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1. Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications

Author

Florian Bartoli, Jérémy Streque, Jaafar Ghanbaja, Philippe Pigeat, Pascal Boulet, Sami Hage-Ali, Natalya Naumenko, A. Redjaïmia, Thierry Aubert, and Omar Elmazria

Subjects
ScAlN thin films, sputtering, hetero-epitaxial films, SAW sensors, Chemical technology, TP1-1185
Abstract

Scandium aluminum nitride (ScxAl1-xN) films are currently intensively studied for surface acoustic waves (SAW) filters and sensors applications, because of the excellent tradeoff they present between high SAW velocity, large piezoelectric properties and wide bandgap for the intermediate compositions with an Sc content between 10 and 20%. In this paper, the growth of Sc0.09Al0.91N and Sc0.18Al0.82N films on sapphire substrates by sputtering method is investigated. The plasma parameters were optimized, according to the film composition, in order to obtain highly-oriented films. X-ray diffraction rocking-curve measurements show a full width at half maximum below 1.5°. Moreover, high-resolution transmission electron microscopy investigations reveal the epitaxial nature of the growth. Electrical characterizations of the Sc0.09Al0.91N/sapphire-based SAW devices show three identified modes. Numerical investigations demonstrate that the intermediate compositions between 10 and 20% of scandium allow for the achievement of SAW devices with an electromechanical coupling coefficient up to 2%, provided the film is combined with electrodes constituted by a metal with a high density.

Published
2020
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2. FEM Modeling of the Temperature Influence on the Performance of SAW Sensors Operating at GigaHertz Frequency Range and at High Temperature Up to 500 °C

Author

Jean Claude Asseko Ondo, Eloi Jean Jacques Blampain, Gaston N’Tchayi Mbourou, Stephan Mc Murtry, Sami Hage-Ali, and Omar Elmazria

Subjects
SAW sensor, FEM modeling, piezoelectric, AlN, sapphire, high temperature, Chemical technology, TP1-1185
Abstract

In this work, we present a two-dimensional Finite Element Method (2D-FEM) model implemented on a commercial software, COMSOL Multiphysics, that is used to predict the high temperature behavior of surface acoustic wave sensors based on layered structures. The model was validated by using a comparative study between experimental and simulated results. Here, surface acoustic wave (SAW) sensors consist in one-port synchronous resonators, based on the Pt/AlN/Sapphire structure and operating in the 2.45-GHz Industrial, scientific and medical (ISM) band. Experimental characterizations were carried out using a specific probe station that can perform calibrated measurements from room temperature to 500 °C. In our model, we consider a pre-validated set of physical constants of AlN and Sapphire and we take into account the existence of propagation losses in the studied structure. Our results show a very good agreement between the simulation and experiments in the full range of investigated temperatures, and for all key parameters of the SAW sensor such as insertion losses, resonance frequency, electromechanical factor of the structure (k2) and quality factor (Q). Our study shows that k2 increases with the temperature, while Q decreases. The resonance frequency variation with temperature shows a good linearity, which is very useful for temperature sensing applications. The measured value of the temperature coefficient of frequency (TCF) is equal to −38.6 ppm/°C, which is consistent with the numerical predictions.

Published
2020
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14. SAW RFID Devices Using Connected IDTs as an Alternative to Conventional Reflectors for Harsh Environments

Author

A. Shvetsov, Hamid M'Jahed, Sergei Zhgoon, Jeremy Streque, Pascal Nicolay, Hugo Chambon, Omar Elmazria, Sami Hage-Ali, Cecile Floer, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), CTR - Carinthian Tech Research, National Research University, Moscow Power Engineering Institute, This work was supported by Direction Générale de l’Armement (DGA), the ANR project 'SAWGOOD' (ANR-18-CE42-0004-01), the ANR project 'SALSA' (ANR-15-CE08-0015-05), the French PIA project 'Lorraine Université d’Excellence' (ANR-15-IDEX-04-LUE), the CPER Mat-DS, the Ministry of Science and Education of Russian Federation 8.6108.2017/6.7 and by the COMET K1 centre ASSIC., IMPACT N4S, ANR-18-CE42-0004,SAWGOOD,Dispositifs sans fils étirables à ondes acoustiques de surface : vers des capteurs passifs multifonctionnels imprimés sur la peau(2018), ANR-15-CE08-0015,SALSA,Micro-capteur à ondes élastiques de surface à base de structures AlN/Saphir pour des températures extrêmes(2015), and ANR-15-IDEX-0004,LUE,Isite LUE(2015)

