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A 2-axis comb-driven micromirror array for 3D MEMS switches.
- Source :
- IEEE/LEOS International Conference on Optical MEMs; 2002, p17-18, 2p
- Publication Year :
- 2002
Details
- Language :
- English
- ISBNs :
- 9780780375956
- Database :
- Complementary Index
- Journal :
- IEEE/LEOS International Conference on Optical MEMs
- Publication Type :
- Conference
- Accession number :
- 81171611
- Full Text :
- https://doi.org/10.1109/OMEMS.2002.1031422