4,336 results on '"THIN film deposition"'
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2. Green anti-solvent for efficient and stable larger-size perovskite solar cells and modules
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Hu, Min, Zhao, Yifan, Li, Dongcheng, Zhu, Yanqing, Xu, Mi, Lu, Jianfeng, and Liu, Kan
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- 2025
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3. Synthesis and characterization of stretchable isoprene-acrylic acid copolymer thin films
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Coplan, Meryem, Yorulmaz, Merve, Gürsoy, Mehmet, and Karaman, Mustafa
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- 2024
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4. Fabrication and investigation of PMMA-doped 1, 3, 5-triphenylbenzene (TPB) thin film's structural, optical, and electrical properties for optoelectronic devices
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Kaliramna, Sonu, Aryan, Dhayal, Sardul Singh, and Kumar, Narendra
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- 2024
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5. Role of voltage-controlled magnetic anisotropy in the recent development of magnonics and spintronics.
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Rana, Bivas
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THIN film deposition , *MAGNETIC anisotropy , *MAGNETIZATION reversal , *MAGNETIC materials , *MAGNETIC films - Abstract
With significant recent progress in the thin film deposition and nanofabrication technology, a number of physical phenomena occur at the interfaces of magnetic thin films, and their heterostructures have been discovered. Consequently, the electric field-induced modulation of those interfacial properties mediated through spin–orbit coupling promises to develop magnetic material based smarter, faster, miniaturized, energy efficient spintronic devices. Among them, the electric field-induced modification of interfacial magnetic anisotropy, popularly termed as voltage-controlled magnetic anisotropy (VCMA), has attracted special attention because of its salient features. This article is devoted to reviewing the recent development of magnonics, which deals with collective precessional motion of ordered magnetic spins, i.e., spin waves (SWs), and skyrmions with chiral spin textures, with VCMA, including the perspectives of this research field. Starting with a broad introduction, the key features of VCMA and its advantages over other electric field-induced methods are highlighted. These are followed by describing the state-of-the-art of VCMA, and various other direct and indirect electric field-induced methods for magnetization reversal; controlling skyrmion dynamics; excitation, manipulation, and channeling of SWs; and tailoring magnonic bands. The critical challenges, their possible solutions, and future perspectives of this field are thoroughly discussed throughout the article. [ABSTRACT FROM AUTHOR]
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- 2024
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6. Numerical investigation of plasma properties in Ar/SiH4 inductively coupled plasmas considering electron energy distribution functions.
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Kim, Ji-Hoon, Yoon, Min-Young, Kim, Gwan, Kwon, Deuk-Chul, Lee, Hyo-Chang, Kim, Jung-Hyung, and Choe, Hee-Hwan
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THIN film deposition , *BOLTZMANN'S equation , *ELECTRON distribution , *ENERGY function , *AMORPHOUS silicon , *PLASMA flow - Abstract
In thin film deposition, Ar/SiH4 mixtures are widely used to make polysilicon (poly-Si) and hydrogenated amorphous silicon (a-SiH) layers. Despite extensive research conducted on this mixture, little research has focused on the variations in plasma properties, radicals, and ions that occur during plasma discharge in inductively coupled plasma (ICP) equipment compared to capacitive coupled plasma equipment. In this paper, we investigate the properties of the plasma generated through mathematical modeling of Ar/SiH4 inductive coupled plasma discharge by using the electron energy distribution function (EEDF) obtained by solving the Boltzmann equation. We closely examine the variation in plasma properties and the correlation of plasma variables by controlling the radio frequency power and gas pressure during the process conditions. The Boltzmann equation was computed by assuming the two-term approximation, resulting in a Druyvesteyn-like EEDF due to the high-pressure conditions. To validate the simulation model, the 2D simulation results were compared with probe measurements performed in a two-turn ICP chamber. The results demonstrated encouraging agreement with the measured data. This research not only enhances our comprehension of the discharge characteristics but also establishes a framework for optimizing the discharge conditions to enhance the process and effectively regulate external variables. [ABSTRACT FROM AUTHOR]
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- 2024
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7. Low temperature sputtering deposition of Al1−xScxN thin films: Physical, chemical, and piezoelectric properties evolution by tuning the nitrogen flux in (Ar + N2) reactive atmosphere.
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Signore, M. A., Serra, A., Manno, D., Quarta, G., Calcagnile, L., Maruccio, L., Sciurti, E., Melissano, E., Campa, A., Martucci, M. C., Francioso, L., and Velardi, L.
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PIEZOELECTRIC thin films , *THIN film deposition , *SPUTTER deposition , *LOW temperatures , *KELVIN probe force microscopy , *RUTHERFORD backscattering spectrometry , *ATMOSPHERIC nitrogen - Abstract
This work investigates the physical properties of Al1−xScxN thin films sputtered at low temperatures by varying the process conditions. Specifically, the films were deposited at room temperature by applying a radio frequency power equal to 150 W to an AlSc alloy (60:40) target, varying the nitrogen flux percentage in the (Ar + N2) sputtering atmosphere (30%, 40%, 50%, and 60%) and keeping constant the working pressure at 5 × 10−3 mbar. The structural and chemical properties of the Al1−xScxN films were studied by x-ray diffraction and Rutherford backscattering spectrometry techniques, respectively. The piezoelectric response was investigated by piezoresponse force microscopy. In addition, the surface potential was evaluated for the first time for Sc-doped AlN thin films by Kelvin probe force microscopy, providing piezoelectric coefficients free from the no-piezoelectric additional effect to the mechanical deformation, i.e., the electrostatic force. By alloying AlN with scandium, the piezoelectric response was strongly enhanced (up to 200% compared to undoped AlN), despite the low deposition temperature and the absence of any other additional energy source supplied to the adatoms during thin film growth, which generally promotes a better structural arrangement of polycrystalline film. This is a strategic result in the field of microelectromechanical systems completely fabricated at low temperatures. [ABSTRACT FROM AUTHOR]
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- 2024
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8. A hybrid plasma model for Cr thin film deposition by deep oscillation magnetron sputtering.
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Gao, J. Y., Ferreira, F., and Lei, M. K.
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THIN film deposition , *PLASMA chemistry , *MAGNETRON sputtering , *KINETIC energy , *PLASMA diffusion , *TWO-dimensional models - Abstract
A time-dependent hybrid plasma model composed of a zero-dimensional global model and a two-dimensional fluid model is proposed for simulation of plasma chemistry and transportation of plasma during Cr thin film deposition by deep oscillation magnetron sputtering (DOMS). The global model deals with plasma reactions in the ionization region near the target with discharge voltage and current waveforms as inputs. The temporal plasma characteristics calculated by the global model are utilized as a boundary condition for the two-dimensional fluid model to simulate high-density plasma transportation in the diffusion region through the entire macropulse period. The full momentum equation taking inertia force into consideration is applied for ion momentum conservation in the fluid model instead of using the drift-diffusion approximation, which ensures validity of the simulation for low-pressure plasmas. The deposition flux as well as the kinetic and potential energy fluxes transferred to the growing films are calculated by the hybrid model. Microstructure evolution of the DOMS deposited Cr thin films from zone I to zone T is attributed to the growing kinetic and potential energies as the charging voltage increases according to the structure zone diagram. The deposition rate loss in DOMS is explained by the back attraction effect, sputtering yield effect, and densification of the films. [ABSTRACT FROM AUTHOR]
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- 2024
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9. Influence of Sputtering DC Sputtering Power on the Surface Evolution of Ti Thin Films: A Fractal Description: Influence of Sputtering DC Sputtering Power on the Surface Evolution of Ti Thin Films: A Fractal Description: Mwema, Wambua, Jen, and Akinlabi.
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Mwema, F. M., Wambua, J. M., Jen, Tien-Chien, and Akinlabi, E. T.
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SUBSTRATES (Materials science) ,FIELD emission electron microscopes ,THIN film deposition ,THIN films ,ATOMIC force microscopy ,MAGNETRON sputtering - Abstract
The power supplied to the target during a sputtering process affects surface evolution. As such, the influence of sputtering power on the growth of titanium (Ti) thin films was studied. The Ti thin films were deposited using a direct current (DC) magnetron sputtering system from a pure Ti target on a glass substrate at varying sputtering powers of 15% (54.12 W), 30% (109.70 W), and 50% (188.17 W) of the maximum system capacity. The thin films were then characterised for topography using atomic force microscopy (AFM), morphology using a field emission scanning electron microscope (FESEM), and crystallinity using an x-ray diffractometer (XRD). Furthermore, fractal analysis based on the AFM imaging was undertaken to evaluate the growth mechanisms of the Ti thin films. The thickness, grain size, and roughness of the thin films increased with the deposition power. The samples were mostly amorphous, although at 30% and 50%, a weak peak of Ti (002) was observed via x-ray diffraction. The fractal dimension (Df) decreased with increasing power. The multifractality strength increased with increasing power. Based on the fractal study, Volmer-Weber and Stranski-Krastanov's modes describe the growth mechanism of Ti thin films deposited at varying sputtering power. [ABSTRACT FROM AUTHOR]
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- 2025
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10. Effect of Solvent on the Structural and Morphological Properties of α-Fe2O3 Deposited at Different Temperatures Using Aerosol-assisted CVD in an In-house Built Setup.
