81 results on '"Shigeharu Tamura"'
Search Results
2. Illumination to Assist Color Identification in Tritans
- Author
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Yasushi Shigeri and Shigeharu Tamura
- Subjects
business.industry ,Computer science ,Pattern recognition ,Identification (biology) ,Artificial intelligence ,business - Published
- 2018
3. Image Color Conversion by Illumination
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Yasushi Shigeri, Yosuke Okamoto, and Shigeharu Tamura
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Software ,business.industry ,Computer science ,sRGB ,White light ,Computer vision ,Artificial intelligence ,Object (computer science) ,business ,Sample (graphics) ,Image (mathematics) - Abstract
We developed a software program to imitate the color of an object within the range of sRGB on a PC display. The obtained colors were converted from the picture information taken under a white light source, such as D65. Other, arbitrary light sources such as natural sunlight or standard illuminants, could be used in addition to the test illumination. Judging from the sample of the converted pictures, the software functions quite well.
- Published
- 2017
4. Practical color barrier-free illumination for deuteranopia using LEDs
- Author
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Yosuke Okamoto, Yasushi Shigeri, Shigeharu Tamura, Seiji Nakagawa, and Takashi Sakamoto
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Lightness ,Computer science ,Color vision ,business.industry ,General Chemical Engineering ,Additive color ,Human Factors and Ergonomics ,General Chemistry ,Deuteranopia ,Spectral color ,Color model ,Optics ,Primary color ,Computer vision ,Artificial intelligence ,business ,Hue - Abstract
Here, we propose a color barrier-free illumination consisting of white, red, and blue LEDs for people with deuteranopia-type defects in color perception. Color perceptions of 20 volunteers with normal vision and four examinees of deuteranopia were evaluated by both the Ishihara test for color blindness and the Farnsworth Panel D-15 test under color barrier-free illumination. The illumination was comparably effective, not only for discriminating between red and green but also for discrimination of the hues on a color chip continuously. © 2014 Wiley Periodicals, Inc. Col Res Appl, 40, 218–223, 2015
- Published
- 2014
5. A Survey of Colors of Signs and Urban Landscape on the Chromatic Vision Simulator
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Haruyo, ONO and Shigeharu, TAMURA
- Subjects
色覚シュミレーター ,トイレ標識 ,見え方 ,景観 - Abstract
本稿では、私たちが日常生活で目にする印刷物や標識の見え方が、カラーユニバーサルデザインに配慮したデザインが大事だといわれている今日、実態はどのように配慮されているかについて検討している。急速に進展する国際化社会では、視覚表示は文字よりピクトグラムの方が情報を得やすい。また、これらを着色すると人目を引くとの考えから、多くの見る対象が着色されている。 一方、色覚に障害を有する人は日本人の男性では5%弱が先天性赤緑色覚異常で、白人男性の場合は約8%の人が色覚に障害を持つといわれている。更に、我が国は急激な高齢者社会を迎え、文字の細部の識別が困難であるばかりでなく、色彩の識別に問題を抱える人々が増加している社会環境にある。色覚障害についての研究は、個人の色覚判別用の石原式色覚検査表は広く知られている。また、実用を考えた色覚異常による色の見え方についての報告、公共施設の色彩計画について、色覚に関する色覚障害者の見え方への配慮等についての研究は、精力的に発表されている。 色覚に関する基礎研究が大きな成果をあげている中で、これらの成果が実際にはどのように反映されているのか、色覚に障害のある人と色覚に障害のない人が、実際にどのように着色した物を見ているかについて検討したので報告する。
- Published
- 2013
6. Microstructure of Multilayer Fresnel Zone Plate for X-ray Focusing
- Author
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Shigeharu Tamura, Yasuko Terada, Masato Yasumoto, Kentaro Uesugi, A. Takeuchi, Yoshio Suzuki, and Nagao Kamijo
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Materials science ,business.industry ,Resolution (electron density) ,X-ray ,General Medicine ,STEM ,Physics and Astronomy(all) ,Zone plate ,Microstructure ,law.invention ,Fresnel zone plate ,Optics ,law ,Multilayer ,Scanning transmission electron microscopy ,Grain ,business ,Image resolution - Abstract
We have been fabricated the multilayer Fresnel zone plate (FZP) for hard X-ray focusing. The multilayer FZP consists of a series of concentric multilayer of low-Z (Al) zone and high-Z (Cu) zone, alternatively. The spatial resolution of the multilayer FZP is related with the outermost zone width and the smoothness of the multilayer. In case of the concentric multilayer FZP, the undulations were often observed. The smoothness of the multilayer is strongly related with he optical resolution. In this study we reported the microscopic structure of the multilayer FZP with a scanning transmission electron microscope (STEM) observation and discussed the seed of the undulation.
- Published
- 2012
7. Multilevel-type multilayer X-ray lens (Fresnel zone plate) by sputter deposition
- Author
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Nagao Kamijo, Masato Yasumoto, Akihisa Takeuchi, Shigeharu Tamura, Yoshio Suzuki, and Kentaro Uesugi
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Diffraction ,Materials science ,business.industry ,X-ray ,Zone plate ,Sputter deposition ,Condensed Matter Physics ,Diffraction efficiency ,Surfaces, Coatings and Films ,law.invention ,Lens (optics) ,Optics ,law ,Sputtering ,Radiation damage ,business ,Instrumentation - Abstract
We have developed a multilevel-type multilayer X-ray lens (Fresnel zone plate, FZP) using sputter deposition. Such a multilevel-type FZP can attain high diffraction efficiency which results in the reduction of radiation damage to biological specimens and the simplification of the X-ray optical system because unwanted diffraction orders are considerably suppressed. Previously, we have reported the effectiveness (i.e., realizing high diffraction efficiency) of a multilevel multilayer FZP with 4-step structure. This paper presents two experimental results on the FZP: (1) the focusing test of a multilayer FZP with 6-step structure in order to realize higher efficiency and (2) the change over time of the focusing characteristic of the FZP with 4-step structure. For (1), the diffraction efficiency of the 1st order focus and the focused beam size measured by knife-edge scanning were found to be more than 50% and 0.8 μm, respectively, at 41.3 keV, and superior to the previous results. For (2), no significant differences have been observed: it can be said that the multilevel FZP is stable at least for 9 months.
- Published
- 2008
8. Preparation of Fluorine-Containing Indium Tin Oxide Sputtering Targets using Spark Plasma Sintering Process
- Author
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Nagao Kamijo, Tomonari Takeuchi, Hiroyuki Kageyama, Shigeharu Tamura, Nakazawa Hiromi, Atsumi Toshiyuki, Yoshio Suzuki, and Akihisa Takeuchi
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Materials science ,Mineralogy ,Spark plasma sintering ,chemistry.chemical_element ,Indium tin oxide ,Chemical engineering ,chemistry ,Sputtering ,Electrical resistivity and conductivity ,Scientific method ,Materials Chemistry ,Ceramics and Composites ,Surface roughness ,Fluorine ,Thin film - Abstract
Fluorine-containing indium tin oxide (F-ITO) sputtering targets were prepared using spark-plasma-sintering (SPS) process. The initial powder, which was prepared by reacting ITO with HF, was sintered to the 10 cm-disks with nearly 90% of the theoretical density by the SPS process. The resulting disks were consisted of ITO and InOF, and the fluorine content was about 4 at.%. Using the F-ITO disks as sputtering target, thin films were deposited on the glass substrates. The electrical conductivity and optical transmission of the deposited films were comparable to those of the conventional ITO films, while the surface roughness of the films was much improved.
- Published
- 2008
9. New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays
- Author
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Yasuko Terada, Masato Yasumoto, Mitsuhiro Awaji, Nagao Kamijo, Yoshio Suzuki, Kentaro Uesugi, Hidekazu Takano, Shigeharu Tamura, and Akihisa Takeuchi
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Materials science ,Fabrication ,business.industry ,Kinoform ,Aperture ,Synchrotron radiation ,Zone plate ,Condensed Matter Physics ,Diffraction efficiency ,Aspect ratio (image) ,Surfaces, Coatings and Films ,law.invention ,Optics ,law ,Sputtering ,business ,Instrumentation - Abstract
A multilayer (sputtered-sliced) Fresnel zone plate (FZP) is one of the promising focusing optics with high spatial resolution for the high-energy X-ray region. This is because a large “aspect ratio” can be realized easily. In addition, it is important that the kinoform FZP (theoretical diffraction efficiency=100%) can be fabricated by the sputtered-sliced method. This paper presents the experimental results of two new approaches for fabrication of a multilayer FZP for X-rays. (1) To achieve higher diffraction efficiency, a multilevel-type (4-step: quasi-kinoform type) FZP was fabricated. This FZP was composed of concentric multilayers of alternating high-Z, low-Z, and composite materials. The composite material layer was deposited by co-sputtering of high-Z and low-Z materials. (2) To achieve smoother zones (multilayer interfaces) at the conventional-type FZP, each target of a sputtering apparatus with two DC-sputtering guns was surrounded by a cover with an aperture, and Ar gas was supplied inside the cover, which led to the deposition at lower Ar gas pressure. As a result, for the former, the efficiency was improved markedly as compared with conventional FZP, and for the latter, the zone roughness was reduced, which has resulted in the improvement of the spatial resolution of the FZP.
