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1. D2.4 - Integration of Si-based UV-photodiodes into a 0.35 μm modular CMOS platform

Author: S. Thiele, D. Sommer, D. Gäbler, X. Cao, T. B. Chuan, and C. Henkel
Subjects: Materials science, CMOS, law, business.industry, Optoelectronics, Modular design, business, Photodiode, law.invention
Published: 2015
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