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Sadullah, Md, Hussain, Syed Mohd, and Ghosh, Kunal
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PHYSICAL & theoretical chemistry ,THIN film deposition ,X-ray photoelectron spectroscopy ,CHEMICAL vapor deposition ,ATOMIC force microscopy ,ETHANOL - Abstract
This paper analyzes the growth process of high-quality α-Fe
2 O3 thin films using aerosol-assisted chemical vapor deposition (AACVD) in a custom-built setup. The work investigates the influence of solvents and deposition temperature on the film characteristics. The samples of α-Fe2 O3 thin films were prepared using three different solvents for a combination of five different temperatures of 250°C, 300°C, 350°C, 400°C, and 450°C. Structural investigations were conducted using x-ray diffraction, revealing solvent-dependent variations in the full width at half maximum (FWHM) of the x-ray rocking curve implying a change in the crystallite size and film thickness. Energy-dispersive x-ray spectroscopy (EDX) detected changes in the weight percentage of iron with solvents, indicating a variation in the thickness of α-Fe2 O3 films. Morphological analysis using field-emission scanning electron microscopy (FESEM) demonstrated solvent- and temperature-dependent changes in film morphology. Ethanol and methanol at higher temperatures resulted in a flake-like structure, while deionized (DI) water maintained the original film structure. The choice of solvent significantly impacted film thickness, with methanol producing a 648.2-nm-thick film of α-Fe2 O3 grown within 15 min at 350°C. Surface roughness variations were observed using atomic force microscopy (AFM), showing smoother films at lower temperatures and rougher surfaces at higher temperatures, particularly for methanol samples, reaching a root-mean-square (RMS) value of 9.32 nm at a deposition temperature of 450°C. X-ray photoelectron spectroscopy (XPS) analysis revealed changes in the stability of the Fe3+ state depending on the solvent used in the precursor solution, with ethanol exhibiting the highest stability. This study highlights the importance of considering solvent properties during thin film deposition, as they influence morphology, thickness, and chemical composition, especially under high-temperature conditions. [ABSTRACT FROM AUTHOR]- Published
- 2025
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11. Phase-change Sn-Se thin films prepared via pulsed laser deposition.
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Kotrla, M., Segawa, H., Ohsawa, T., Matsushita, Y., Janíček, P., Gutwirth, J., Nazabal, V., Drašar, Č., and Němec, P.
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PULSED laser deposition , *THIN film deposition , *ULTRAVIOLET lasers , *THIN films , *TIN - Abstract
Sn-Se phase-change thin films with four different nominal compositions (Sn 40 Se 60 , Sn 37 Se 63, Sn 33 Se 67 , Sn 30 Se 70) were prepared by UV pulsed laser deposition. Fabricated films were investigated in the context of the structure, optical and electrical behaviour in both, as-deposited (amorphous) and annealed (crystalline) state. The samples exhibit good electrical contrast between amorphous and annealed state (∼3-6 orders of magnitude) and the optical contrast |Δn|+|Δk| for the wavelength 405 nm/780 nm is about 0.84/1.75 respectively. The study of the Sn-Se films revealed that compositions are prone to undergo phase change into crystalline SnSe and SnSe 2 and display unusual electrical behaviour upon heating. This phenomenon may be characterized as the "localization of electrical charge" occurring very likely on the clusters of nanoparticles of either p-type or n-type crystallized phase. [ABSTRACT FROM AUTHOR]
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- 2025
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12. Study of the influence of nitrogen doping on magnetic anisotropy in CoFe/MgO thin films with different deposition sequences.
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Liu, Chuyue, Xu, Xiulan, Liu, Jintao, Yang, Xinyan, Zhao, Di, Zuo, Minggao, Hu, Wangyang, Ma, Xujie, and Yu, Guanghua
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MAGNETIC anisotropy , *X-ray photoelectron spectroscopy , *THIN film deposition , *LEAD , *DOPING agents (Chemistry) , *PERPENDICULAR magnetic anisotropy - Abstract
The ferromagnetic (FM)/MgO structure multilayers with perpendicular magnetic anisotropy (PMA) play a crucial role in magnetic random-access memory. It is essential to explore the methods for modulating magnetic anisotropy and to clarify the underlying mechanisms. We study the regulation of the magnetic anisotropy with nitrogen (N) doping concentration (CN) in two samples: Ta/CoFe(N)/MgO/Ta (S1) and Ta/MgO/CoFe(N)/Ta (S2) with different deposition sequences. The S1 sample exhibits in-plane magnetic anisotropy (IMA) without N doping. And the sample presents PMA when CN = 15%. The S2 sample shows weak PMA without N doping, and the sample converts to IMA when CN = 15%. X-ray photoelectron spectroscopy is performed to evaluate the oxidation level of Fe at the CoFe/MgO interface by the peak area ratio of Fe oxide to Fe (ϵ). It is believed that excessively high and low ϵ values correspond to over-oxidation and under-oxidation of Fe, respectively. For films deposited in different sequences, both over-oxidation and under-oxidation lead to IMA, while moderate oxidation facilitates the formation of PMA. The microstructure analysis reveals that the N doping does not affect the crystallization of the films, indicating that magnetocrystalline anisotropy has a minor influence on the changes of K eff. [ABSTRACT FROM AUTHOR]
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- 2025
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13. Flexible and Transparent Ultrathin Gold Electrodes via Ion Beam Smoothing.
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Ferrando, Giulio, Mennucci, Carlo, Barelli, Matteo, Giordano, Maria Caterina, and Buatier de Mongeot, Francesco
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THIN films , *GOLD films , *GOLD electrodes , *THIN film deposition , *ION beams - Abstract
Herein, a large‐area nanofabrication process is proposed for flexible, ultrathin, and ultrasmooth gold films with extraordinary electro‐optical performance, making them competitive as transparent conductive electrodes (TCEs). The approach circumvents the thermodynamic constraints associated with the physical deposition of thin film electrodes, where 3D growth and metal dewetting delay stable percolation until the deposited film thickness exceeds 8–10 nm. It is demonstrated that a postgrowth ion irradiation procedure of compact gold films with Ar+ beam at very low energies, around 100 eV, predominantly induces ballistic smoothing and grain boundary restructuring. This process finally leads to the formation of ultrasmooth and ultrathin gold films that remain compact even at a thickness of 4 nm, with a sheet resistance in the range of 60 Ω sq−1 and an optical transparency around 80%. Remarkably, the films remain percolated even at thicknesses as low as 3 nm, with a transparency exceeding 90% and a sheet resistance of 190 Ω sq−1. These figures are comparable to those of commercial TCEs and enable simple, scalable, all‐metal transparent contacts on both rigid and flexible substrates, with significant potential for optoelectronic applications. [ABSTRACT FROM AUTHOR]
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- 2025
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14. Modeling the Influence of Deposition Parameters on the Crystalline Degree in the Simulation of Polycrystalline Silicon.
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Santonen, Mikael, Lahti, Antti, Srivastava, Divya, Jahanshah Rad, Zahra, Miettinen, Mikko, Ebrahimzadeh, Masoud, Laaksonen, Johanna, Laukkanen, Pekka, Punkkinen, Marko, Kokko, Kalevi, Kuronen, Antti, Parkkinen, Katja, and Eklund, Markus
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SURFACES (Physics) , *POLYCRYSTALLINE silicon , *PHYSICAL vapor deposition , *THIN film deposition , *MOLECULAR dynamics - Abstract
Polycrystalline silicon (poly‐Si) has been and still is a pivotal material, particularly in the electronics and solar energy industries. Controlling crystallization is one of the challenges, e.g., in producing poly‐Si films for radio frequency applications. Since film growth by deposition is a random process, producing a specific grain size distribution for poly‐Si is challenging. By combining molecular dynamics simulation data with surface diffusion physics, novel transparent models are constructed that shed light on the physics behind the deposition of poly‐Si thin films and assist the selection of simulation parameters. Both probabilistic and geometric approaches are used to find relevant simulation parameters and their bounds to describe the complex grain–grain boundary interactions in the growth of poly‐Si thin films. Poly‐Si growth simulations provide valuable information to better understand the features of optimal growth conditions. The constructed parameterized deposition model is fitted to the simulation data. In addition to further refining the simulation of customized poly‐Si films, the presented modeling concept can also be used more generally in the analysis of physical vapor deposition. [ABSTRACT FROM AUTHOR]
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- 2024
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15. Topographic Scanning Electronic Microscopy Reveals the 3D Surface Structure of Materials.