- Published
- 2006
10. Novel application of sputtered-sliced concentric multilayers to various optical elements for synchrotron radiation high-brilliance X-ray beamlines at SPring-8
- Author
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Hidekazu Takano, Akihisa Takeuchi, Nagao Kamijo, Kentaro Uesugi, Masato Yasumoto, Mitsuhiro Awaji, Shigeharu Tamura, and Yoshio Suzuki
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Photon ,Materials science ,Opacity ,business.industry ,X-ray ,Synchrotron radiation ,SPring-8 ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Optics ,Microscopy ,business ,Instrumentation ,Image resolution ,Coherence (physics) - Abstract
Three new types of optical elements for the synchrotron radiation (SR) high-brilliance X-ray beamlines have been developed: (1) a spatial resolution test pattern for X-ray computed tomography (CT), (2) a spatial resolution test pattern for X-ray scanning microscopy, and (3) a condenser device for X-ray imaging microscopy. These optical elements are composed of concentric multilayers of alternating high-Z and low-Z material deposited on a wire substrate. The characteristics of these elements have been tested at the SR facilities of Super Photon ring-8 GeV.Optical element (1) yielded a pattern of alternating opaque and transparent concentric rings with a film thickness of 1 μm. For (2), the test pattern was shown to work well in the high-energy X-ray region at 28 keV.Use of the condenser device with optical element (3) produced an absorption contrast image of a test pattern without modulation by the coherence of the source. These optical elements may play important roles in the future development of various analytical areas with high spatial resolution in the high-energy X-ray region at the SR high-brilliance X-ray beamlines.
- Published
- 2004
11. Rating of Colors Based on Safety Signs and Interior Finishes in the Case of Changing Color Temperature
- Author
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Masami, KONO, Haruyo, OHNO, Hiroaki, SOBAGAKI, Shigeharu, TAMURA, Takashi, HIRAGA, and Kotaro, TAKAHAMA
- Published
- 2004
12. Microbeam of 100 keV x ray with a sputtered-sliced Fresnel zone plate
- Author
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Hidekazu Takano, Yoshio Suzuki, Shigeharu Tamura, Nagao Kamijo, Masato Yasumoto, Mitsuhiro Awaji, and Akihisa Takeuchi
- Subjects
Physics ,Microprobe ,business.industry ,X-ray optics ,Microbeam ,Zone plate ,Photon energy ,law.invention ,Optics ,Beamline ,law ,Focal length ,Focal Spot Size ,business ,Instrumentation - Abstract
Microfocusing of 100 keV x ray with a sputtered-sliced Fresnel zone plate (ss-FZP) has been performed at the 250-m-long beamline (20XU) of SPring-8. The ss-FZP with an outermost zone width 0.16 μm which is composed of 70 layers of alternating Cu and Al layers and having thickness ∼180 μm was fabricated and characterized. The minimum focal spot size attained for the first order focal beam was 0.5 μm with a focal distance 900 mm at a photon energy 100 keV. The total flux of the microprobe was ∼2×106 photons s−1 μm−2.
- Published
- 2003
13. Hard X-ray microscopy activities at SPring-8
- Author
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Hidekazu Takano, A. Takeuchi, M. Yasumoto, Nagao Kamijo, Yoshio Suzuki, Mitsuhiro Awaji, Shigeharu Tamura, Kentaro Uesugi, and Yoshiki Kohmura
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Physics ,Total internal reflection ,Fresnel zone ,business.industry ,Near-field optics ,Scanning confocal electron microscopy ,General Physics and Astronomy ,Zone plate ,law.invention ,Optics ,Beamline ,law ,Microscopy ,business ,Image resolution - Abstract
Development of microfocusing optics for scanning microscopy and image forming optics for imaging microscopy are now in progress in SPring-8 by using varieties of optical devices: refractive lens, total reflection mirrors. Fresnel zone plates, and sputtered-sliced Fresnel zone plates. Spatial resolution of 100 nm has been achieved in scanning microscopy using highly coherent X-ray beam at a 248 m-long beamline 20XU and F2P' focusing optics. Recent results on development of optical systems are described.
- Published
- 2003
14. Sputtered-sliced fabrication of kinoform zone plate for hard X-ray focusing
- Author
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Hidekazu Takano, Masato Yasumoto, Mitsuhiro Awaji, Shigeharu Tamura, A. Takeuchi, Nagao Kamijo, and Yoshio Suzuki
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Physics ,Focal point ,Fabrication ,business.industry ,Kinoform ,X-ray ,General Physics and Astronomy ,Zone plate ,law.invention ,Optics ,Modulation ,law ,business ,Refractive index ,Deposition (law) - Abstract
We are planning to develop a kinoform zone plate (ZP) for hard X-ray using a sputtered-sliced (SS) method with two materials (Cu/Al). The SS kinoform ZP is composed of a Cu/Al multilayer that is based on radial modulation of the refractive indices of deposition materials. The X-ray through the zones interferes constructively at the focal point. The kinoform ZP, therefore, has an advantage of high focusing efficiency. According to the our theoretical calculation, the focusing efficiency of the Cu/Al kinoform PZP is up to 86% in the 0-30 keV X-ray energy region, while one of the conventional Cu/Al multilayer Fresnel zone plate is up to 38%.
- Published
- 2003
15. Application of Concentric Multilayers to Various X-ray Optical System
- Author
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Akihisa Takeuchi, Shigeharu Tamura, Kentaro Uesugi, Masato Yasumoto, Yoshio Suzuki, Mitsuhiro Awaji, Hidekazu Takano, and Nagao Kamijo
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Materials science ,Opacity ,business.industry ,X-ray ,Synchrotron radiation ,Concentric ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Absorption contrast ,Optics ,Microscopy ,Electrical and Electronic Engineering ,business ,Image resolution ,Coherence (physics) - Abstract
Concentric multilayers of alternate high-Z material and low-Z one, deposited on the wire substrate, can be applied to various optical elements for synchrotron radiation (SR) high-brilliance X-ray beamlines. We present new application of the concentric multilayer to optical elements for the SR high-brilliance X-ray beamlines at SPring-8. Three types of Cu/ Al concentric multilayer samples have been fabricated and applied to (1) a spatial resolution test pattern for X-ray computed tomography (CT), (2) a spatial resolution test pattern for the X-ray equipment and (3) a condenser device in the X-ray imaging microscopy. These characteristics have been tested. For the (1), alternate opaque and transparent concentric ring pattern with 2 micron film thickness has been clearly resolved. For the (2), the test pattern can work well in the high energy X-ray region. For the (3), absorption contrast image of a test pattern without modulation by the coherence of the source has been obtained by using the condenser device.
- Published
- 2003
16. Prototype Portable Full-color LED Illumination Panel and Palm-sized Controller
- Author
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Shigeharu Tamura, Hideo Sugimoto, and Takashi Hiraga
- Subjects
Optics ,Led illumination ,business.industry ,Computer science ,Controller (computing) ,Full color ,Electrical and Electronic Engineering ,business ,Computer hardware - Published
- 2012
17. Multilayer Fresnel zone plate for high-energy X-ray by DC sputtering deposition
- Author
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Akihisa Takeuchi, Yoshio Suzuki, Masato Yasumoto, Mitsuhiro Awaji, Toshiyuki Mihara, Nagao Kamijo, Hidekazu Takano, Shigeharu Tamura, and Katsumi Handa
- Subjects
High energy ,Materials science ,business.industry ,X-ray ,Synchrotron radiation ,Substrate (electronics) ,Microbeam ,Surface finish ,Zone plate ,Sputter deposition ,Condensed Matter Physics ,Surfaces, Coatings and Films ,law.invention ,Optics ,law ,business ,Instrumentation - Abstract
A hard X-ray microbeam is a key technology for third-generation high-brilliance synchrotron radiation sources such as SPring-8. A Fresnel zone plate (FZP) is one of the promising focusing elements for X-rays. A multilayer (sputtered–sliced) FZP is suitable for use in hard X-ray region, because large thickness can be available. Zone (multilayer interface) roughness is inevitable to the multilayer FZP, which results in the inferior-focusing characteristic. Some Cu/Al concentric multilayers were fabricated by DC sputtering deposition. In order to reduce the oblique incidence of sputtered atoms on the wire substrate, a cylindrical slit was placed between the target and the wire substrate. As a result, the interface roughness was improved with very good repeatability.
