19 results on '"Van Besien E"'
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2. Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
3. Chemisorption of ALD precursors in and on porous low-k films
4. The influence of N containing plasmas on low- k films
5. Conformational analysis of a trihydroxylated derivative of cinnamic acid—a combined Raman spectroscopy and Ab initio study
6. Electrical Characteristics of p-Type Bulk Si Fin Field-Effect Transistor Using Solid-Source Doping With 1-nm Phosphosilicate Glass
7. Gate-all-around MOSFETs based on vertically stacked horizontal Si nanowires in a replacement metal gate process on bulk Si substrates
8. Epitaxial diamond-hexagonal silicon nano-ribbon growth on (001) silicon
9. Self-aligned double patterning of 1× nm FinFETs; A new device integration through the challenging geometry
10. Electronic spectrum of UO2(2+) and [UO2Cl4]2- calculated with time-dependent density functional theory
11. Integration of a k=2.3 spin-on polymer for the sub-28nm technology node using EUV lithography
12. Fundamental study of atomic layer deposition in and on porous low-k films
13. Implementation of an industry compliant, 5×50μm, via-middle TSV technology on 300mm wafers
14. Fundamental study of atomic layer deposition in and on porous low-k films.
15. Integration of 20nm half pitch single damascene copper trenches by spacer-defined double patterning (SDDP) on metal hard mask (MHM).
16. Influence of varying porogen loads and different UV cures on low-kappa film characteristics.
17. Electronic spectrum of UO2(2+) and [UO2Cl4]2- calculated with time-dependent density functional theory.
18. Electronic spectra of uranyl chloride complexes in acetone: a CASSCF/CASPT2 investigation.
19. Electronic structure and spectrum of UO2 2+ and UO2Cl4 2-.
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