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Sun, Wen, Xu, Yichen, Zhou, Ying, Zeng, Zhihan, Wang, Lei, and Ouyang, Jianyong
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SECONDARY electron emission , *ELECTRON scattering , *ELECTRON emission , *ELECTRON detection , *THIN film deposition , *ELECTRON beams - Abstract
Scanning electron microscopy (SEM) is a very popular technology to analyze the surface morphology of various materials in both academia and industry. Its principle is the detection of secondary electron emission and electron scattering interactions between the electron beam and the sample surface. It requires the deposition of a thin metal film like Au on non‐conductive samples to prevent charge accumulation. However, due to the discontinuity of the Au film along the vertical direction of a sample, the SEM images cannot provide information along the vertical direction. Additionally, the gold films have grains of 10–12 nm in diameter, which can limit the resolution of the SEM images. Here, topographic SEM is reported by coating poly(3,4‐ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS, an intrinsically conductive polymer) onto samples instead of metal deposition. High‐quality features along both the horizontal and vertical directions can be observed on the SEM images because PEDOT:PSS can form a continuous film along both directions. Furthermore, due to the featureless morphology of the PEDOT:PSS films, the resolution of SEM images is significantly higher than that with gold deposition. The application of topographical SEM in the characterization of various materials, including patterned semiconductors, nanostructured materials, energy materials, biomaterials, etc is demonstrated. [ABSTRACT FROM AUTHOR]
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- 2024
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16. Enhanced Visible Light Controlled Glucose Photo-Reforming Using a Composite WO 3 /Ag/TiO 2 Photoanode: Effect of Incorporated Plasmonic Ag Nanoparticles.
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Jakubow-Piotrowska, Katarzyna, Witkowski, Bartlomiej, Wrobel, Piotr, Miecznikowski, Krzysztof, and Augustynski, Jan
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THIN film deposition , *SILVER catalysts , *ELECTROLYTE analysis , *GLUCONIC acid , *VISIBLE spectra - Abstract
WO3/Ag/TiO2 composite photoelectrodes were formed via the high-temperature calcination of a WO3 film, followed by the sputtering of a very thin silver film and deposition of an overlayer of commercial TiO2 nanoparticles. These synthetic photoanodes were characterized in view of the oxidation of a model organic compound glucose combined with the generation of hydrogen at a platinum cathode. During prolonged photoelectrolysis under simulated solar light, these photoanodes demonstrated high and stable photocurrents of ca. 4 mA cm−2 due, on one hand, to the occurrence of the so-called photocurrent doubling and, on the other hand, to the plasmonic effect of Ag nanoparticles. The post-photoelectrolysis analyses of the electrolyte demonstrated the formation of high-value final glucose photo-reforming products, principally gluconic acid, erythrose and formic acid. [ABSTRACT FROM AUTHOR]
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- 2024
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17. Single‐Source Vapor‐Deposition of MA1–xFAxPbI3 Perovskite Absorbers for Solar Cells.
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Soto‐Montero, Tatiana, Kralj, Suzana, Soltanpoor, Wiria, Solomon, Junia S., Gómez, Jennifer S., Zanoni, Kassio P. S., Paliwal, Abhyuday, Bolink, Henk J., Baeumer, Christoph, Kentgens, Arno P. M., and Morales‐Masis, Monica
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PHYSICAL vapor deposition , *THIN film deposition , *SOLAR cell efficiency , *SOLAR cells , *VAPOR-plating - Abstract
Vapor deposition of halide perovskites presents high potential for scalability and industrial processing of perovskite solar cells. It prevents the use of toxic solvents, allows thickness control, and yields conformal and uniform coating over large areas. However, the distinct volatility of the perovskite organic and inorganic components currently requires the use of multiple thermal sources or two‐step deposition to achieve the perovskite phase. In this work, single‐source, single‐step MA1–xFAxPbI3 thin film deposition with tunable stoichiometry by pulsed laser deposition is demostrated. By controlling the laser ablation of a solid target containing adjustable MAI:FAI:PbI2 ratios, the room temperature formation of cubic α‐phase MA1–xFAxPbI3 thin films is demonstrated. The target‐to‐film transfer of the ablated species, including the integrity of the organic molecules and the desired MA+:FA+ ratio, is confirmed by x‐ray photoelectron spectroscopy and solid‐state NMR. Photoluminescence analysis further confirms the shift of the bandgap with varying the MA+:FA+ ratio. Finally, proof‐of‐concept n‐i‐p solar cells with 14% efficiency are demonstrated with as‐deposited non‐passivated pulsed laser deposition (PLD)‐MA1–xFAxPbI3. This study opens the path for future developments in industry‐compatible vapor‐deposition methods for perovskite solar cells. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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18. The first example of polymeric lanthanide tetrakis-trifluoroacetates in chemical solution deposition of up-converting NaGdF4:Yb,Er,Nd thin films.
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Burlakova, Maria, Blinnikova, Daria, Volkonovskiy, Gleb, Chai, Haoyang, Grebenyuk, Dimitry, and Tsymbarenko, Dmitry
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CHEMICAL solution deposition , *THIN film deposition , *THIN films , *X-ray scattering , *CHEMICAL precursors , *RARE earth metals - Abstract
A series of lanthanide tetrakis-trifluoroacetates {(detaH2)2[La2(tfa)8]2(CH3CN)5(H2O)2}n and (detaH2)n[Ln(tfa)4]2n (Ln = Pr–Eu), mixed-ligand complexes [La(tfa)3(CH3CN)(H2O)]n, [Gd(tfa)3(deta)2](iPrOH) and [Yb(tfa)2(deta)2](tfa), as well as detaH2(tfa)2 were isolated and characterized. All lanthanide tetrakis-trifluoroacetates contain two types of 1D anionic chains [Ln(tfa)4]nn− and cavities occupied by detaH22+ cations and solvating H2O and CH3CN molecules. The thermal behavior of (detaH2)n[Ln(tfa)4]2n in air is investigated by TGA, in situ VT-PXRD and total X-ray scattering with PDF analysis, and the formation of metal fluorides occurs upon heating to 300 °C. The application of solution with lanthanide trifluoroacetates and diethylenetriamine (deta) as precursors for chemical deposition of β-NaGdF4:Er,Yb,Nd thin films is reported. The deposited β-NaGdF4:Er,Yb,Nd thin film demonstrates up-conversion luminescence under 980 and 808 nm laser excitation. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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19. Muon spin relaxation in mixed perovskite (LaAlO3)x(SrAl0.5Ta0.5O3)1-x with x≃0.3.
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Ito, Takashi U., Higemoto, Wataru, Koda, Akihiro, Nakamura, Jumpei G., and Shimomura, Koichiro
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MUON spin rotation , *THIN film deposition , *DISTRIBUTION (Probability theory) , *MUONS , *DENSITY functional theory - Abstract
We report on muon spin relaxation ( μ + SR) measurements in a mixed perovskite compound, (LaAlO 3 ) x (SrAl 0.5 Ta 0.5 O 3 ) 1 - x with x ≃ 0.3 (LSAT), which is widely used as a single-crystalline substrate for thin film deposition. In zero applied field (ZF), muon depolarization due to the distribution of nuclear dipole fields was observed in the temperature range from 4 K to 270 K. Interestingly, μ + SR time spectra in ZF maintained a Gaussian-like feature over the entire range, while the depolarization rate exhibited a monotonic decrease with increasing temperature. This behavior may be attributed to the thermally activated diffusion of muons between a few adjacent sites within a confined space of the angstrom scale, where the motionally averaged local field that each muon experiences can remain non-zero and result in maintaining the Gaussian-like line shape. The spatial distribution of electrostatic potential at lattice interstices evaluated via density functional theory calculations suggests that such a restriction of muon diffusion paths can be caused by the random distribution of cations with different nominal valences in the mixed perovskite lattice. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
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20. Low Temperature Plasma‐Assisted Double Anodic Dissolution: A New Approach for the Synthesis of GdFeO3 Perovskite Nanoparticles.
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Tarasenka, Natalie, Padmanaban, Dilli Babu, Karpinsky, Dmitry, Arredondo, Miryam, Tarasenko, Nikolai, and Mariotti, Davide
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ATMOSPHERIC pressure plasmas , *MULTIFERROIC materials , *PHOTOELECTRON spectroscopy , *THIN film deposition , *TRANSMISSION electron microscopy , *ANTIFERROMAGNETIC materials - Abstract
Orthorhombic perovskite GdFeO3 nanostructures are promising materials with multiferroic properties. In this study, a new low‐temperature plasma‐assisted approach is developed via dual anodic dissolution of solid metallic precursors for the preparation of perovskite GdFeO3 nanoparticles (NPs) that can be collected both as colloids as well as deposited as a thin film on a substrate. Two solid metallic foils of Gd and Fe are used as precursors, adding to the simplicity and sustainability of the method. The formation of the orthorhombic perovskite GdFeO3 phase is supported by high‐resolution transmission electron microscopy, X‐ray diffraction, X‐ray photoelectron spectroscopy, and Raman measurements, while a uniform elemental distribution of Gd, Fe, and O is confirmed by energy dispersive X‐ray spectroscopy, proving the successful preparation of ternary compound NPs. The magnetic properties of the NPs show zero remnant magnetization typical of antiferromagnetic materials, and saturation at high fields that can be caused by spin interaction between Gd and Fe magnetic sublattices. The formation mechanism of ternary compound NPs in this novel plasma‐assisted method is also discussed. This method is also modified to demonstrate the direct one‐step deposition of thin films, opening up opportunities for their future applications in the fabrication of magnetic memory devices and gas sensors. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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21. Deposition of Thin Films From HMDSO Utilizing the Vacuum UV Radiation From an Atmospheric Plasma.