- Published
- 2002
18. Characterization of the sputtered-sliced zone plate for high energy X-rays
- Author
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Yoshiki Kohmura, Nagao Kamijo, Kentaro Uesugi, Masato Yasumoto, Mitsuhiro Awaji, G. Schmahl, D. Rudolph, Yoshio Suzuki, A. Duevel, Shigeharu Tamura, and Akihisa Takeuchi
- Subjects
Physics ,Nuclear and High Energy Physics ,business.industry ,Synchrotron radiation ,Zone plate ,Undulator ,Diffraction efficiency ,Characterization (materials science) ,law.invention ,Optics ,law ,High-energy X-rays ,Focal Spot Size ,business ,Instrumentation ,Beam (structure) - Abstract
A zone plate for hard X-rays with outermost zone width as small as 30 nm and thickness ∼14 μm fabricated by sputtered-sliced technology was evaluated. With the brilliant X-ray beam from the undulator at the SPring-8 the minimum focal spot size attained was ∼0.8 μm at the energy of 18.6 keV. The intrinsic diffraction efficiency was determined to be ∼12%.
- Published
- 2001
19. X-ray imaging microscopy at 25keV with Fresnel zone plate optics
- Author
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Akihisa Takeuchi, Nagao Kamijo, Hidekazu Takano, Masato Yasumoto, Mitsuhiro Awaji, Shigeharu Tamura, and Yoshio Suzuki
- Subjects
Physics ,Nuclear and High Energy Physics ,Microscope ,business.industry ,Resolution (electron density) ,Undulator ,Zone plate ,law.invention ,Optics ,Beamline ,law ,Microscopy ,Fresnel number ,Image sensor ,business ,Instrumentation - Abstract
X-ray imaging microscopy with a sputtered-sliced Fresnel zone plate (SS-FZP) has been developed at an X-ray energy of 25keV. Objects were imaged in transmission with the SS-FZP as an objective with a magnification of 10.2 times, and detected with a X-ray image sensor. The performance of the imaging microscope has been tested with a gold mesh and a resolution test pattern at an undulator beamline 47XU of SPring-8. The resolution test patterns up to 0.5mm line-and-space structures have been resolved. # 2001 Elsevier Science B.V. All rights reserved.
- Published
- 2001
20. [Untitled]
- Author
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Masahito TAGAWA, Hitoshi AKIMICHI, Chiharu MAEDA, Masahiro HIRATA, Shin-ichi NISHIZAWA, Seiji HIROKI, Sadamitsu TANZAWA, Takashi ARAI, Tetsuya ABE, Katsusuke SHIMIZU, Jyun-nosuke NAKATANI, Shizuma KURIBAYASHI, Megumi NAKAMURA, Toru SASAKI, Yoshiro SHIOKAWA, Nozomu HATTORI, Takafumi MORII, Masaaki HIRAI, Masahiko KUSAKA, Motohiro IWAMI, Zhao-Xiong XIE, Kayo IWASE, Ken-ichi TANAKA, Toshimi SUTOU, Tomohiro UMEZAWA, Daisuke ESASHIKA, Shigeru SAITO, Tetsuo SOUMURA, Shuji ISONO, Hideki YAMASAKI, Hakuto MURAKAMI, Masahiko YAMAMOTO, Takuji OYAMA, Takashi IKUNO, Jeong-Tak Ryu, Shigeharu OHKURA, Yang-Gyu Baek, Shin-ichi HONDA, Mitsuhiro KATAYAMA, Masahiko KITAGAWA, Kenjiro OURA, Keiichi FUJIMOTO, Kuei-Yi LEE, Nobuhiko OTA, Shinji SHINABE, Yuto FUKUMA, Yusuke SUETSUGU, Yao-Jane HSU, Yasunori TANIMOTO, Youichirou HORI, Ken-ichi KANAZAWA, Masanori KOBAYASHI, Masahide GOTOH, Koichi SUDOH, Hiroshi IWASAKI, Keisuke KAMETANI, Touichi HATANO, Masato KIUCHI, Katsutoshi TANAKA, Seiji TAKECHI, Satoshi SUGIMOTO, Seiichi GOTO, Tsukasa KOBAYASHI, Ryoki TOBE, Teruo YANAGIHASHI, Tetsuro OBAYASHI, Shigemi SUGINUMA, Tetsuo OGAWA, Kiyohide KOKUBUN, Takashi SEKIDO, Ichiro TAKANO, Yoshio SAWADA, Yoshiaki SAKURAI, Akio OKAMOTO, Toshikazu NOSAKA, Hiroya NAKAJIMA, Hiroshi KODA, Masaaki YOSHITAKE, Toyohito UCHIZONO, Toshiaki YASUI, Hirokazu TAHARA, Takao YOSHIKAWA, Akio SUZUKI, Jun SAKAMOTO, Takeshi MITSUHASHI, Akihito MORI, Takanori AOKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Hiroyuki NAKANO, Hideo FURUHASHI, Toshio YOSHIKAWA, Akinori MAEDA, Yoshiyuki UCHIDA, Kenzo KOJIMA, Asao OHASHI, Shizuyasu OCHIAI, Teruyoshi MIZUTANI, Yasuharu YAMASHITA, Shu KUROKAWA, Akira SAKAI, Tomohide SASAKI, Tetsuro SHIRAO, Nobuhiro KANEKO, Keniche SHUDO, Masatoshi TANAKA, Kaoru OJIMA, Masamichi YOSHIMURA, Kazuyuki UEDA, Joselito LABIS, Akihiko OHI, Toshinori FUJIKI, Tadao TODA, Hiroshi HARIMA, Nobumasa KIWA, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA, Yoichiro YGI, Kiminori KAKITANI, Hiroko KAJI, Akio YOSHIMORI, Kazuhiko HASEGAWA, Wilson A. Dino, Hideaki KASAI, Ayao OKIJI, Katsuhisa CHIDA, Tetsumi TANABE, Yoshitsugu ARAKAKI, Morio YOSHIZAWA, Kouji NODA, Katsuhiro NAKAMURA, Yasushi YAMANO, Shinichi KOBAYASHI, Yoshio SAITO, Yoshihiro SATOH, Tomio KUBO, Hideharu MATSUSHIMA, Ken KASUGA, Hiroki ASARI, Norihiko IMAIZUMI, Kentarou SEKIKAWA, Masahiro SHIBUSAWA, Keisuke TAJIRI, Zenzaburo KABEYA, Yoshikazu NAKAYAMA, Shin AKIDUKI, Kazuhiro HASHIMOTO, Masamitu TAKAHASI, Jun'ichiro MIZUKI, Kazuhisa TAMURA, Toshihiro KONDO, Kohei UOSAKI, Shigeharu TAMURA, Masato YASUMOTO, Nagao KAMIJO, Yoshio SUZUKI, Mitsuhiro AWAJI, Akihisa TAKEUCHI, Hidekazu TAKANO, Hiroshi ITOH, Hidehiko NONAKA, Shingo ICHIMURA, Masahiro TOSA, Kazutaka MITSUISHI, Masaki TAKEGUCHI, Yoshio FUKUDA, Masahiro GOTO, Akira KASAHARA, Kazuo FURUYA, Kazuhiro YOSHIHARA, Kazuhiko MIMOTO, Takashi MATSUMOTO, Kunio OKIMURA, Kimiko SATO, Tsutomu TAKAHASHI, Tadashi NAKAMURA, Naohiro HORII, Akihiro INOUE, Nobuharu OHSAKO, Takeshi MIYASHITA, Kengo HIDAKA, Atsushi TANAKA, Hisahiro TANGE, Yuji TANAKA, Katsumi NISHIMURA, Takashi KOJIMA, Nozomu TAKAGI, Tatsuo WAKAIDA, Takeo HOSAKA, Akira SAKAZAKI, Takahiro OKADA, Akihiro TANAKA, Yasunori Yamamura, Yoshiyuki MIZUNO, Teiichi HOMMA, Sin'ichi INOUE, Yuhjin YAMAZAKI, Toshiaki FUJINO, Tomohisa OKUNO, Ken-ichi OHTOMI, Ken'ichi MIURA, Itsuo ISHIGAMI, Hideaki HOSHINO, Tomoyuki MIZUKOSHI, Fumihiro URATANI, Hiroshi NAKANISHI, Won-chul Moon, Tatsuo YOSHINOBU, Osamu SUEKANE, Masakazu TANAKA, Toshiko OKUI, Katsuhito ARAKAWA, Shigehiko HASEGAWA, Hisao NAKASHIMA, Miwako KUBO, Hiroshi MORIKAWA, Shizuo FUJITA, Shigeo FUJITA, Toshinari YAMAZAKI, Toshio YOSHIZAWA, Toshio KIKUTA, Shigeki HIROBAYASHI, Noriyuki NAKATANI, Tatsuo YAMABUCHI, Masatomo NISHIURA, Toru KANAJI, Makoto TANAKA, and Z. An
- Subjects
Electrical and Electronic Engineering ,Condensed Matter Physics ,Surfaces, Coatings and Films - Published
- 2001
21. [Untitled]
- Author
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Yoshio Suzuki, Hidekazu Takano, Shigeharu Tamura, Yoshiki Kohmura, Nagao Kamijo, Masato Yasumoto, Mitsuhiro Awaji, Akihisa Takeuchi, and Katsumi Handa
- Subjects
Fabrication ,Materials science ,Optics ,law ,business.industry ,Synchrotron radiation ,Electrical and Electronic Engineering ,Zone plate ,Condensed Matter Physics ,business ,Surfaces, Coatings and Films ,law.invention - Abstract
X線集光素子の1つである多層膜フレネルゾーンプレート (FZP) の作製方法, 開発したFZPを利用した集光実験の成果および関連分野の世界の研究動向を紹介した.大型放射光施設SPring-8における集光実験ではトップレベルのデータが得られ, 多層膜FZPは特に高エネルギー領域 (>25keV) の集光にも有効であることがわかった.FZPは連続100時間以上の使用の間, 放射線損傷は観察されなかった.このことから, 高輝度放射光を利用した硬X線顕微鏡の実用化に大きく前進したと言える.測定された性能値を理論値に限りなく近づけるためには, 成膜工程を中心に一層の工夫が必要である.今後, ゾーン (多層膜界面) の平滑性を改善するために成膜条件の検討, 成膜装置の改良を引き続き行うと共に, 多層膜FZPの結像特性の理論的考察も行いたい.また, マイクロビームを利用して微小領域の元素マッピング, 化学状態のイメージングなどを行う予定である.本報告で紹介した以外にも注目すべき新しい硬X線領域用の集光素子が最近相次いで発表され, 今後の進展が期待される.集光テストを行ったSPring-8での利用研究課題の課題番号は, 1999A0091-NM-np, 1999B0080-CM-np, 1999B0103-NM-np, 2000AO160-NM-npである.