Subjects
Materials science, Acoustics and Ultrasonics, Interdigital transducer, business.industry, Surface acoustic wave, Automatic frequency control, Lithium niobate, 01 natural sciences, Signal, [SPI]Engineering Sciences [physics], chemistry.chemical_compound, Transmission (telecommunications), chemistry, 0103 physical sciences, Reflection (physics), Optoelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Electrical and Electronic Engineering, business, 010301 acoustics, Instrumentation, Coupling coefficient of resonators
Abstract

International audience; Remote interrogation of surface acoustic wave ID-tags imposes a high signal amplitude which is related to a high coupling coefficient value (K 2) and low propagation losses (α). In this paper, we propose and discuss an alternative configuration to the standard one. Here, we replaced the conventional configuration, i.e. one interdigital transducer (IDT) and several reflectors, by a series of electrically connected IDTs. The goal is to increase the amplitude of the detected signal using direct transmission between IDTs instead of the reflection from passive reflectors. This concept can therefore increase the interrogation scope of ID-tags made on conventional substrate with high K 2 value. Moreover, it can also be extended to suitable substrates for harsh environments such as high temperature environments: the materials used exhibit limited performances (low K 2 value and relatively high propagation losses) and are therefore rarely used for identification applications. The concept was first tested and validated using the lithium niobate 128°Y-X cut substrate, which is commonly used in ID-tags. A good agreement between experimental and numerical results was obtained for the promising concept of connected IDTs. The interesting features of the structure were also validated using a langasite substrate, which is well-known to operate at very high temperatures. Performances of both substrates (lithium niobate and langasite) were tested with an in-situ RF characterization up to 600°C. Unexpected results regarding the resilience of devices based on congruent lithium niobate were obtained. Index Terms-high temperature, lithium niobate, radio frequency identification (RFID), surface acoustic wave (SAW)

Published
2020

16. AlN/Pt/LN-Y128 packageless acoustic wave temperature sensor

Author

Thierry Aubert, Jaafar Ghanbaja, Cecile Floer, Natalya F. Naumenko, Omar Elmazria, Sami Hage-Ali, Florian Bartoli, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), National University of Science and Technology (MISIS), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Experiments were carried out at MiNaLor clean-room platform which is partially supported by FEDER and Grand Est Region through the RaNGE project and at IJL TUBE-Davm equipment which is funded by the French PIA project 'Lorraine Université d’Excellence' (ANR-15-IDEX-04-LUE). This work was supported by the Direction Générale de l’Armement (DGA), the ANR project 'SAWGOOD' (ANR-18-CE42-0004-01), the CAPMAT project ('FEDER-FSE Lorraine et Massif Vosges 2014-2020' and ICEEL), the Ministry of Science and Higher Education of the Russian Federation (075-02-2020-1588), and the National University of Science and Technology MISIS (K2-2020-007)., ANR-15-IDEX-0004,LUE,Isite LUE(2015), and ANR-18-CE42-0004,SAWGOOD,Dispositifs sans fils étirables à ondes acoustiques de surface : vers des capteurs passifs multifonctionnels imprimés sur la peau(2018)

Subjects
Materials science, Acoustics and Ultrasonics, Interdigital transducer, Lithium niobate, Substrate (electronics), Nitride, 01 natural sciences, Temperature measurement, Packageless, Overlayer, chemistry.chemical_compound, [SPI]Engineering Sciences [physics], 0103 physical sciences, Electrical measurements, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010301 acoustics, Instrumentation, ComputingMilieux_MISCELLANEOUS, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], [PHYS]Physics [physics], business.industry, temperature, Acoustic wave, guided acoustic wave, chemistry, Optoelectronics, business
Abstract