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Winzer, Tristan and Benedikt, Jan
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ATMOSPHERIC radiation , *ULTRAVIOLET radiation , *HELIUM plasmas , *THIN film deposition , *PLASMA sources - Abstract
This study presents a source for studying thin‐film deposition utilizing vacuum UV (VUV) radiation from a remote argon or helium atmospheric plasma to initiate photochemistry in the precursor gas. We aim to assess how this radiation affects the deposition process and film structure while avoiding deposition inside the plasma source or particle formation. Deposition occurs where radiation interacts with the precursor and the growing film, as well as further downstream. The measured film properties clearly show that photon interaction with the film has a significant effect. Using hexamethyldisiloxane (HMDSO) as a precursor, we achieved nearly carbon‐free silicon dioxide (SiO2 ) film growth due to photodesorption of hydrocarbons from the growing film, as confirmed by infrared spectra and positive ion mass spectrometry. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
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22. Effects of Postdeposition Annealing on the Electrical Properties of Cu2O/4H–SiC PiN Diodes.
- Author
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Lee, Hyung‐Jin, Lee, Geon‐Hee, Lee, Hyun‐Woo, Lee, Tae‐Hee, Kim, Il Ryong, Kim, Min Kyu, Lim, Byeong Cheol, and Koo, Sang‐Mo
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SILICON carbide thin films , *THIN film deposition , *PIN diodes , *COPPER oxide , *CHEMICAL stability - Abstract
Copper oxide (Cu2O) is a promising p‐type material owing to its high absorption coefficient, suitable bandgap width, chemical stability, nontoxicity, and abundance. In this study, the effect of postdeposition annealing (PDA) on the electrical properties of Cu2O thin films deposited on silicon carbide (SiC) substrates is investigated. The films are subjected to PDA using radio‐frequency sputtering at various temperatures in air. During PDA, the Cu2O films are maintained at <300 °C and transitioned to cupric oxide (CuO) at 400 °C. The as‐deposited Cu2O film exhibits a low oxidation peak (Cu2+), whereas the phase‐transformed CuO films exhibit a higher binding energy with the emergence of satellite peaks. The rectification ratios of the Cu2O device annealed at 300 °C and CuO device annealed at 400 °C are determined as 2.02 × 107 and 1.01 × 105, respectively, denoting the substantial enhancement of approximately 55.04 for the Cu2O/SiC device and degradation of approximately 0.28 for the CuO/SiC device relative to their non‐annealed counterparts. Therefore, in this study, the significant improvement in the performance of Cu2O thin films with the meticulous deposition control of potential p‐type materials, such as Cu2O and CuO, for high‐throughput and low‐cost electronic applications is demonstrated. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
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23. Surface Characteristics and Performance Optimization of W-Doped Vanadium Dioxide Thin Films.
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Tien, Chuen-Lin, Chiang, Chun-Yu, Tien, Jia-Kai, Wang, Ching-Chiun, and Lin, Shih-Chin
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SUBSTRATES (Materials science) , *THIN film deposition , *THIN films , *SURFACE roughness , *TAGUCHI methods - Abstract
This study explores the surface characteristics evaluation and performance optimization of tungsten (W)-doped vanadium dioxide (VO2) thin films. W-doped vanadium dioxide films were deposited on B270 glass substrates using an electron beam evaporation technique combined with the ion beam-assisted deposition (IAD) method. The Taguchi method was used to analyze the performance optimization of VO2 thin films, and L16 orthogonal array design and Minitab software were used for optimization calculations. The surface roughness, visible light transmittance, infrared transmittance, and residual stress of un-doped and tungsten-doped (3–5%) VO2 thin films are set as the quality performance indicators of thin films. The goal is to identify the key factors that affect the performance of VO2 thin films during deposition and optimize their process parameters. The experimental results showed that a VO2 thin film with 3% tungsten doping, an oxygen flow rate of 60 sccm, a heating temperature of 280 °C, and a film thickness of 60 nm exhibited the lowest surface roughness of 2.12 nm. A VO2 thin film with 5% tungsten doping, an oxygen flow rate of 0 sccm, a heating temperature of 280 °C, and a film thickness of 60 nm had the highest visible light transmittance at 64.33%. When the oxygen flow rate was 60 sccm, the heating temperature was 295 °C, the film thickness was 150 nm, and the tungsten doping was 5%, the VO2 thin film showed the lowest infrared transmittance of 31.34%. A thin film with 5% tungsten doping, an oxygen flow rate of 20 sccm, a heating temperature of 265 °C, and a film thickness of 120 nm exhibited the lowest residual stress of −0.195 GPa. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
24. Flow Rate-Driven Morphology Evolution of Chemical Vapor Deposited WS 2 at Varying Temperatures.
- Author
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Pokhrel, Himal, Mishra, Sanjay, and Pollard, Shawn
- Subjects
- *
CHEMICAL vapor deposition , *THIN film deposition , *X-ray photoelectron spectroscopy , *GAS flow , *CARRIER gas - Abstract
Due to its unique electronic and optical properties, tungsten disulfide (WS2) is a promising material for various device applications. However, achieving an efficient and cost-effective method for synthesizing large-area uniform WS2 is still challenging. In this work, we demonstrate the synthesis of few-layer WS2 crystallites by NaCl-assisted low-pressure chemical vapor deposition and study the effect of temperature and the carrier gas flow rate on the morphology, structure, and optical properties of the as-grown WS2 films. We observe transitions between regular triangular to strongly disordered structures with sizes up to 50 µm through temperature and carrier gas flow rate tuning. As-grown samples were characterized by Raman spectroscopy, scanning electron microscopy, and X-ray photoelectron spectroscopy. The result of this work provides a path toward the optimization of growth conditions for obtaining WS2 with desired morphologies for various applications. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
25. Polymers in Physics, Chemistry and Biology: Behavior of Linear Polymers in Fractal Structures.
- Author
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Roman, Hector Eduardo
- Subjects
- *
CONDENSED matter physics , *MATERIALS science , *THIN film deposition , *PROTEIN folding , *POLYMER networks , *LINEAR polymers - Abstract
We start presenting an overview on recent applications of linear polymers and networks in condensed matter physics, chemistry and biology by briefly discussing selected papers (published within 2022–2024) in some detail. They are organized into three main subsections: polymers in physics (further subdivided into simulations of coarse-grained models and structural properties of materials), chemistry (quantum mechanical calculations, environmental issues and rheological properties of viscoelastic composites) and biology (macromolecules, proteins and biomedical applications). The core of the work is devoted to a review of theoretical aspects of linear polymers, with emphasis on self-avoiding walk (SAW) chains, in regular lattices and in both deterministic and random fractal structures. Values of critical exponents describing the structure of SAWs in different environments are updated whenever available. The case of random fractal structures is modeled by percolation clusters at criticality, and the issue of multifractality, which is typical of these complex systems, is illustrated. Applications of these models are suggested, and references to known results in the literature are provided. A detailed discussion of the reptation method and its many interesting applications are provided. The problem of protein folding and protein evolution are also considered, and the key issues and open questions are highlighted. We include an experimental section on polymers which introduces the most relevant aspects of linear polymers relevant to this work. The last two sections are dedicated to applications, one in materials science, such as fractal features of plasma-treated polymeric materials surfaces and the growth of polymer thin films, and a second one in biology, by considering among others long linear polymers, such as DNA, confined within a finite domain. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
26. Raman Studies in Chemically Synthesized Nanocrystalline CuS Thin Films.
- Author
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Gosavi, Narayani M., Wagh, T. R., Sali, K. R., and Gosavi, S. R.
- Subjects
SUBSTRATES (Materials science) ,THIN film deposition ,THIN films ,BAND gaps ,DIFFRACTION patterns - Abstract
This paper describes the chemical synthesis of nanocrystalline CuS thin films onto glass substrate at 40 ℃. The effect of the deposition time on the Raman spectroscopy results and physical properties was investigated. X-ray diffraction pattern showed the amorphous nature of CuS thin films deposited with deposition time of 20 min and transferred to orthorhombic crystal structure for CuS thin films with deposition time of 40 min. Raman modes observed at around 273 cm
– 1 and 475 cm– 1 in CuS thin films support the formation of covellite CuS phase. FESEM images taken from the surfaces of chemically deposited nanocrystalline CuS thin films shows the dense structure, smooth and relatively void-free surfaces and surface looks well adhered to the glass substrate. The optical band gap was estimated to be in the range between 2.05 eV and 2.15 eV depending on the deposition time. Finally, as a result of the analysis, we can say that the variation in deposition time can affect the structural properties of CuS thin films. [ABSTRACT FROM AUTHOR]- Published
- 2024
- Full Text
- View/download PDF
27. Effect of Pre-sodium Hydroxide and Post-heat Treatments on Copper Oxide-Based Photocathode: A Perspective on Photoelectrochemical Water Splitting and CO2 Reduction.