- Published
- 2001
22. Fabrication and testing of sputtered-sliced kinoform style Fresnel zone plate
- Author
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Masato Yasumoto, Yasuko Terada, Akihisa Takeuchi, Shigeharu Tamura, Nagao Kamijo, Kentaro Uesugi, and Yoshio Suzuki
- Subjects
Diffraction ,Materials science ,business.industry ,Kinoform ,Synchrotron radiation ,Sputter deposition ,Zone plate ,Condensed Matter Physics ,Diffraction efficiency ,Surfaces, Coatings and Films ,law.invention ,Lens (optics) ,Optics ,Beamline ,law ,business ,Instrumentation - Abstract
The Fresnel zone plate (FZP) is a type of lens for focusing X-rays. We have fabricated a kinoform style FZP with a 30-step structure composed of concentric multilayer of alternating Cu layer, Al layer, and 28 composite material (Cu, Al) layers. The multilayer was deposited using a magnetron sputtering apparatus with two DC-sputtering guns. The focusing characteristics were evaluated at the synchrotron radiation beamline of SPring-8, and the focused beam size measured by knife-edge scanning was 0.8 μm at 40 keV. The peak diffraction efficiencies measured using ion chambers for 1st- and 2nd-order diffraction were 42% and 12% at 40 keV and 20 keV, respectively. High-order X-ray diffraction was also examined using the data obtained from a CCD camera.
- Published
- 2010
23. Focusing efficiency of a multilayer Fresnel zone plate for hard X-ray fabricated by DC sputtering deposition
- Author
-
Shigeharu Tamura, Kunio Yoshida, Hiroshi Kihara, Yoshio Suzuki, Kensuke Murai, and Nagao Kamijo
- Subjects
Materials science ,business.industry ,X-ray ,Synchrotron radiation ,Microbeam ,Zone plate ,Sputter deposition ,Condensed Matter Physics ,Surfaces, Coatings and Films ,law.invention ,Optics ,law ,Sputtering ,business ,Instrumentation - Abstract
A hard X-ray microbeam with submicrometer spot size from third-generation high brilliance synchrotron radiation (SR) sources is expected to be a powerful tool for various fields of research. A Fresnel zone plate (FZP) is one of the promising, focusing elements for X-rays. Focusing efficiency is one of the important features of the FZP. In order to fabricate an FZP with a high focusing efficiency, it is necessary to investigate the relation between the experimental values of the focusing efficiency and the theoretical ones. We have fabricated Ag/C and Cu/Al multilayer (sputtered-sliced) FZPs for use in hard X-ray region, and have compared the measured focusing efficiency data with the calculated ones. The experimental data have been in good agreement with the theoretical values.
- Published
- 2000
24. Quasi-blazed type multilayer zone plate for X-rays
- Author
-
Yasuko Terada, Shigeharu Tamura, Nagao Kamijo, Masato Yasumoto, Akihisa Takeuchi, Kentaro Uesugi, and Yoshio Suzuki
- Subjects
Diffraction ,Range (particle radiation) ,Materials science ,business.industry ,X-ray ,Zone plate ,Condensed Matter Physics ,Diffraction efficiency ,Surfaces, Coatings and Films ,law.invention ,Optics ,Beamline ,law ,Sputtering ,Radiation damage ,business ,Instrumentation - Abstract
In order to attain high diffraction efficiency in high-energy X-ray region, we have developed multilevel-type (6-step) multilayer FZPs with the diameter of 70 μm, which composed of concentric multilayers of alternating high-Z (Cu), low-Z (Al), and four types of composite materials (Cu, Al) layers. Such a multilevel-type FZP with high diffraction efficiency contributes the reduction of the radiation damage to biological specimens, the simplification of the X-ray optical system. Some FZPs are fabricated and their diffraction efficiencies were evaluated at the beamline of SPring-8. For one FZP, the peak efficiency for the 1st-order diffraction of 51% has been obtained at 70 keV. The efficiencies higher than 40% have been achieved in the wide energy range of 70–90 keV. That for the 2nd-order diffraction of 46% has been obtained at 37.5 keV. For another FZP, the peak efficiency for the 1st-order diffraction of 52% has been obtained at 41.3 keV. The efficiencies higher than 45% have been achieved in the wide energy range of 33–49.5 keV.
- Published
- 2009
25. Observation of kinoform-style multilayer Fresnel zone plate by scanning ion microscopy
- Author
-
Yoshio Suzuki, Akihisa Takeuchi, Nagao Kamijo, Shigeharu Tamura, Kentaro Uesugi, and Masato Yasumoto
- Subjects
Materials science ,business.industry ,Kinoform ,Composite number ,Zone plate ,Condensed Matter Physics ,Microstructure ,Focused ion beam ,Surfaces, Coatings and Films ,law.invention ,Optics ,law ,Composite material ,Thin film ,Ion microscopy ,business ,Instrumentation ,Layer (electronics) - Abstract
We investigated a kinoform-style Fresnel zone plate (FZP) that is a high-efficient optical element for hard X-ray focusing. The Cu/Al kinoform-style FZPs were fabricated with a sputtered–sliced method. The FZP was composed of 450 layers (30 layers, 15 pairs) of Al, Cu/Al composite, and Cu. The microstructure of the Cu/Al composite layer was observed by scanning ion microscopy based on a focused ion beam (FIB). In the Cu/Al composite layer, the SIM images obtained by grain orientation contrast observation indicated that the Cu grains were grown gradually with increasing Cu concentration.
- Published
- 2009
26. Optical humidity sensitivity of plasma-oxidized nickel oxide films
- Author
-
Masanori Ando, Shigeharu Tamura, Yoshiyuki Sato, and Tetsuhiko Kobayashi
- Subjects
Materials science ,genetic structures ,Nickel oxide ,Composite number ,Inorganic chemistry ,Non-blocking I/O ,Analytical chemistry ,food and beverages ,Humidity ,General Chemistry ,Plasma ,Condensed Matter Physics ,humanities ,Absorbance ,Wavelength ,General Materials Science ,sense organs ,Thin film - Abstract
We report on the optical humidity sensitivity of nickel oxide (NiO) films prepared by plasma oxidation of nickel–carbon composite films. The plasma-oxidized NiO films showed humidity-sensitive absorbance change at room temperature. The optical absorbance change was strongest at wavelengths around 560 nm. The reversible absorbance change over a wide humidity range of 0–90% RH and the response time within several minutes were obtained with the plasma-oxidized NiO films which is a potential candidate for optical humidity detection.
