18 results on '"Sawaki, I."'
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2. Single crystal silicon cantilever-based RF-MEMS switches using surface processing on SOI.
3. A scanning mirror with extremely high resonance frequency up to 0.51 MHz using both torsion and buckling springs.
4. A rotational comb-driven micromirror with a large deflection angle and low drive voltage.
5. Crosstalk Characteristics of Ti-LiNbO/sub 3/ Intersecting Waveguides and Their Application as TE/TM Mode Splitters.
6. Rectangularly configured 4*4 Ti:LiNbO/sub 3/ matrix switch with low drive voltage.
7. Crosstalk characteristics of Ti-LiNbO3intersecting waveguides and their application as TE/TM mode splitters.
8. Low drive voltage 4X4 Ti:LiNbO3 switch
9. Low-loss single-mode plastic waveguide fabricated by photopolymerization
10. Thermally stabilized z-cut Ti:iNbO3, waveguide switch
11. Integrated Optic Switching Circuit Using Ti:LiNbO3 Waveguide Network
12. A rotational comb-driven micromirror with a large deflection angle and low drive voltage
13. Fishbone-shaped vertical comb actuator for dual-axis 1-D analog micromirror array
14. A 2-axis comb-driven micromirror array for 3D MEMS switches
15. A multi-chip directly mounted 512 MEMS mirror array module with hermetically sealed package for large optical cross-connects.
16. A multi-step DRIE process for a 128 × 128 micromirror array.
17. A 2-axis comb-driven micromirror array for 3D MEMS switches.
18. Fishbone-shaped vertical comb actuator for dual-axis 1D analog micromirror array.
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