Particle agglomeration study in rf silane plasmas: in situ study by polarization-sensitive laser light scattering

Authors :: Courteille, C.
Hollenstein, Ch.
Dorier, J.-L.
Gay, P.
Schwarzenbach, W.
Bertran, E.
Viera, G.
Martins, R.
Macarico, A.
Howling, A.A.
Source :: Journal of Applied Physics. August 15, 1996, Vol. 80 Issue 4, p2069, 10 p.
Publication Year :: 1996

Subjects :: Silane -- Analysis
Plasma (Ionized gases) -- Research
Laser-plasma interactions -- Research
Agglomeration -- Analysis
Physics

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