- Published
- 1999
27. [Untitled]
- Author
-
Satoshi KUROKOUCHI, Masayuki OKABE, Mitsuyoshi SAITO, Shinsaku MORITA, Yoshiro SHIOKAWA, Masakazu ICHIKAWA, Seiichiro KANNO, Tatehito USUI, Koichi SUDOH, Tatsuo YOSHINOBU, Hiroshi IWASAKI, Hiroaki TANAKA, Kimio OKUNO, Tadao MIURA, Touru SUMIYA, Katsuya HONDA, Shun-ichiro TANAKA, Yukio INOKUTI, Kazuhiro SUZUKI, Nastuki TAKAHASHI, Osamu OHKUBO, Yoshihiro SAWAHIRA, Akishige SATO, Naoto KIKUCHI, Eiji KUSANO, Hidehito NANTO, Akira KINBARA, Tetsuya NARUSHIMA, Akiko ITAKURA, Takaya KAWABE, Masahiro KITAJIMA, Masaru KITAGAWA, Toshiyuki OHYA, Hiroyuki NAGAHAMA, Sei-ichiroh YOKOYAMA, Ichiro ARAKAWA, Takashi ADACHI, Takato HIRAYAMA, Koichiro MITSUKE, Makoto SAKURAI, Sin-ichi IGARASHI, Yukiko ABE, Yasuo IRIE, Miyuki KAMBE, Aki TOSAKA, Satoko HAMAMATSU, Satoshi ISHII, Yoshiyuki NORIMITSU, Toshimi SUTOU, Noriyuki UBUKATA, Yoshihiro OINUMA, Shigeru SAITO, Masaaki KATOH, Kenichi TAJIMA, Daisuke HORIMOTO, Takeo OHTE, Akira KOJIMA, Seiya OHI, Takashi SHIOYA, Kazuhiko KOBAYASHI, Hidefumi NAKAJIMA, Satoshi YOKOYAMA, Hiroyuki OBARA, Hajime SAKAI, Yasuhiro OGOSHI, Takuro KOIKE, Koichiro UCHIMURA, Hitoshi TABATA, Tomoji KAWAI, Yutaka HIBINO, Guochun XU, Yasuo SUZUKI, Masao TANIHARA, Yukio IMANISHI, Shigemi SUGINUMA, Masahiro HIRATA, Hitoshi AKIMICHI, Kyoko TAKEUCHI, Yutaka TUZI, Masahiro TOSA, Akira KASAHARA, Kyung Sub LEE, Kazuhiro YOSHIHARA, Tomonari TANAKA, Tadashi SAWADA, Wataru SUGIYAMA, Koyu OTA, Daisuke YAMAUCHI, Shinobu SATO, Masatoshi TANAKA, Masaaki KISHIDA, Masahiko TOMITORI, Kiyotaka ASAKURA, Wang-Jae CHUN, Yasuhiro IWASAWA, Kiminori KAKITANI, Hiroko KAJI, Yoichiro YAGI, Akio YOSHIMORI, Akio OKAMOTO, Toshikazu NOSAKA, Masaaki YOSHITAKE, Souichi OGAWA, Shigeaki NAKAMURA, Nobuo SAITO, Shoji YOSHIOKA, Isamu NAKAAKI, Hideo HASEGAWA, Toshiyuki MIHARA, Shoichi MOCHIZUKI, Shigeharu TAMURA, Hironori KOBAYASHI, Ryoji MAKABE, Tadashi ISHIDA, Yoshiyuki SATO, Masanori ANDO, Tetsuhiko KOBAYASHI, Ayako HIOKI, Kazuki NATSUKAWA, Koji INOUE, Yoshikazu NAKAYAMA, Takayuki SATO, Shinichiro MICHIZONO, Yoshio SAITO, Shinichi KOBAYASHI, Kiyohide KOKUBUN, Yuuki WATANABE, Heizo TOKUTAKA, Kikuo FUJIMURA, Tatsuo SHIMIZU, Yasushiro NISHIOKA, Hideki TANAKA, Hiroyuki WAKIMOTO, Toshihiko MIYAZAKI, Goro MIZUTANI, Sukekatsu USHIODA, Yoshitake YAMAGUCHI, Satoru TAKAKUSAGI, Makoto KATO, Yuji SAKAI, Akira KUROKAWA, Shingo ICHIMURA, Ken NAKAMURA, Takanori AOKI, Syogo TODA, Akio SUZUKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Kazuaki HAMAJI, Yoshiharu KAKEHI, Tsutom YOTSUYA, Norihiro MATSUOKA, Yoshitsugu TSUTSUMI, Hideki TOMIOKA, Yoshio OKAMOTO, Kensuke MURAI, Masato YASUMOTO, Norimasa UMESAKI, Hirohiko NAKANO, Toshiaki TATSUTA, Jiro MATSUO, Isao YAMADA, Hiroyuki MAGARA, Osamu TABATA, Touichi HATANO, Masatoshi KOTERA, Kiyoshi YAMAGUCHI, Naohiro HORII, Kunio OKIMURA, Akira SHIBATA, Hiroshi MURAKAMI, Ikuya KAMEYAMA, Satoru SUKENOBU, Kazuhiko MIMOTO, Takashi MATSUMOTO, Takafumi YOSHIKAWA, Masato KIUCHI, Seiichi GOTO, Masatoshi OHBA, Yoshiaki AGAWA, Kazuma SHIBUTANI, Hiroshi TSUJI, Yasuhito GOTOH, Junzo ISHIKAWA, Hiroki KAWADA, Hiroyuki KITSUNAI, Nobuo TSUMAKI, Masanori KATSUYAMA, Shinichi SUZUKI, Katsuto TANAHASHI, Yuichi KAWAMURA, Naohisa INOUE, Yoshikazu HOMMA, Michimasa KIKUCHI, Kazumasa ISHIKAWA, Teiichi HOMMA, Yoshinori SUGANUMA, Nan LI, Katsuyoshi KOBAYASHI, Nobuyoshi SAKAKIBARA, Yoshiki UENO, Masayuki AOKI, Toshiaki YASUI, Keito MORIMOTO, Hirokazu TAHARA, Takao YOSHIKAWA, Hidekazu KODERA, Masahiko UOTA, Yoshihiro SATOH, Tomio KUBO, Kozo MOCHIJI, Naoshi ITABASHI, Hiroshi SHIMIZU, Shunsuke OHTANI, Kazuhiko OKUNO, and Nobuo KOBAYASHI
- Subjects
Electrical and Electronic Engineering ,Condensed Matter Physics ,Surfaces, Coatings and Films - Published
- 1999
28. Fabrication of One-dimensional Fresnel Zone Plate for Hard X-ray Focusing
- Author
-
Masato Yasumoto, Kentaro Uesugi, Yoshio Suzuki, Shigeharu Tamura, Nagao Kamijo, and Akihisa Takeuchi
- Subjects
Materials science ,Fabrication ,Optics ,law ,business.industry ,X-ray ,Electrical and Electronic Engineering ,Zone plate ,Condensed Matter Physics ,business ,Surfaces, Coatings and Films ,law.invention - Published
- 2007
29. Large-Area Deposition of Tin Oxide Film by Photochemical Vapour Deposition
- Author
-
Hironori Kobayashi, Shoichi Mochizuki, Toshiyuki Mihara, Osamu Tabata, Tadashi Ishida, Hiroyuki Magara, Toshiaki Tatsuta, Ryoji Makabe, and Shigeharu Tamura
- Subjects
Materials science ,Analytical chemistry ,Substrate (electronics) ,Vapour deposition ,Condensed Matter Physics ,Photochemistry ,Tin oxide ,Lower temperature ,Surfaces, Coatings and Films ,law.invention ,Mercury-vapor lamp ,Light source ,Electrical resistivity and conductivity ,law ,Electrical and Electronic Engineering ,Deposition (chemistry) - Abstract
The tin oxide (SnO2) films are thermally and chemically stable, and have been applied to various fields. The SnO2 (non-doped) films were prepared by a photochemical vapour deposition (photo-CVD) process. TMT (Sn (CH3) 4) and O2 (containing 4 mol.% O3) were used as the source materials, and a low-pressure mercury lamp was used as the light source. By the combination of a linearly focused low-pressure mercury lamp through a semi-cylindrical suprasil window and a reciprocation of the substrate, a good uniformity along the 8 cm ×10 cm area was realised at a substrate temperature of 200 and 250°C. The SnOO2 films prepared at lower temperature had better uniformity. The minimum resistivity of 6.8 × 10-3Ω·cm was obtained at a substrate temperature of 250°C.
- Published
- 1998
30. Hard X-ray Microbeam Experiment at the Tristan Main Ring Test Beamline of the KEK
- Author
-
Shigeharu Tamura, Akihisa Takeuchi, K. Ohsumi, Hiroshi Sugiyama, Nagao Kamijo, S. Yamamoto, Masami Ando, Yoshio Suzuki, and Katsumi Handa
- Subjects
Physics ,Nuclear and High Energy Physics ,Radiation ,business.industry ,X-ray ,Microbeam ,Zone plate ,Ring (chemistry) ,law.invention ,Core (optical fiber) ,Optics ,Beamline ,law ,Microscopy ,business ,Instrumentation ,Scanning microscopy - Abstract
A hard X-ray microbeam with zone-plate optics has been tested at the MR-BW-TL beamline on the Tristan main ring of the KEK, and preliminary experiments on scanning microscopy have also been performed. A sputtered-sliced Fresnel zone plate with an Au core and Ag/C multilayer is used as an X-ray focusing device. The outermost zone width of the zone plate is 0.25 microm. A focused spot size of approximately 0.5 mum has been achieved at an X-ray energy of 8.54 keV. In a scanning X-ray microscopy experiment, test patterns with submicrometer fine structure have been clearly resolved.