Batteryless, wireless, and packageless acoustic wave sensors are particularly desirable for harsh high-temperature environments. In this letter, an acoustic wave sensor based on a lithium niobate (Y + 128° cut, abbreviated LN-Y128) substrate with a buried platinum interdigital transducer (IDT) in an aluminum nitride (AlN) overlayer is investigated. Previously, it was demonstrated theoretically that due to the specific properties of LN-Y128, Rayleigh-type guided waves can propagate at the AlN/IDT(Pt)/LN-Y128 interface. Here, this structure is, for the first time, studied experimentally, including the growth and properties of the AlN layer onto irregular platinum IDTs. Both Shear Horizontal and Rayleigh-type waves have been identified after the AlN deposition and the velocities are consistent with the fitted SDA-FEM-SDA (a combination of finite element modeling with spectral domain analysis) simulations. Electrical measurements with a surface perturbation and temperature measurements show that the AlN/IDT(Pt)/LN-Y128 bilayer structure is promising as a packageless high-temperature sensor.

Published
2021

17. Sensing Mechanism of Surface Acoustic Wave Magnetic Field Sensors Based on Ferromagnetic Films

Author

Omar Elmazria, Sami Hage-Ali, Tao Han, Harshad Mishra, Michel Hehn, Yang Yang, Shanghai Jiao Tong University [Shanghai], Institut Jean Lamour (IJL), and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Materials science, Acoustics and Ultrasonics, Condensed matter physics, 010401 analytical chemistry, Surface acoustic wave, sensing mechanism, Magnetostriction, magnetic field, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, Magnetic field, Resonator, Ferromagnetism, Electric field, Solid mechanics, Electrical and Electronic Engineering, Electric current, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, Instrumentation
Abstract

International audience; Surface acoustic wave (SAW) sensors with ferromagnetic materials are used to measure magnetic fields or electric currents. The magnetic field sensitivities of SAW magnetic field sensors are essentially influenced by various factors. The sensing mechanism is complex due to the multiphysics coupling of the magnetic field, solid mechanics, and electric field. The magnetostriction effect, ΔE effect, and the third-order material constants are taken into consideration. The shape demagnetizing effect is reduced by increasing the lengthwidth ratio and length-height ratio of a ferromagnetic film on a SAW resonator. The model is verified by experiments and accurately predicts the magnetic field sensitivities of SAW resonant magnetic field sensors. The factors affecting the sensitivities are investigated from the perspective of the sensing mechanism. A grooved sensing surface structure is explored for an improved sensitivity. The results are beneficial to design reliable SAW magnetic field sensors with an enhanced sensitivity.

Published
2021

18. Capteurs sans fil à ondes élastiques de surface pour applications biomédicales, mesure du champ magnétiqueet environnements industriels

Author

Sami Hage-Ali, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Lorraine, Thierry Belmonte, Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), and Hage-Ali, Sami

Subjects
Capteur SAW, [SPI]Engineering Sciences [physics], wireless, SAW sensor, [SPI] Engineering Sciences [physics], sans fil
Published
2020

19. Multifunctional sensor (Magnetic field and temperature) based on Micro-structured and multilayered SAW device

Author

Sébastien Petit-Watelot, S. Zghoon, Hamid M'Jahed, Daniel Lacour, Michel Hehn, Prince Mengue, Sami Hage-Ali, Omar Elmazria, and Harshad Mishra

Subjects
Work (thermodynamics), Materials science, business.industry, 010401 analytical chemistry, Surface acoustic wave, 02 engineering and technology, Saw (device), 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, Magnetic field, Magnetic anisotropy, Love wave, Optoelectronics, 0210 nano-technology, business, Layer (electronics)
Abstract

This work aims to present a multifunctional surface acoustic wave (SAW) device that is capable of simultaneously measuring magnetic field as well as temperature. This is achieved in three parts where a multilayered approach is used to first achieve a temperature compensated Love wave structure, followed by a micro-structuration of the sensitive layer to eliminate the effects of temperature on magnetic anisotropy and finally multiple resonances observed allow a multifunctionality in our device.