- Author
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Intarasiri, Saowaluk, Wannapop, Surangkana, and Somdee, Asanee
- Subjects
CARRIER density ,X-ray photoelectron spectroscopy ,THIN film deposition ,THIN films ,P-type semiconductors ,PHOTOCATHODES - Abstract
CuO photocathodes are p-type semiconductors used in photoelectrochemical cells to split water molecules into H
2 and O2 gases and reduce CO2 molecules to valuable chemical products such as carbon monoxide (CO), methane (CH4 ), or even hydrocarbons. This work demonstrates pre- and post-treatment using the electrochemical deposition method for CuO photocathodes. Cu ions were deposited on a fluorine-doped tin oxide substrate by applying electricity. Next, the prepared Cu film was ultrasonically treated with 1 M NaOH. The as-prepared Cu film was clear and transparent. The structure and surface properties of the thin films were characterized by x-ray diffraction, scanning electron microscopy, and x-ray photoelectron spectroscopy. The results showed that the prepared Cu was transformed to Cu2 O. The film was then annealed in an O2 atmosphere for different durations. As a result, the structure of Cu2 O was transformed to CuO. Electrochemical impedance spectroscopy revealed that the annealing time influenced the charge carrier density and affected the photocathode performance. The CuO photocathode was also preliminarily investigated for its ability to reduce CO2 into a valuable chemical product. [ABSTRACT FROM AUTHOR]- Published
- 2024
- Full Text
- View/download PDF
28. Molecular layer deposition of polyhydroquinone thin films for Li‐ion battery applications.
- Author
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Paranamana, Nikhila C., Datta, Amit K., Wyatt, Quinton K., Gettler, Ryan C., Werbrouck, Andreas, and Young, Matthias J.
- Subjects
SURFACE chemistry ,QUARTZ crystal microbalances ,PROTECTIVE coatings ,THIN film deposition ,VAPOR-plating - Abstract
Many next‐generation materials for Li‐ion batteries are limited by material instabilities. To stabilize these materials, ultrathin, protective coatings are needed that conduct both lithium ions and electrons. Here, we demonstrate a hybrid chemistry combining molecular layer deposition (MLD) of trimethylaluminum (TMA) and p‐hydroquinone (HQ) with oxidative molecular layer deposition (oMLD) of molybdenum pentachloride (MoCl5) and HQ to enable vapor‐phase molecular layer growth of poly(p‐hydroquinone) (PHQ)—a mixed electron and lithium ion conducting polymer. We employ quartz crystal microbalance (QCM) studies to understand the chemical mechanism and demonstrate controlled linear growth with a 0.5 nm/cycle growth rate. Spectroscopic characterization indicates that this hybrid MLD/oMLD chemistry polymerizes surface HQ monomers from the TMA‐HQ chemistry to produce PHQ. The polymerization to PHQ improves air stability over MLD TMA‐HQ films without crosslinking. Electrochemical measurements on hybrid MLD/oMLD films indicate electronic conductivity of ~10−9 S/cm and a Li‐ion conductivity of ~10−4 S/cm. While these coatings show promise for Li‐ion battery applications, this work focuses on establishing the coating chemistry and future studies are needed to examine the stability, structure, and cycling performance of these coatings in full Li‐ion cells. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
29. Low-loss and low-temperature Al2O3 thin films for integrated photonics and optical coatings.
- Author
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Torab Ahmadi, Pooya, Chesaux, Michael, Wojcik, Jacek, Deligiannis, Dino, Mascher, Peter, and Bradley, Jonathan D. B.
- Subjects
OPTICAL coatings ,THIN film deposition ,OPTICAL waveguides ,RARE earth ions ,ALUMINUM oxide films - Abstract
Amorphous aluminum oxide (Al
2 O3 ) is a key material in optical coatings due to its notable properties, including a broad transparency window (ultraviolet to mid-infrared) and excellent durability. Moreover, its higher refractive index contrast relative to silica cladding layers and high solubility of rare-earth ions make it well suited for optical waveguides and the development of various functionalities in integrated photonics. In many coatings and integrated photonics applications, the substrates are temperature and stress sensitive, while relatively thick (∼1 μm) alumina layers are required; thus, it is crucial to fabricate low optical loss alumina thin films at low deposition temperatures, while maintaining high deposition rates. In this study, plasma-assisted reactive magnetron sputtering, operated in an alternating current mode, is investigated as a reliable, straightforward, and wafer-scale compatible technique for the deposition of high optical quality and uniform Al2 O3 thin films at low temperature. One-micrometer-thick amorphous Al2 O3 planar waveguides, deposited at 150 °C and a rate of 23.3 nm/min, exhibit optical losses below 1 dB/cm at 638 nm and as low as 0.1 dB/cm in the conventional optical communication band. [ABSTRACT FROM AUTHOR]- Published
- 2024
- Full Text
- View/download PDF
30. High-quality GaN thin film deposition at low temperature by ECR plasma-assisted sputter deposition method and its dependence of sapphire substrate misorientation angle.
- Author
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Torii, Hironori and Matsui, Shinsuke
- Subjects
CYCLOTRON resonance ,THIN film deposition ,GALLIUM nitride ,SUBSTRATES (Materials science) ,SPUTTER deposition ,MAGNETRON sputtering - Abstract
Gallium nitride (GaN) thin films were deposited by electron cyclotron resonance (ECR) plasma-assisted sputtering, which combines GaN-magnetron sputtering with argon and nitrogen plasma assistance using an ECR high-density plasma. GaN films on the misorientation-angle-0.0° (just) sapphire substrate showed very good crystallinity with a GaN(0002) rocking curve (XRC) full width at half maximum (FWHM) of 0.042° and epitaxial growth confirmed by φ-scan measurements at a low heating temperature of 350 °C. However, the GaN thin film had a rough surface with circular grains about 100 nm in diameter and a surface root-mean-square height (Sq) of 1.21 nm. Therefore, the misorientation angle of the sapphire substrate was varied from 0.2° to 10.0°. As a result, the grains observed on the just substrate disappeared at 0.5°. The film had Sq: 0.33 nm, and the FWHM of the XRC of GaN(0002) was 0.066°, indicating improved surface flatness while maintaining crystallinity. This is considered to be due to the step flow, which promotes ECR plasma-assisted diffusion on the terrace even at the low temperature of 350 °C. The polarity of the GaN thin film was analyzed by time-of-flight atomic scattering surface analysis and found to be N-polar on all substrates. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
31. State-of-the-art electrochromic thin films devices, fabrication techniques and applications: a review.
- Author
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Yaseen, Muhammad, Khattak, Muhammad Arif Khan, Khan, Abbas, Bibi, Shaista, Bououdina, Mohamed, Usman, Muhammad, Khan, Niaz Ali, Pirzado, Azhar Ali Ayaz, Abumousa, Rasha A., and Humayun, Muhammad
- Subjects
PHYSICAL vapor deposition ,THIN film deposition ,THIN film devices ,ELECTROCHROMIC windows ,THIN films - Abstract
Electrochromic (EC) thin films have received considerable attention due to their potential applications in various fields such as smart windows, electrochromic displays, and energy storage devices. This review highlights various methods used for the fabrication and functionalization of EC films for various applications. Various techniques for EC thin film deposition ranging from solution-processable, low-temperature approaches such as sol-gel, spin coating, dip coating, and spray pyrolysis, to advanced techniques for deposition such as physical vapor deposition, chemical vapor deposition, and sputtering are summarized in this review. In addition, various applications of EC thin films and the outcome of different deposition approaches on the opto-electrochromic properties of EC thin films have been discussed elaborately. This review has the potential to spark the interest of researchers from a broad range of disciplines, including photocatalysis, electrocatalysis, nanotechnology and materials science. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
32. The creation of defects in Cu-doped TiO2 memristive devices.
- Author
-
Gu, Bin, Zhang, Bo, and Wagner, Tomas
- Subjects
SEMICONDUCTOR thin films ,PHYSICAL vapor deposition ,THIN film deposition ,NONVOLATILE memory ,DATA warehousing - Abstract
Memristors are utilized in nonvolatile memory and artificial synaptic devices. However, the industrial application of memristors has been restricted by the occurrence of fatigue, the mechanism of which is still under debate. In this paper, we systematically investigated the mechanism of defect generation created by Joule heating in Cu-doped TiO
2 memristive device. The results also demonstrated that the Joule heat for artificial synaptic emulation was less severe than that for digital data storage. [ABSTRACT FROM AUTHOR]- Published
- 2024
- Full Text
- View/download PDF
33. Effects of deposition angle on the thin film quality of indium tin oxide grown by single beam ion source-assisted magnetron sputtering.
- Author
-
Amollo, Tabitha A., Wang, Keliang, Zhen, Bocong, Johnson, Tyler, and Fan, Qi Hua
- Subjects
ELECTRICAL engineering materials ,THIN film deposition ,SPUTTER deposition ,INDIUM tin oxide ,THIN films ,MAGNETRON sputtering - Abstract
This work proves that the sputtering deposition angle has significant effects on the ITO film crystallinity and properties under the assistance of an ion beam at room temperature. The films grown at 30º and 45º are crystalline while the ones produced at 60º and 90º are amorphous in nature. The films' sheet resistance was observed to be lower at 30º and 45º than at 60 and 90º. The films produced at 60º exhibited the highest optical peak transmittance ca. 90% followed by those grown at 45º ca. 84% in the visible region. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
34. Prediction by a hybrid machine learning model for high-mobility amorphous In2O3: Sn films fabricated by RF plasma sputtering deposition using a nitrogen-mediated amorphization method.