- Published
- 1997
31. Fabrication and Testing of Cu/Al Multilayer Fresnel Zone Plate
- Author
-
Kakuji Mori, Kazuo Ohtani, Yoshio Suzuki, Kunio Yoshida, Taizo Maruhashi, Shigeharu Tamura, Hiroshi Kihara, and Nagao Kamijo
- Subjects
Materials science ,Fabrication ,Optics ,law ,business.industry ,Electrical and Electronic Engineering ,Zone plate ,Condensed Matter Physics ,business ,Surfaces, Coatings and Films ,law.invention - Published
- 1997
32. Physical Properties of Tantalum Pentoxide Thin Film Fbricated by RF-Magnetron Sputtering Method
- Author
-
Kunio Yoshida, Kanyoshi Ochi, Tomosumi Kamimura, H. Yoshida, Hazime Kanou, Shigeharu Tamura, Hisanori Fujita, Fumio Tani, and Michio Sunagawa
- Subjects
chemistry.chemical_compound ,Materials science ,chemistry ,business.industry ,Tantalum pentoxide ,Optoelectronics ,Electrical and Electronic Engineering ,Sputter deposition ,Thin film ,Condensed Matter Physics ,business ,Surfaces, Coatings and Films - Published
- 1997
33. Development of large-field high-resolution hard x-ray imaging microscopy and microtomography with Fresnel zone plate objective
- Author
-
Akihisa Takeuchi, Yasuko Terada, Yoshio Suzuki, Kentaro Uesugi, and Shigeharu Tamura
- Subjects
Materials science ,Microscope ,business.industry ,Zernike polynomials ,Resolution (electron density) ,Magnification ,Zone plate ,law.invention ,symbols.namesake ,Optics ,law ,Dimensional metrology ,Microscopy ,symbols ,business ,Image resolution - Abstract
A hard x-ray imaging microscope system of high spatial resolution and large field of view (FOV) has been developed at the beamline 37 XU of SPring-8. By utilizing the 30 m-long experimental station, large magnification can be attained with a large diameter Fresnel zone plate (FZP) objective. Some configurations of microscope systems were tested. In a typical condition, a magnification of 133 and a FOV of 123 μm are attained using a FZP with a diameter of 310 μm and an outermost zone width of 100 nm, and the spatial resolution evaluated by observing resolution test chart is 160 nm in full pitch of periodic object with an exposure time of 1 s. When a FZP with an outermost zone width of 50 nm is used, a spatial resolution better than 100 nm is achieved. Phase-contrast imaging by Zernike’s method was also tested, and three dimensional measurement by computer tomography (CT) method was also carried out.
- Published
- 2013
34. Electrochromic Properties of Nickel Oxide Films Prepared by the Oxidation of Nickel-Carbon Composite Films
- Author
-
Yoshiyuki Sato, Shigeharu Tamura, and Kensuke Murai
- Subjects
Thermal oxidation ,Materials science ,Physics and Astronomy (miscellaneous) ,Nickel oxide ,Non-blocking I/O ,Inorganic chemistry ,General Engineering ,chemistry.chemical_element ,General Physics and Astronomy ,Nickel ,Carbon film ,Chemical engineering ,chemistry ,Electrochromism ,Basic solution ,Cyclic voltammetry - Abstract
Electrochromic (EC) nickel oxide (NiO) films were prepared either by plasma oxidation of vacuum-deposited nickel-carbon (Ni–C) composite films or by thermal oxidation of those films. EC properties of the NiO films were measured by cyclic voltammetry in 1 M KOH. The degree of electrochromism in the NiO films depended not only on the Ni-to-C (Ni/C) ratio in the Ni–C films but also on the oxidation conditions of the Ni–C films. The NiO film with a Ni/C ratio of ∼0.6 showed the longest cycling ability among the films with three different Ni/C ratios (∼0.3, ∼0.6 and ∼1.2). The NiO film thermally oxidized at 500° C showed smaller transmission modulation and passed charge density than the plasma oxidized film, but could be electrochemically switched for more than 5000 cycles without serious residual coloration.
- Published
- 1996
35. Highly conductive transparent F-doped tin oxide films were prepared by photo-CVD and thermal-CVD
- Author
-
Shoichi Mochizuki, Hiroyuki Magara, Shigeharu Tamura, Sung Ho Shin, Jung il Park, Toshiyuki Mihara, Tadashi Ishida, and Osamu Tabata
- Subjects
Thermal cvd ,Materials science ,Doping ,Metals and Alloys ,Mineralogy ,Surfaces and Interfaces ,Substrate (electronics) ,Chemical vapor deposition ,Tin oxide ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Chemical engineering ,Materials Chemistry ,Thin film ,Electrical conductor - Abstract
Although high-quality SnO 2 films have been prepared above 400°C, we prepared highly-conductive transparent F-doped SnO 2 films below about 350°C and at high growth rates, using a new raw material system of Sn(CH 3 ) 4 , O 2 containing 5 mol.% O 3 , and HF-acid. At a substrate temperature of 350°C, the films, which had properties such as sheet resistances of 1.6 and 4.5 Ω /□, resistivities of 3.4 and 4.5 × 10 −4 Ω cm, and transmittances including substrates of 70% and 80% at 550 nm, were prepared by thermal-CVD and photo-CVD (chemical vapour deposition), respectively. Several optical and electrical properties of the films prepared by both CVD methods were compared.
- Published
- 1996
36. Electrochromism in nickel oxide films prepared by plasma oxidation of nickel-carbon composite films
- Author
-
Kensuke Murai, Shigeharu Tamura, Shoichi Mochizuki, Toshiyuki Mihara, and Yoshiyuki Sato
- Subjects
Materials science ,Nickel oxide ,Inorganic chemistry ,Non-blocking I/O ,Composite number ,chemistry.chemical_element ,General Chemistry ,Plasma ,Electrolyte ,Condensed Matter Physics ,Nickel ,chemistry ,Electrochromism ,General Materials Science ,Carbon - Abstract
We report on a novel dry process for preparing NiO films by plasma oxidation of NiC composite films, which have been deposited by co-evaporation of Ni and C from two different sources. After being hydrated in KOH electrolyte, the NiO films show fast response and good cycling ability.
- Published
- 1996
37. Fabrication of Ag/C Multilayer Zone Plates for X-ray
- Author
-
Shigeharu Tamura, Yoshio Suzuki, Nagao Kamijo, Kazuo Ohtani, and Hiroshi Kihara
- Subjects
Fabrication ,Materials science ,business.industry ,X-ray ,Optoelectronics ,Electrical and Electronic Engineering ,Condensed Matter Physics ,business ,Surfaces, Coatings and Films - Published
- 1995
38. [Untitled]
- Author
-
Kunio Okimura, Tomohiro Umezawa, Kentarou Sekikawa, Hitoshi Akimichi, Chiharu Maeda, Shigehiko Hasegawa, Asao Ohashi, Megumi Nakamura, Yao-Jane Hsu, Seiji Takechi, Tetsuro Shirao, Keiichi Fujimoto, Atsushi Tanaka, Tetsuya Abe, Tomohisa Okuno, Mitsuhiro Katayama, Satoshi Sugimoto, Shizuma Kuribayashi, Toshimi Sutou, Teiichi Homma, Masaki Takeguchi, Hisahiro Tange, Akinori Maeda, Zhao-Xiong Xie, Ken'ichi Miura, Jyun-Nosuke Nakatani, Yasushi Yamano, Masahiro Tosa, Jun'ichiro Mizuki, Hiroko Kaji, Masaaki Yoshitake, Shigeharu Ohkura, Hiroki Asari, Z. An, Akihiro Inoue, Shin-Ichi Nishizawa, Toru Sasaki, Akira Kasahara, Tetsuo Soumura, Akio Yoshimori, Nobuhiro Kaneko, Yoshio Sawada, Hideki Yamasaki, Yoshiro Shiokawa, Hiroshi Itoh, Junzo Ishikawa, Masamichi Yoshimura, Kazuhiko Mimoto, Tsutomu Takahashi, Tatsuhiko Matsushita, Kazuyuki Ueda, Takuji Oyama, Toshihiro Kondo, Tadao Toda, Yoshikazu Nakayama, Morio Yoshizawa, Kiyohide Kokubun, Ichiro Takano, Nozomu Takagi, Akira Sakai, Masahiro Shibusawa, Masatomo Nishiura, Takao Yoshikawa, Shizuyasu Ochiai, Nobuhiko Ota, Hideharu Matsushima, Masaaki Hirai, Masakazu Tanaka, Masahiko Kusaka, Akira Sakazaki, Tomoyuki Mizukoshi, Toshikazu Nosaka, Tomio Kubo, Shigeru Saito, Shuji Isono, Yuhjin Yamazaki, Sadamitsu Tanzawa, Hiroshi Iwasaki, Kazuhiro Yoshihara, Kimiko Sato, Toshinori Fujiki, Masahiro Goto, Osamu Suekane, Yasunori Yamamura, Takashi Arai, Tsukasa Kobayashi, Shigemi Suginuma, Joselito Labis, Kazuhiko Hasegawa, Jun Sakamoto, Shin-Ichi Honda, Yasuharu Yamashita, Takashi Sekido, Shu Kurokawa, Kaoru Ojima, Naohiro Horii, Keniche Shudo, Teruyoshi