Published
2020

20. Peculiarities of Wireless Interrogation of SAW-Resonator Vibration Sensor by RF Pulse-Signal

Author

A. Shvetsov, Sami Hage-Ali, Omar Elmazria, Baptiste Paulmier, Andrey Merkulov, and Sergei Zhgoon

Subjects
Physics, Vibration, Resonator, Modulation, Acoustics, 0103 physical sciences, Surface acoustic wave, Demodulation, 010301 acoustics, 01 natural sciences, Signal, Passband, Power (physics)
Abstract

Vibration surface acoustic wave (SAW) sensors can be used in multiple areas like automotive and aerospace technologies. Remote wireless interrogation of these passive sensors and their operability at high temperature allows to use them on rotating and moving objects in harsh environments. This work concentrates on peculiarities related to RF-pulse interrogation of a SAW resonator (SAWR) vibration sensor. The analysis describes the vibration-induced continuously-shifting SAWR response resonance frequency by approximating it with a sequence of static frequency responses with different central frequencies that are fixed during each consequent interrogation cycle of excitation/reception intervals. This approach is justified by a relatively small (below 2 ppm) SAWR frequency change during each cycle. The analysis realized in a PC allows to simulate both AM and FM demodulation of arbitrary signals with complicated modulation. This method also gives some insight in understanding of distortions in re-radiated signal at a relatively large vibration magnitude. Modeling of the situation when the deviation of the SAWR sensor resonance frequency exceeds the SAWR response passband explains the observed phenomenon of the re-radiated power decrease. It also gives the explanation of the nature of non-linear features experimentally observed in demodulated signals at large levels of vibration. The described approach will be used for optimization of interrogation procedure.

Published
2020

21. Surface acoustic wave sensors for industrial and biomedical applications

Author

Sami Hage-Ali

Subjects
Computer science, business.industry, Acoustics, Surface acoustic wave, Acoustic wave, law.invention, Resonator, law, Wireless, ComputerSystemsOrganization_SPECIAL-PURPOSEANDAPPLICATION-BASEDSYSTEMS, Surface acoustic wave sensor, Mobile telephony, Radar, business, Sensitivity (electronics)
Abstract

SummarySurface acoustic wave sensors for industrial and biomedical applications Surface acoustic wave (SAW) devices are widely used as filters, resonators or delay lines in electronic systems for a wide range of applications such as mobile communication (cell phones), TVs, radar or stable resonators for clock generation . More recently, thanks to the sensitivity of the resonance frequency and the signal transmission delay to physical environmental parameters, the use of SAW devices has been expanded to measure gas concentrations, pressures, forces, temperatures, strains or radiations. SAW-based sensors have also the advantage of being passive (batteryless) and potentially remotely interrogated (wireless) In this talk, we will address the latest advances in SAW sensors with a focus on three main topics - Surface acoustic wave sensors for harsh industrial environments, especially at high temperatures - Magnetic SAW sensors - SAW sensors for biomedical applications, including “electronic tattoos”

Published
2020

22. FEM Modeling of the Temperature Influence on the Performance of SAW Sensors Operating at GigaHertz Frequency Range and at High Temperature Up to 500 • C

Author

Sami Hage-Ali, E. Blampain, Omar Elmazria, Jean Claude Asseko Ondo, Stephan Mc Murtry, Gaston N'Tchayi Mbourou, Université des Sciences et Techniques de Masuku [Franceville, Gabon] (USTM), Institut Jean Lamour (IJL), and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, SAW sensor, Multiphysics, Acoustics, sapphire, 02 engineering and technology, lcsh:Chemical technology, 01 natural sciences, Biochemistry, Article, Analytical Chemistry, high temperature, Resonator, 0103 physical sciences, lcsh:TP1-1185, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Electrical and Electronic Engineering, Instrumentation, FEM modeling, AlN, 010302 applied physics, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Surface acoustic wave, Linearity, 021001 nanoscience & nanotechnology, Piezoelectricity, Atomic and Molecular Physics, and Optics, Finite element method, Surface acoustic wave sensor, piezoelectric, 0210 nano-technology, Temperature coefficient
Abstract