- Author
-
Kamataki, Kunihiro, Ohtomo, Hirohi, Itagaki, Naho, Lesly, Chawarambawa Fadzai, Yamashita, Daisuke, Okumura, Takamasa, Yamashita, Naoto, Koga, Kazunori, and Shiratani, Masaharu
- Subjects
- *
MACHINE learning , *SPUTTER deposition , *RADIOFREQUENCY sputtering , *THIN film deposition , *MAGNETRONS , *PLASMA deposition , *RADIO frequency - Abstract
In this study, we developed a hybrid machine learning technique by combining appropriate classification and regression models to address challenges in producing high-mobility amorphous In2O3:Sn (a-ITO) films, which were fabricated by radio-frequency magnetron sputtering with a nitrogen-mediated amorphization method. To overcome this challenge, this hybrid model that was consisted of a support vector machine as a classification model and a gradient boosting regression tree as a regression model predicted the boundary conditions of crystallinity and experimental conditions with high mobility for a-ITO films. Based on this model, we were able to identify the boundary conditions between amorphous and crystalline crystallinity and thin film deposition conditions that resulted in a-ITO films with 27% higher mobility near the boundary than previous research results. Thus, this prediction model identified key parameters and optimal sputtering conditions necessary for producing high-mobility a-ITO films. The identification of such boundary conditions through machine learning is crucial in the exploration of thin film properties and enables the development of high-throughput experimental designs. [ABSTRACT FROM AUTHOR]
- Published
- 2023
- Full Text
- View/download PDF
35. A fully automatized method for the unambiguous wavelength-by-wavelength determination of the thickness and optical property of a very thin film with a transparent range.
- Author
-
Maudet, Florian, Dijck, Charlotte Van, Raza, Muhammad Hamid, and Dubourdieu, Catherine
- Subjects
- *
THIN films , *ATOMIC layer deposition , *OPTICAL properties , *THIN film deposition , *REFRACTIVE index - Abstract
Spectroscopic ellipsometry is a powerful method with high surface sensitivity that can be used to monitor the growth of even sub-monolayer films. However, analysis of ultrathin films is complicated by the correlation between the dielectric constant and thickness. This problem is usually resolved by fixing one or the other value, limiting the information that can be extracted. Here, we propose a method to determine unambiguously the refractive index, extinction coefficient, and thickness of a film when a transparent range is available in the energy range investigated. We decompose the analysis in three steps. First, the thickness of the film is determined from the transparent range of the film. Then, knowing the thickness of the layer, an initial estimation of the refractive index and extinction coefficient is made based on a first-order Taylor expansion of the ellipsometric ratio. Finally, using this estimation, a numerical iteration is done to ensure convergence of the fit toward the solution. A theoretical example of the method is given for two different thicknesses of TiO2 films. Finally, the method is applied to the experimental data measured during the atomic layer deposition of a thin film of Hf0.5Zr0.5O2 grown on Si. The thickness, refractive index, and extinction coefficient are retrieved with high precision (respectively, 0.01 and 0.002) in the energy range of 3.5–6.5 eV. A detailed analysis is presented on the accuracy of the retrieved values and their dependency on random and systematic errors for different energy ranges. [ABSTRACT FROM AUTHOR]
- Published
- 2023
- Full Text
- View/download PDF
36. Tutorial: Metalorganic chemical vapor deposition of β-Ga2O3 thin films, alloys, and heterostructures.
- Author
-
Bhuiyan, A. F. M. Anhar Uddin, Feng, Zixuan, Meng, Lingyu, and Zhao, Hongping
- Subjects
- *
THIN film deposition , *CHEMICAL vapor deposition , *THIN films , *GALLIUM alloys , *HETEROSTRUCTURES , *CRYSTAL orientation - Abstract
β-phase gallium oxide (Ga2O3) is an emerging ultrawide bandgap (UWBG) semiconductor with a bandgap energy of ∼ 4.8 eV and a predicted high critical electric field strength of ∼8 MV/cm, enabling promising applications in next generation high power electronics and deep ultraviolet optoelectronics. The advantages of Ga2O3 also stem from its availability of single crystal bulk native substrates synthesized from melt, and its well-controllable n-type doping from both bulk growth and thin film epitaxy. Among several thin film growth methods, metalorganic chemical vapor deposition (MOCVD) has been demonstrated as an enabling technology for developing high-quality epitaxy of Ga2O3 thin films, (AlxGa1−x)2O3 alloys, and heterostructures along various crystal orientations and with different phases. This tutorial summarizes the recent progresses in the epitaxial growth of β-Ga2O3 thin films via different growth methods, with a focus on the growth of Ga2O3 and its compositional alloys by MOCVD. The challenges for the epitaxial development of β-Ga2O3 are discussed, along with the opportunities of future works to enhance the state-of-the-art device performance based on this emerging UWBG semiconductor material system. [ABSTRACT FROM AUTHOR]
- Published
- 2023
- Full Text
- View/download PDF
37. UNVEILING THE IMPACT OF ANNEALING ON CHEMICAL BATH DEPOSITION-SYNTHESIZED CALCIUM ZIRCONATE THIN-FILMS: STRUCTURAL, MORPHOLOGICAL, OPTICAL, CHEMICAL COMPOSITION, AND LUMINESCENT CHARACTERISTICS.
- Author
-
KUMAR, N. KARTHICK, KAVITHA, M., KAVITHA, V., and PANDI, P.
- Subjects
- *
CHEMICAL solution deposition , *SUBSTRATES (Materials science) , *THIN film deposition , *DISLOCATION density , *X-ray diffraction - Abstract
The chemical bath deposition method (CBD) was used to create thin films of calcium zirconate on a glass substrate. After that, the samples were annealed for an hour at three different temperatures: 100∘C, 200∘C, and 300∘C. The structural parameters of the samples like lattice strain, dislocation density and crystallite size were calculated from XRD analysis. The lattice strain was found to be very low. The crystallite size confirms the nano-size of the synthesized sample. From UV analysis, the optical energy direct bandgap was calculated in the range of 3.98–4.16eV. A higher annealing temperature of 300∘C causes the thin film’s bandgap to diminish, confirming the calcium zirconate thin film’s broad bandgap characteristics. From SEM analysis, morphology, and adhesive nature was analyzed, and from AFM analysis, the grain size of the sample was found to be in 300nm. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
38. Electrospray Deposition for Electronic Thin Films on 3D Freeform Surfaces: From Mechanisms to Applications.
- Author
-
Lai, Wuxing, Di, Linsen, Zhao, Chenyang, Tian, Yu, Duan, Yongqing, Pan, Yanqiao, Ye, Dong, Jiang, Lang, Guo, Yunlong, He, Gang, Deng, Weiwei, Guan, Yin, and Huang, YongAn
- Subjects
- *
THIN film deposition , *THIN films , *ENERGY conversion , *FLEXIBLE electronics , *3-D films - Abstract
Electronic thin films play a ubiquitous role in microelectronic devices and especially hold great promise for flexible electronics, energy conversion and storage, and biomedical applications. Their characterizations, including ultra‐thin, large‐scale dimensions, stretchability, and conformal ability to curved or 3D structures, present new challenges for thin film fabrication based on the solution method. Electrospray deposition emerges as a feasible method for fabricating large‐area, flexible, and curved films. It offers many advantages such as material adaptability, controlled atomization, tunable film morphology, and shape retention on complex substrates. These advantages make it a key method for fabricating high‐performance films on large‐area, 3D surfaces. This work presents a comprehensive review of the mechanisms, processes, applications, and equipment of electrospray deposition. First, the fundamental principles of electrospray deposition are introduced, focusing on the mechanisms and scaling laws of liquid atomization. Moreover, the control methods for electrospray modes, structures, and film morphology are discussed. These advanced control methods pave the way for the fabrication of smart skins, wearable devices, and energy conversion and storage components. Finally, this work introduces three types of electrospray deposition manufacturing equipment to illustrate the advantages of electrospray deposition for large‐area, and 3D surface manufacturing. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