Mizutani, Tatsuo Yamabuchi, Masanori Kobayashi, Wilson Agerico Diño, Keisuke Tajiri, Hiroshi Koda, Masahiko Kitagawa, Kiminori Kakitani, Akihito Mori, Yusuke Suetsugu, Hirokazu Tahara, Masahito Tagawa, Takashi Matsumoto, Katsuhito Arakawa, Hiroshi Harima, Ryoki Tobe, Noriyuki Nakatani, Ken Kasuga, Kengo Hidaka, Yuto Fukuma, Fumihiro Uratani, Katsusuke Shimizu, Yoshitsugu Arakaki, Takeshi Miyashita, Seiji Hiroki, Tetsuo Ogawa, Kazuhisa Tamura, Kuei-Yi Lee, Akihiro Tanaka, Shinichi Kobayashi, Takanori Aoki, Masatoshi Tanaka, Tadashi Nakamura, Ken-Ichi Ohtomi, Akihiko Ohi, Yuji Tanaka, Takeshi Mitsuhashi, Nozomu Hattori, Teruo Yanagihashi, Sin'ichi Inoue, Koichi Sudoh, Shin Akiduki, Masato Kiuchi, Katsuhisa Chida, Toshiko Okui, Yoshio Fukuda, Jeong-Tak Ryu, Makoto Tanaka, Masahiro Hirata, Ayao Okiji, Miwako Kubo, Tomohide Sasaki, Daisuke Esashika, Tatsuo Yoshinobu, Akihisa Takeuchi, Norihiko Imaizumi, Tetsumi Tanabe, Masato Yasumoto, Hidekazu Takano, Kazuo Furuya, Kenzo Kojima, Toru Kanaji, Yoshiaki Sakurai, Touichi Hatano, Takahiro Okada, Takashi Kojima, Keisuke Kametani, Hiroshi Nakanishi, Toshio Kikuta, Shingo Ichimura, Kohei Uosaki, Itsuo Ishigami, Motohiro Iwami, Takeo Hosaka, Hidehiko Nonaka, Shigeo Fujita, Hiroyuki Nakano, Toshiaki Fujino, Kayo Iwase, Yasunori Tanimoto, Ken-ichi Kanazawa, Toyohito Uchizono, Yang-Gyu Baek, Shizuo Fujita, Yoshio Saito, Shigeharu Tamura, Shinji Shinabe, Yoichiro Ygi, Katsuhiro Nakamura, Nobumasa Kiwa, Mitsuhiro Awaji, Takashi Ikuno, Hakuto Murakami, Youichirou Hori, Toshiaki Yasui, Toshinari Yamazaki, Tetsuro Obayashi, Kazutaka Mitsuishi, Akio Okamoto, Hideaki Kasai, Takafumi Morii, Masamitu Takahasi, Yasuhito Gotoh, Hideo Furuhashi, Ken-Ichi Tanaka, Hiroya Nakajima, Masahiko Yamamoto, Hiroshi Morikawa, Hiroshi Tsuji, Zenzaburo Kabeya, Katsutoshi Tanaka, Kenjiro Oura, Katsumi Nishimura, Masahiro Okuda, Won-Chul Moon, Tatsuo Wakaida, Toshio Yoshikawa, Hisao Nakashima, Hideaki Hoshino, Nagao Kamijo, Shigeki Hirobayashi, Kouji Noda, Akio Suzuki, Yoshio Suzuki, Masahide Gotoh, Yoshihiro Satoh, Yoshiyuki Mizuno, Kazuhiro Hashimoto, Yoshiyuki Uchida, Seiichi Goto, Nobuharu Ohsako, and Toshio Yoshizawa
- Subjects
Electrical and Electronic Engineering ,Condensed Matter Physics ,Surfaces, Coatings and Films - Published
- 1995
39. Materials for multilayer zone plates: development of a focusing element for use in SR photo-excited processes
- Author
-
Shigeharu Tamura, N. Kamijo, and K. Ohtani
- Subjects
Fabrication ,Materials science ,business.industry ,General Physics and Astronomy ,Synchrotron radiation ,Surfaces and Interfaces ,General Chemistry ,Microbeam ,Surface finish ,Zone plate ,Condensed Matter Physics ,Surfaces, Coatings and Films ,law.invention ,Smooth surface ,Optics ,law ,Excited state ,Optoelectronics ,Development (differential geometry) ,business - Abstract
A synchrotron radiation hard X-ray microbeam (SR) will be a new powerful tool for SR photo-excited material fabrication processes. A multilayer zone plate (ZP) fabricated by a sputtered-sliced technique is expected to be a hopeful optical element to form a hard X-ray microbeam. Four types of concentric multilayers (W /C, Cr/C, Ag/C and Cu/C) were fabricated in order to find usable materials for the multilayer ZP, because the roughness of the multilayer interface reduces the focusing performance of the ZP. The Ag/C multilayer was the most suitable ZP material because of less interface roughness and a smooth surface configuration.
- Published
- 1994
40. Multilayer Fresnel Zone Plate with High-Diffraction Efficiency: Application of Composite Layer to X-Ray Optics
- Author
-
Shigeharu Tamura
- Subjects
Wavelength ,Water window ,Optics ,law ,business.industry ,Fresnel zone antenna ,X-ray optics ,Synchrotron radiation ,Thin film ,Zone plate ,Diffraction efficiency ,business ,law.invention - Abstract
Composite materials are widely utilized in a number of fields, such as materials science, metallurgy, polymer science, interface science, mechanical engineering and aerospace engineering. In this chapter, as an application of a composite material layer (thin film) produced by co-sputtering to the hard X-ray focusing optical technique, a multilayer Fresnel zone plate (ML-FZP) with high diffraction efficiency is described. X-rays in the energy region of 100 – 2,000 eV (2 keV) are called soft X-rays (Snigirev & Snigireva, 2008), while those with higher energy are called hard X-rays. Soft X-rays, especially in the “water window” region (Spiller, 1994), are mainly used in the field of biotechnology. On the other hand, hard X-rays are used in various research fields, including materials science, environmental science and medical science. High brilliant hard X-ray beams with submicronor nanometre-scale spot sizes generated by third-generation synchrotron radiation (SR) facilities such as the APS (USA), ESRF (France) or SPring-8 (Japan), especially for use in the high-energy region, have great potential for use in various fields of research. They are remarkably powerful tools. Recently, higher energy (shorter wavelength) X-ray beams above 20 keV have been utilised in a number of applications, including residual stress measurement in metal matrix composites at 40 keV (Korsunsky & Wells, 2000), local strain measurement within bulk materials at 52 and 90 keV (Lienert et al., 2000), a novel experimental scheme for high-resolution X-ray analysis of deeply buried interfaces at 71.3 keV (Reichert et al., 2003), study of the ice–SiO2 model interface, using X-ray transmission–reflection scheme at 71.3 keV (Engemann et al., 2004), mapping of Sr in (Ba,Sr)TiO3 dielectric ceramics using Ka fluorescence X-rays at 25 keV (Takeuchi et al., 2005), micro-XRF (X-ray fluorescence) analysis of heavy metals in the cells of hyperaccumulator plants at 37 and 75 keV (Terada et al., 2004; Terada et al., 2005), non-destructive imaging of integrated circuits (ICs) at 25 keV, and imaging of Au mesh by three types of X-ray microscopy at 82 keV (Awaji et al., 2003; Suzuki et al., 2006). In addition, microscopic imaging of Au mesh at 200 keV has also been reported (Kamijo et al., 2009). Many types of focusing optics have been developed for hard X-rays and their focusing abilities have been improved over the past two decades. Especially within the last several years, there have been dramatic changes in the performances of focusing optics. The main types of focusing optics and their performances are shown in Fig. 1.
- Published
- 2011
41. Maskless fabrication of contact vias by focused MeV heavy ion beam
- Author
-
A. Kinomura, Mikio Takai, Masato Kiuchi, Shigeharu Tamura, Akiyoshi Chayahara, Yuji Horino, Yoshiaki Mokuno, and Kanenaga Fujii
- Subjects
inorganic chemicals ,Nuclear and High Energy Physics ,Materials science ,Fabrication ,Passivation ,business.industry ,Analytical chemistry ,chemistry.chemical_element ,Conductivity ,Fluence ,Ion ,Nickel ,chemistry ,otorhinolaryngologic diseases ,Optoelectronics ,Breakdown voltage ,business ,Instrumentation ,Layer (electronics) - Abstract
A focused MeV nickel ion beam was used for making contact vias in a multilayer structure through a passivation layer. The structures had two aluminum layers isolated by a Si3N4 insulating layer. The distribution of implanted nickel ions was controlled by changing the implantation energy. After the implantation, current-voltage characteristics between the two aluminum layers were measured by a two-point probe method. When the distribution of nickel was adjusted at the Si3N1 insulating layer, electrical conduction was observed at the nickel fluence of 1 × 1017–2 × 1018 ions/cm2, and it was found that the conductivity was increased and the breakdown voltage was decreased as the fluence of nickel ions increased.
