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Circular Emission and Destruction Patterns on a Silicon-Based Microdischarge Array

Authors :
Valentin Felix
Mukesh Kulsreshath
Volker Schulz-von der Gathen
Judith Golda
Remi Dussart
Henrik Boettner
Institute for Applied Plasma Physics
Ruhr-Universität Bochum [Bochum]
Groupe de recherches sur l'énergétique des milieux ionisés (GREMI)
Université d'Orléans (UO)-Centre National de la Recherche Scientifique (CNRS)
Source :
IEEE Transactions on Plasma Science, IEEE Transactions on Plasma Science, Institute of Electrical and Electronics Engineers, 2014, 42 (10), pp.2646. ⟨10.1109/TPS.2014.2337657⟩
Publication Year :
2014
Publisher :
Institute of Electrical and Electronics Engineers (IEEE), 2014.

Abstract

International audience; Silicon-based microdischarge arrays are of high interest as they enable nonthermal plasmas at atmospheric pressure. However, due to their small dimensions, they are highly sensitive to instabilities that can lead to the destruction of the confining structures. The damage, in particular of the top dielectric surface of these devices, can be directly correlated with a destructive operation mode. Images present the emission and destruction structures, which both show a circular pattern along the edges of the cavities.

Details

ISSN :
19399375 and 00933813
Volume :
42
Database :
OpenAIRE
Journal :
IEEE Transactions on Plasma Science
Accession number :
edsair.doi.dedup.....66715222168bad679fe4931657220d39
Full Text :
https://doi.org/10.1109/tps.2014.2337657