39. On the Piezoelectric Properties of Zinc Oxide Thin Films Synthesized by Plasma Assisted DC Sputter Deposition.
- Author
-
McKinlay, Michael, Fleming, Lewis, García, Manuel Pelayo, Sierra, Lucía Nieto, Castro, Pilar Villar, Araujo, Daniel, García, Basilio Javier, Gibson, Des, and Nuñez, Carlos García
- Subjects
ZINC oxide thin films ,PLASMA physics ,PIEZOELECTRIC thin films ,THIN films ,SUBSTRATES (Materials science) ,MAGNETRON sputtering ,ZINC oxide films - Abstract
This work presents a study of piezoelectric zinc oxide (ZnO) thin films deposited by a novel post‐reactive sputtering method. The process utilizes a rotating drum with DC magnetron sputtering deposition onto substrates with subsequent DC plasma‐assisted oxidation of the deposited metal to metal oxide. The paper analyzes the influence of plasmaassisted magnetron sputtering (PA‐MS) deposition parameters (O2 plasma source power, O2 flow, and Ar flow) on the morphological, structural, optical, and piezoelectric properties of ZnO thin films. Design of experiments has been utilized to evaluate the role of these parameters on the growth rate (rg) and the properties of resulting films. Results indicate a predominant influence of the plasma power on the rg over other parameters. Among the eight tested samples, three of them show high crystal quality with high intensity (0001) diffraction peak, characteristic of the wurtzite crystalline structure of ZnO, and one of them exhibits piezoelectric coefficient values of ≈11pC N−1. That sample corresponding to a ZnO film deposited at the lowest rg of 0.075 nm s−1, confirmed the key role of the deposition parameters on the piezoelectric response of films, and demonstrated PA‐MS as a promising technique to produce high‐quality piezoelectric thin films. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
40. Rare Earth‐Diamond Hybrid Structures for Optical Quantum Technologies.
- Author
-
Balașa, Ionuț Gabriel, Arranz‐Martinez, María Alejandra, Perrin, Pauline, Ngandeu Ngambou, Midrel, Hebbrecht, Alexandre, Serrano, Diana, Achard, Jocelyn, Tallaire, Alexandre, and Goldner, Philippe
- Subjects
- *
DIAMOND thin films , *OPTICAL fiber networks , *THIN film deposition , *CHEMICAL vapor deposition , *HYBRID materials , *NANODIAMONDS - Abstract
Diamond containing nitrogen‐vacancy centers (NV−) is one of the most investigated materials for quantum technologies, because of this system's exceptional spin properties. Although the NV− optical transition is very bright, it suffers from spectral diffusion and weak zero‐phonon line, and is in the visible range. This limits integration into quantum photonic structures and interfacing with optical fiber networks. In contrast, rare earth (RE) ions exhibit extremely narrow and stable optical transitions, including erbium's 1.5 µm telecom wavelength. Combining RE with NV− properties through short‐range interactions is however challenging as RE do not readily enter the diamond lattice. In this work, a thin‐film‐based architecture in which RE and NV− centers can interact while preserving their unique properties is introduced. Thin films of Er3+:Y2O3 are grown by chemical vapor deposition on diamond substrates with well‐crystallized and highly textured structures. An extensive spectroscopic study of Er3+ transitions at room and low temperatures further reveals that photoluminescence spectra and decays are close to bulk materials. It is also shown that Y2O3 thin film deposition has no detrimental effects on NV− optical and spin properties. RE thin films deposited on diamond can thus be suitable for building hybrid materials for new functionalities in quantum sensing, communication, and processing. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
41. Effect of layer thickness on the thermoelectric properties of fully sprayed poly(3-hexylthiophene-2,5-diyl) thin films doped with chloroauric acid.
- Author
-
Sochor, Benedikt, Schraad, Simon, Huber, Linus F., Hexemer, Alexander, Laarmann, Tim, Vayalil, Sarathlal Koyiloth, Müller-Buschbaum, Peter, and Roth, Stephan V.
- Subjects
THIN film deposition ,THERMOELECTRIC materials ,THIN films ,SEEBECK coefficient ,ELECTRIC conductivity - Abstract
The thermoelectric properties of fully sprayed thin films of poly(3-hexylthiophen-2,5-diyl) (P3HT) doped with chloroauric acid are investigated for different film thicknesses. The film thickness increases logarithmically with increasing amount of deposited material on the surfaces. Both the electrical conductivity and measured Seebeck coefficients of the doped thin films show an optimal polymer layer thickness between 275 and 310 nm and yield a maximum power factor of (1.77 ± 0.22) μ W m · K 2 . The optimum layer thickness results from the optimal amount of dopant molecules per monomer between 1.1 and 1.3 at these ratios of P3HT and HAuCl 4 for the thin film fabrication. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
42. Advanced Molecular Layer Deposition of SixZnyOz Thin Film Coatings for Improved Electrochemical Performance of NMC811.
- Author
-
Akella, Sri Harsha, Mukherjee, Ayan, Lidor‐Shalev, Ortal, Bashkurov, Roman, Wang, Yang, Buchine, Isaac, Wang, Longlong, Zysler, Melina, Ejgenberg, Michal, Kravchuk, Tatyana, Kozen, Alexander C., Bravo‐Zhivotovskii, Dmitry, Apeloig, Yitzhak, Lee, Sang Bok, Fan, Xiulin, Leskes, Michal, and Noked, Malachi
- Subjects
SURFACE passivation ,THIN films ,THIN film deposition ,OXIDIZING agents ,CATHODES - Abstract
The practical realization of Nickel‐rich layered oxide cathode materials such as LiNi0.8Mn0.1Co0.1O2 (NMC811) is hampered by several structural and interfacial instabilities over prolonged cycling. Several reports have proposed surface passivation via an artificial cathode electrolyte interphase (ACEI) as a promising method for mitigating the parasitic reactions affecting NMC811 while simultaneously improving its electrochemical performance over prolonged cycling. Herein, we report an in‐house designed (tBuMe2Si)2Zn single source precursor for developing SixZnyOz ternary CEI thin films on NMC811 via molecular layer deposition (MLD) in combination with O3 or H2O as oxidizing agent. We demonstrate that the single precursor (tBuMe2Si)2Zn avoids the need for two different precursors (Si & Zn). In‐depth spectroscopic studies reveal the mechanism of the formation of organosiloxane/zinc‐oxide composite thin film, via intermediates of unprecedented organo‐silicon‐zinc compounds. Understanding the reaction mechanism paved the path for a successful deposition of ACEI on NMC811. Rate capability studies shows the ACEI protected cathodes exhibit higher discharge capacity at 4 C than pristine NMC811. Furthermore, studies on full cells with graphite anode were conducted to evaluate the practical viability of SixZnyOz ACEI thin films on NMC811. After prolonged cycling the ACEI‐coated NMC811 full cells significantly improved the electrochemical performance than pristine NMC811 by ~12%. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
43. Enhancing the Quality of MOF Thin Films for Device Integration Through Machine Learning: A Case Study on HKUST‐1 SURMOF Optimization.
- Author
-
Pilz, Lena, Koenig, Meike, Schwotzer, Matthias, Gliemann, Hartmut, Wöll, Christof, and Tsotsalas, Manuel
- Subjects
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THIN film devices , *THIN film deposition , *THIN films , *SURFACE roughness , *ELECTRONIC equipment - Abstract
Metal–organic Frameworks (MOFs), especially as thin films, are increasingly recognized for their potential in device integration, notably in sensors and photo detectors. A critical factor in the performance of many MOF‐based devices is the quality of the MOF interfaces. Achieving MOF thin films with smooth surfaces and low defect densities is essential. Given the extensive parameter space governing MOF thin film deposition, the use of machine learning (ML) methods to optimize deposition conditions is highly beneficial. Combined with robotic fabrication, ML can more effectively explore this space than traditional methods, simultaneously varying multiple parameters to improve optimization efficiency. Importantly, ML can provide deeper insights into the synthesis of MOF thin films, an essential area of research. This study focuses on refining an HKUST‐1 SURMOF (surface‐mounted MOF) to achieve minimal surface roughness and high crystallinity, including a quantitative analysis of the importance of the various synthesis parameters. Using the SyCoFinder ML technique, thin film surface quality is markedly enhanced in just three generations created by a genetic algorithm, covering 30 distinct parameter sets. This method greatly reduces the need for extensive experimentation. Moreover, the results enhance the understanding of the vast synthesis parameter space in HKUST‐1 SURMOF growth and broaden the applications of MOF thin films in electronic and optoelectronic devices. [ABSTRACT FROM AUTHOR]
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- 2024
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44. Investigation of Sn-doped WO3 thin films: One-step deposition by hydrothermal technique, characterization, and photoluminescence study.
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Buzhabadi, Hamid, Rahmani, Mohammad Bagher, and Damghani, Mina
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THIN film deposition , *PHOTOLUMINESCENCE measurement , *OPTICAL devices , *OPTOELECTRONIC devices , *DIFFRACTION patterns , *TUNGSTEN oxides , *ELECTROCHROMIC devices , *PHOTOLUMINESCENCE - Abstract
Thin film technology is significant in technological progress and modern research because it allows for the production of optoelectronic devices with improved characteristics. Because of its superior chromatic efficiency, tungsten oxide (WO3) is one of the best candidates for energy-saving applications. In this study, undoped and tin (Sn)-doped WO3 films were grown on top of WO3 seed layers directly by a facile hydrothermal route at a temperature as low as 110∘C for 24 h. The seed layers were also deposited on top of glass substrates using spray pyrolysis. The results of tin doping on the structural, optical, and morphological characteristics of the WO3:Sn films were studied. X-ray diffraction patterns show that peak intensities increase significantly by adding Sn and the films' crystallinity was improved by rising Sn content. In the visible region, the average optical transmittance is around 13% and the optical bandgap changes from 2.61 eV to 2.81 eV, by increasing the dopant amount. Finally, the room temperature photoluminescence of samples shows intense green light emissions. The results of this research can be beneficial for the fabrication and performance optimization of electrical and optical devices such as gas sensors, electrochromic devices, and photosensors. [ABSTRACT FROM AUTHOR]
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- 2024
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45. Bond Formation at Polycarbonate | X Interfaces (X = Al2O3, TiO2, TiAlO2) Studied by Theory and Experiments.