- Published
- 1993
42. Orientation of PbTiO3 Thin Films Prerared by Sputter-Assisted Plasma CVD
- Author
-
Toshiyuki Mihara, Ryoji Makabe, Shoichi Mochizuki, Saburo Kimura, and Shigeharu Tamura
- Subjects
Materials science ,Electrical and Electronic Engineering ,Condensed Matter Physics ,Surfaces, Coatings and Films - Published
- 1993
43. High Color Rendering Properties of Full-color LED Light Equipment at AIST
- Author
-
Takashi Hiraga, Shigeharu Tamura, and Hideo Sugimoto
- Subjects
Optics ,business.industry ,Computer science ,High color ,Light equipment ,Full color ,Electrical and Electronic Engineering ,business ,Rendering (computer graphics) - Published
- 2014
44. Electrochemical property of tin oxide thin film by photo-CVD process
- Author
-
Hiroyuki Kageyama, Shigeharu Tamura, Yoshifumi Yamamoto, Shoichi Mochizuki, Yasushi Uebou, Hironori Kobayashi, Tadashi Ishida, Toshiyuki Mihara, and Mitsuharu Tabuchi
- Subjects
Diffraction ,Renewable Energy, Sustainability and the Environment ,Chemistry ,Inorganic chemistry ,Energy Engineering and Power Technology ,Chemical vapor deposition ,Alkali metal ,Electrochemistry ,Tin oxide ,Chemical engineering ,Source material ,Voltage range ,Electrical and Electronic Engineering ,Physical and Theoretical Chemistry ,Thin film - Abstract
The tin oxide (SnO 2 ) films were prepared by a photo-CVD process and characterized by X-ray diffraction (XRD) and electrochemical measurements. The SnO 2 films prepared at 473 and 523 K showed amorphous-like hallow pattern, while the SnO 2 film prepared at 573 K showed a poor crystalline pattern. All the Li/SnO 2 cells showed the reversible capacity of 600 mAh/g in the voltage range of 0.1–0.8 V over 200 cycles. It was clarified that the SnO 2 film showing superior electrochemical performance was prepared at low temperature of 473 K using TMT (Sn(CH 3 ) 4 ) and O 2 (containing 4 mol.% O 3 ) as the source material.
- Published
- 2001
45. X-ray microbeam with sputtered-sliced Fresnel zone plate at SPring-8 undulator beamline
- Author
-
Hidekazu Takano, Yoshio Suzuki, Yoshiki Kohmura, Masato Yasumoto, Mitsuhiro Awaji, Akihisa Takeuchi, Nagao Kamijo, Shigeharu Tamura, and Katsumi Handa
- Subjects
Physics ,Nuclear and High Energy Physics ,business.industry ,X-ray ,Synchrotron radiation ,Microbeam ,SPring-8 ,Undulator ,Zone plate ,law.invention ,Wavelength ,Optics ,Beamline ,law ,business ,Instrumentation - Abstract
A hard X-ray microbeam created from a sputtered-sliced Fresnel zone plate has been tested at SPring-8 undulator beamline. Focusing properties are evaluated in the X-ray wavelength regions of 0.15– 1.5 A . The measured focal beam size is about 0.6 μm at an X-ray wavelength of 1.4 A . In a scanning microscopy experiment, resolution-test-patterns with 0.2 μm structure are resolved at an X-ray wavelength of 0.45 A .
- Published
- 2001
46. Influence of UV light irradiation on film thickness distribution of tin oxide films by photochemical vapour deposition
- Author
-
Tadashi Ishida, Shigeharu Tamura, T. Tatsuta, Toshiyuki Mihara, Shoichi Mochizuki, and Hiroyuki Magara
- Subjects
Chemistry ,Tetramethyltin ,Analytical chemistry ,General Physics and Astronomy ,Light irradiation ,Surfaces and Interfaces ,General Chemistry ,Vapour deposition ,Condensed Matter Physics ,Photochemistry ,Tin oxide ,Surfaces, Coatings and Films ,law.invention ,Mercury-vapor lamp ,chemistry.chemical_compound ,Wavelength ,Light intensity ,law ,Phase (matter) - Abstract
Tin oxide (non-doped) films have been prepared by a photochemical vapour deposition (photo-CVD) from Tetramethyltin (TMT) (Sn(CH3)4) and O2 (containing O3). A low-pressure mercury lamp was used as the light source. The effect of the UV light irradiation on the film thickness distribution along 5 cm×5 cm area was examined. By piling Teflon films on the surface of the suprasil window, the light intensity of 184.9 nm UV wavelength of the low-pressure mercury lamp was controlled, while that of 253.7 nm wavelength through the Teflon hardly changed. As a result, the uniformity of the film thickness distribution was improved as the light intensity (184.9 nm) increased. The UV 184.9 nm light irradiation may have improved the uniformity of the reactive species distribution in the vapour phase, which may result in the formation of the uniform thickness distribution.
- Published
- 2001
47. Crystal structure and deposition rate of PbTiO3 films prepared on glass and platinum substrate by rf sputtering
- Author
-
Shoichi Mochizuki, Toshiyuki Mihara, Shigeharu Tamura, and Tadashi Ishida
- Subjects
Materials science ,General Physics and Astronomy ,Mineralogy ,Surfaces and Interfaces ,General Chemistry ,Substrate (electronics) ,Sputter deposition ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Amorphous solid ,chemistry.chemical_compound ,Chemical engineering ,chemistry ,Sputtering ,visual_art ,visual_art.visual_art_medium ,Ceramic ,Lead titanate ,Thin film ,Perovskite (structure) - Abstract
Lead titanate (PbTiO3) thin films were prepared by rf magnetron sputtering using ceramic target. Perovskite phase PbTiO3 was obtained on platinum-coated glass substrate at substrate temperature of 580°C. On the contrary, crystal structure of the films on glass substrate was amorphous. After this film was annealed at 500°C in air, crystal structure was converted to perovskite one. In proportion to the rf power, deposition rate increased. When rf power and substrate temperature were 300 W and 580°C, deposition rates of the films deposited on glass substrate and platinum-coated glass were 50 and 20 nm/min, respectively.
- Published
- 2001
48. Deposition of titanium nitride on porous glass by plasma-enhanced chemical vapor deposition
- Author
-
Tetsuo Yazawa, Sadao Nakajima, Sabro Kimura, Tadashi Ishida, Shigeharu Tamura, and Toshiyuki Mihara
- Subjects
Materials science ,Chemical engineering ,Hybrid physical-chemical vapor deposition ,Plasma-enhanced chemical vapor deposition ,Ion plating ,Deposition (phase transition) ,Chemical vapor deposition ,Electrical and Electronic Engineering ,Combustion chemical vapor deposition ,Condensed Matter Physics ,Plasma processing ,Surfaces, Coatings and Films ,Pulsed laser deposition - Published
- 1991
49. Transparent conductive tin oxide films by photochemical vapour deposition
- Author
-
Shigeharu Tamura, Toshiyuki Mihara, Hiroyuki Magara, Osamu Tabata, Tadashi Ishida, and T. Tatsuta
- Subjects
Chemistry ,Metals and Alloys ,Surfaces and Interfaces ,Substrate (electronics) ,Photochemistry ,Tin oxide ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Volumetric flow rate ,law.invention ,Mercury-vapor lamp ,Electrical resistivity and conductivity ,law ,Materials Chemistry ,Deposition (phase transition) ,Growth rate ,Electrical conductor - Abstract
Photochemical vapour deposition (photo-CVD) is expected to be a damage-free process at low temperature. Transparent conductive tin oxide (non-doped) films have been prepared by the photo-CVD process under various deposition conditions. TMT (Sn (CH3)4) and O2 (containing 4 mol.% O3) were used as the raw materials and a low-pressure mercury lamp was used as the light source. By the combination of linearly focused low-pressure mercury lamp light through a semi-cylindrical suprasil window and a reciprocation motion of the substrate, a good uniformity of the film thickness along an 8 × 10 cm area was realised. The growth rate was proportional to both the substrate temperature and the TMT flow rate. The minimum resistivity of ~ 7 × 10−3 Ω cm was obtained at a substrate temperature of 250 °C.
- Published
- 1999
50. Fabrication of a hard x-ray sputtered-sliced Fresnel phase zone plate
- Author
-
Shigeharu Tamura, K. Ohsumi, Nagao Kamijo, Akihisa Takeuchi, Hiroshi Kihara, S. Yamamoto, Katsumi Handa, Masami Ando, and Yoshio Suzuki
- Subjects
Materials science ,Opacity ,business.industry ,Undulator ,Zone plate ,law.invention ,Core (optical fiber) ,Optics ,law ,Focal length ,Focal Spot Size ,business ,Instrumentation ,Fresnel diffraction ,Beam (structure) - Abstract
A Fresnel phase zone plate for hard x ray was fabricated by physical vapor deposition alternating transparent and opaque layers onto a fine gold wire core 47 μm in diameter. The zone plate, which is comprised of 25 pairs of alternating Ag and C layers, is designed to operate with a focal length of 124 mm for a parallel beam at 8.1 keV. The thickness of the zone plate is less than 10 μm and is capable of operating as a phase zone plate. Using the brilliant monochromatized x-ray beam from the TRISTAN Main Ring, with an undulator, the minimum focal spot size attained for the first order focal beam was 0.5 μmφ. The light collecting efficiency was determined to be near 11%.
- Published
- 1997
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