In this work, we present a two-dimensional Finite Element Method (2D-FEM) model implemented on a commercial software, COMSOL Multiphysics, that is used to predict the high temperature behavior of surface acoustic wave sensors based on layered structures. The model was validated by using a comparative study between experimental and simulated results. Here, surface acoustic wave (SAW) sensors consist in one-port synchronous resonators, based on the Pt/AlN/Sapphire structure and operating in the 2.45-GHz Industrial, scientific and medical (ISM) band. Experimental characterizations were carried out using a specific probe station that can perform calibrated measurements from room temperature to 500 &deg, C. In our model, we consider a pre-validated set of physical constants of AlN and Sapphire and we take into account the existence of propagation losses in the studied structure. Our results show a very good agreement between the simulation and experiments in the full range of investigated temperatures, and for all key parameters of the SAW sensor such as insertion losses, resonance frequency, electromechanical factor of the structure (k2) and quality factor (Q). Our study shows that k2 increases with the temperature, while Q decreases. The resonance frequency variation with temperature shows a good linearity, which is very useful for temperature sensing applications. The measured value of the temperature coefficient of frequency (TCF) is equal to &minus, 38.6 ppm/&deg, C, which is consistent with the numerical predictions.

Published
2020

23. Microstructured Multilayered Surface-Acoustic-Wave Device for Multifunctional Sensing

Author

Michel Hehn, Sami Hage-Ali, Daniel Lacour, Harshad Mishra, Hamid M'Jahed, Omar Elmazria, Prince Mengue, S. Zghoon, Sébastien Petit-Watelot, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), and Moscow Power Engineering Institute (MPEI)

Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Materials science, Condensed matter physics, Surface acoustic wave, General Physics and Astronomy, Resonance, Magnetostriction, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Magnetic field, Magnetic anisotropy, symbols.namesake, Resonator, 0103 physical sciences, symbols, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Rayleigh scattering, 010306 general physics, 0210 nano-technology, Temperature coefficient
Abstract

A multifunctional sensor based on a surface-acoustic-wave (SAW) device is fabricated. It allows independent measurements of temperature and applied magnetic field. Optimization of the multilayered device structure leads to a temperature-coefficient frequency of the Love-wave resonance reduced to zero. The sensitivity to an applied magnetic field is obtained through magnetostriction of a $\mathrm{Co}$-$\mathrm{Fe}$-$\mathrm{B}$ layer. By use of shape anisotropy, the variation of intrinsic magnetic anisotropy with temperature is strongly reduced. On one hand, interrogating the device at the Love-wave-resonance frequency allows us to extract the applied magnetic field independently of the temperature in a [130--370 K] range. On the other hand, the Rayleigh or Leaky waves are less or not sensitive to applied fields but have a high temperature coefficient of frequency. So interrogating the device at the Rayleigh resonance frequency allows us to extract the temperature independently of the magnetic field. In addition, the used resonator geometry offers the possibility for future batteryless and wireless interrogation.

Published
2020

24. Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications

Author

Sami Hage-Ali, J. Camus, M. Rammal, Jeremy Streque, Omar Elmazria, Thierry Laroche, Mohamed Abdou Djouadi, Thierry Aubert, Hamid M'Jahed, Sylvain Ballandras, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut des Matériaux Jean Rouxel (IMN), Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST), Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN), Frec'n'sys SASU (Frec'n'sys SASU), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), and CentraleSupélec-Université de Lorraine (UL)

Subjects
Materials science, Passivation, Surface acoustic waves, Substrate (electronics), 01 natural sciences, chemistry.chemical_compound, Resonator, Resonators, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Aluminium nitride, business.industry, Sensors, 010401 analytical chemistry, Surface acoustic wave, High temperature, Piezoelectricity, 0104 chemical sciences, chemistry, Q factor, Sapphire, Optoelectronics, business
Abstract

