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4. Engineered SiC materials for power technologies

5. SmartSiC™ for Manufacturing of SiC Power Devices

6. Treatment of organic polymer surfaces by CF(sub 4) plasmas: Etching by fluorine atoms and influence of vacuum ultraviolet radiation

8. 3D Sequential Low Temperature Top Tier Devices using Dopant Activation with Excimer Laser Anneal and Strained Silicon as Performance Boosters

9. High mass positive ions and molecules in capacitively-coupled radio-frequency CF4 plasmas

14. Buried metal line compatible with 3D sequential integration for top tier planar devices dynamic Vth tuning and RF shielding applications

17. 3-D Sequential Stacked Planar Devices Featuring Low-Temperature Replacement Metal Gate Junctionless Top Devices With Improved Reliability

19. 3D sequential stacked planar devices on 300 mm wafers featuring replacement metal gate junction-less top devices processed at 525°C with improved reliability

23. Reliability of ultrathin buried oxides for multi-VT FDSOI technology

25. High Mobility Materials on Insulator for Advanced Technology Nodes

29. Strain and layout management in dual channel (sSOI substrate, SiGe channel) planar FDSOI MOSFETs

31. Ultrathin (5nm) SiGe-On-Insulator with high compressive strain (−2GPa): From fabrication (Ge enrichment process) to in-depth characterizations

34. Nanometer-scale silicon powders in RF silane plasmas

36. Comparison between <100> and <110> oriented channels in highly strained FDSOI pMOSFETs

37. Enhancement of devices performance of hybrid FDSOI/bulk technology by using UTBOX sSOI substrates

38. Strain engineered extremely thin SOI (ETSOI) for high-performance CMOS

42. Ultra-thin SOI for 20nm node and beyond

45. Work-function engineering in gate first technology for multi-VT dual-gate FDSOI CMOS on UTBOX

46. Low leakage and low variability Ultra-Thin Body and Buried Oxide (UT2B) SOI technology for 20nm low power CMOS and beyond

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