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Patterer, Lena, Ondračka, Pavel, Bogdanovski, Dimitri, Mráz, Stanislav, Pöllmann, Peter J., Karimi Aghda, Soheil, Vašina, Petr, and Schneider, Jochen M.
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SPUTTER deposition ,PHOTOELECTRON spectroscopy ,THIN film deposition ,MOLECULAR dynamics ,DENSITY functional theory - Abstract
Interfacial bond formation during sputter deposition of metal‐oxide thin films onto polycarbonate (PC) is investigated by ab initio molecular dynamics simulations and X‐ray photoelectron spectroscopy (XPS) analysis of PC|X interfaces (X = Al2O3, TiO2, TiAlO2). Generally, the predicted bond formation is consistent with the experimental data. For all three interfaces, the majority of bonds identified by XPS are (C─O)─metal bonds, whereas C─metal bonds are the minority. Compared to the PC|Al2O3 interface, the PC|TiO2 and PC|TiAlO2 interfaces exhibit a reduction in the measured interfacial bond density by 75 and ∼65%, respectively. Multiplying the predicted bond strength with the corresponding experimentally determined interfacial bond density shows that Al2O3 exhibits the strongest interface with PC, while TiO2 and TiAlO2 exhibit ∼70 and ∼60% weaker interfaces, respectively. This can be understood by considering the complex interplay between the metal‐oxide composition, the bond strength, and the population of bonds formed across the interface. [ABSTRACT FROM AUTHOR]
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- 2024
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46. Ultra-shallow p-type doping of silicon by performing atomic layer deposition of Al2O3 thin films onto SiO2/Si.
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Khaldi, Salma, Karadan, Prajith, Killi, Krushnamurty, de Oliveira, Clovis Eduardo Mazzotti, and Yerushalmi, Roie
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ATOMIC layer deposition , *RAPID thermal processing , *THIN film deposition , *THIN films , *SILICON - Abstract
We report an ultra-shallow p-type doping of silicon resulting from the rapid thermal annealing of thin Al2O3 films deposited on intrinsic silicon with a native SiO2 layer, using a common atomic layer deposition process. Characterization revealed a two-stage decrease in sheet resistance, providing insights into the doping mechanism. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
47. Influence of Zinc Ion Concentration on the Structural, Surface Morphology and Optical Properties of Zinc Selenide Thin Films.
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Hile, D. D., Koao, L. F., Swart, H. C., Motloung, S. V., Ahemen, I., and Ndlangamandla, C. L.
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SUBSTRATES (Materials science) , *CHEMICAL solution deposition , *THIN film deposition , *THIN films , *ZINC selenide , *TRANSMITTANCE (Physics) - Abstract
ZnSe thin films were deposited on nonconducting glass substrates using different Zn2+ ion concentrations. The films were deposited at 80∘C for 2.0h via photo-assisted chemical bath technique and annealed for 2.0h at 250∘C. X-ray diffraction revealed a hexagonal structure with preferred orientation along the (002) plane and the average crystallite size decreased from 10.5nm to 6.8nm with increased Zn2+ ions. Raman spectra were used to confirm ZnSe phonon modes whose intensity increased with Zn2+ ion concentrations although with fluctuation. Optical analysis showed higher absorbance and low transmittance in the visible region than near infrared making the thin films good materials for selective absorber surfaces. The band gap increased from 2.52eV to 2.78eV as the Zn2+ ion concentration varied from 0.05% to 0.25%. The presence of the desired elements was confirmed by the EDS. Photoluminescence studies revealed three emission peaks which were all ascribed to defect state levels in ZnSe and all the samples emitted in reddish color according to CIE color chromaticity analysis. The selective absorption, wide band gap and broad emission properties suggest that the material is promising for optoelectronic applications. [ABSTRACT FROM AUTHOR]
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- 2024
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48. Colossal Dielectric Constant of Nanocrystalline/Amorphous Homo-Composite BaTiO 3 Films Deposited via Pulsed Laser Deposition Technique.
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Kondo, Shinya, Murakami, Taichi, Pichon, Loick, Leblanc-Lavoie, Joël, Teranishi, Takashi, Kishimoto, Akira, and El Khakani, My Ali
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PULSED laser deposition , *DIELECTRIC devices , *PERMITTIVITY , *THIN film deposition , *TRANSMISSION electron microscopy - Abstract
We report the pulsed laser deposition (PLD) of nanocrystalline/amorphous homo-composite BaTiO3 (BTO) films exhibiting an unprecedented combination of a colossal dielectric constant (εr) and extremely low dielectric loss (tan δ). By varying the substrate deposition temperature (Td) over a wide range (300–800 °C), we identified Td = 550 °C as the optimal temperature for growing BTO films with an εr as high as ~3060 and a tan δ as low as 0.04 (at 20 kHz). High-resolution transmission electron microscopy revealed that the PLD-BTO films consist of BTO nanocrystals (~20–30 nm size) embedded within an otherwise amorphous BTO matrix. The impressive dielectric behavior is attributed to the combination of highly crystallized small BTO nanograins, which amplify interfacial polarization, and the surrounding amorphous matrix, which effectively isolates the nanograins from charge carrier transport. Our findings could facilitate the development of next-generation integrated dielectric devices. [ABSTRACT FROM AUTHOR]
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- 2024
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49. An Affordable Dual Purpose Spray Setup for Lithium-Ion Batteries Thin Film Electrode Deposition.
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Aivaliotis, Dimitris and Vernardou, Dimitra
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THIN film deposition , *LITHIUM-ion batteries , *SCANNING electron microscopy , *THERMAL stresses , *COMPRESSED air - Abstract
This work presents a versatile and cost-effective spray setup that integrates both compressed air spray and electrospray techniques, specifically designed for small-scale laboratory use. This setup provides researchers with an accessible tool to explore spray methods for growing battery electrodes. While these techniques hold significant industrial promise, affordable and simple methods for their use in research settings have been limited. To address this, the setup includes custom control software and detailed information on costs and materials, offering an easy-to-implement solution. The system was tested with three samples per technique, using identical settings, to evaluate the repeatability of each method and gain insights into the uniformity and structure of the resulting films. The structural and morphological characteristics of the samples were analyzed using X-ray diffraction and scanning electron microscopy. The air-spray samples showed greater consistency and repeatability, whereas the electrospray samples exhibited better deposition results in terms of material coverage and higher crystallinity films. Cracking was observed in the air-spray samples, which was related to thermal stress, and both techniques exhibited solvent evaporation issues. The issues encountered with the setup and samples are summarized, along with possible solutions and the next steps for future upgrades and research. [ABSTRACT FROM AUTHOR]
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- 2024
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50. Evaluating the cradle-to-gate environmental impact and cooling performance of advanced daytime radiative cooling materials to establish a comparative framework for a novel photonic meta-concrete.
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Adams, N., Carlosena, L., and Allacker, K.
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THIN film deposition ,HEAT radiation & absorption ,URBAN heat islands ,HEAT convection ,ENVIRONMENTAL impact analysis - Abstract
Background: By the end of 2050, it is expected that 68% of the population will live in urban areas. A higher density of people living in cities generates an increased urban heat island. Radiative cooling (RC) materials are proposed as a key strategy to mitigate global warming and urban heating. The Horizon 2020 project MIRACLE aims at developing a new RC material based on conventional concrete. This paper presents a framework developed for comparing both the cradle-to-gate environmental impact and cooling potential of the newly developed photonic meta-concrete (or any other new RC material) with existing RC materials. The framework is applied to various RC materials using the generic Ecoinvent v3.6 database. The impact assessment method is in line with the Belgian life cycle assessment method for buildings and covers the 15 environmental impact categories of the EN15804:A2. The cooling performance is assessed by implementing the material spectral emissivity into a thermal model for Brussels and Madrid. Results: The study shows that the sputtering process contributes over 75% to the cradle-to-gate environmental impact of several RC materials, while materials produced without this process, have significantly lower impacts. The assessment of the cooling potential showed that convection heat gains make it difficult to create an all-year round cooling material. The comparison with a conventional building material, a concrete roof tile, hence shows great potential for these RC materials as heating gains during summer are significantly reduced. Analysing cooling performance alongside environmental impact, the study identified two RC materials, i.e. D6 and D10, as the most preferred in both Brussels and Madrid, considering their lower environmental impact and superior performance. Conclusions: The literature review revealed that a standardised way to assess and benchmark RC materials based on their cradle-to-gate environmental impact and cooling performance is lacking to date. This paper hence presents, for the first time, a method to compare RC materials considering these two characteristics. This method allows to identify the most competitive RC materials, which will serve in our study to benchmark the newly developed photonic meta-concrete. [ABSTRACT FROM AUTHOR]
- Published
- 2024
- Full Text
- View/download PDF
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