of species towards the substrate, deposition rate, and the nature of plasma self-organization. The reorganization of the HiPIMS plasma into spokes (areas of high ionization over the target) is associated to one regime of high plasma conductivity, where also deposition rate is limited. This spoke-dominated regime can be substituted by a homogeneous regime at higher powers, where there is an increase of deposition rate, which is driven mostly by an increase in the flux of metal neutrals and metal double-charged ions. The relevance of secondary electron emission mechanisms for the support of the spoke-dominated regime in reactive and non-reactive sputtering conditions is discussed.

Microcavity plasma arrays of inverse pyramidal cavities have been fabricated in p-Si wafers. Each cavity acts as a microscopic dielectric barrier discharge. Operated at atmospheric pressure in argon and excited with high voltage at about 10 kHz, each cavity develops a localized microplasma. Experiments have shown a strong interaction of individual cavities, leading to the propagation of wave-like optical emission structures along the surface of the array. This phenomenon is numerically investigated using computer simulation. The observed ionization wave propagates with a speed of about 5 km/s, which agrees well the experimental findings. It is found that the wave propagation is due to sequential contributions of a drift of electrons followed by drift of ions between cavities seeded by photoemission of electrons by the plasma in adjacent cavities.

We present clear evidence that ground state atomic oxygen shows two patterns near a surface in the helium plasma needle discharge. Two-photon absorption laser-induced fluorescence spectroscopy, combined with gas flow simulation, was employed to obtain spatially-resolved ground state atomic oxygen densities. When the feed gas flow rate is low, the radial density peaks along the axis of the needle. At high flow rate, a ring-shaped density distribution appears. The peak density is on the order of 1021 m−3 in both cases. The results are consistent with a previous report of the flow-dependent bacterial killing pattern observed under similar conditions.