International audience; Aluminium nitride piezoelectric thin films grown on sapphire are strong candidates for high-temperature surface acoustic wave (SAW) sensors, due to their thermal stability, large bandgap, high acoustic velocity and suitable electromechanical coupling. However, thin-film resonators need more design efforts than those based on bulk crystals, due to the usually limited thickness of the piezoelectric films, and to acoustic properties disparities between the latters and their host substrate. This work presents an optimization of AlN/Sapphire-based SAW resonators with high quality factors for high-temperature applications. It combines specifically grown, 3 µm-thick aluminium nitride films, with the use of aluminium electrodes for their low density and resistivity, as an alternative to heavier electrodes like Pt. These electrodes allow for much lower mechanical losses and higher quality factors, in spite of needing passivation for increased lifetime. A standard resonator design is first presented and used for preliminary tests, in order to monitor the AlN/Sapphire structure with unprotected aluminium electrodes, for temperatures up to 600°C. A quasi-synchronous, optimized design is then proposed for higher quality factors and wireless sensing compliance. The high temperature characterizations confirmed that much larger quality factors can be retrieved from this optimized design. The quasi-synchronous resonators proposed in this study remain well-tuned for temperatures up to 400°C, and show high quality factors, as high as 3400 at 400°C.

Published
2020

25. SAW Sensors Directly Integrated onto Industrial Metallic Parts for Manufacturing 4.0

Author

Omar Elmazria, Sami Hage-Ali, Sergei Zhgoon, and Prince Mengue

Subjects
Materials science, business.industry, Surface acoustic wave, chemistry.chemical_element, Sputter deposition, Resonator, symbols.namesake, chemistry, symbols, Optoelectronics, Direct integration of a beam, Rayleigh wave, Thin film, business, Duralumin, Titanium
Abstract

In this communication, we describe the direct integration of thin film SAW resonators on industrial metals. Two different structures were studied numerically and experimentally: Al/ZnO/Duralumin and Al/ZnO/Titanium. Resonators were manufactured on ZnO thin film directly deposited by RF magnetron sputtering on polished Duralumin and Titanium substrates. The presence of Rayleigh waves was demonstrated. The aim of these resonators is an application in the field of structural health monitoring.

Published
2020

26. Temperature compensated magnetic field sensor based on Love waves

Author

Prince Mengue, Omar Elmazria, Vincent Polewczyk, Karine Dumesnil, Harshad Mishra, Daniel Lacour, Sébastien Petit-Watelot, Sami Hage-Ali, Jeremy Streque, Abdelkrim Talbi, Michel Hehn, Sergei Zhgoon, Hamid M'Jahed, Aurelien Mazzamurro, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), National Research University, Moscow Power Engineering Institute, Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Subjects
Materials science, 02 engineering and technology, 01 natural sciences, 7. Clean energy, law.invention, Magnetization, symbols.namesake, Condensed Matter::Materials Science, [SPI]Engineering Sciences [physics], magnetic field sensor, law, 0103 physical sciences, General Materials Science, Electrical and Electronic Engineering, Rayleigh wave, temperature compensated, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Civil and Structural Engineering, 010302 applied physics, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Guided wave testing, Condensed matter physics, Acoustic wave, resonators, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Magnetic field, Love wave, Mechanics of Materials, Signal Processing, symbols, piezoelectric, 0210 nano-technology, SAW devices, Waveguide, Temperature coefficient, Love waves
Abstract

International audience; A temperature compensated magnetic field sensor based on the combination of CoFeB ferromagnetic thin films and Quartz/ZnO Love waveguide platform is developed and optimized. The Love wave is a shear horizontal guided wave and therefore provides an optimal interaction with magnetisation in the magneto-elastic thin film resulting in higher acoustic wave magneto-elastic coupling compared to the conventional Rayleigh wave based devices. ST-cut Quartz was chosen as substrate, ZnO as insulating layer for Love wave generation and temperature coefficient of frequency (TCF) compensation and CoFeB as the magnetostrictive layer sensitive to magnetic field. Experimental results show a magneto-acoustic sensitivity of 15.53 MHz/T with almost zero TCF.

Published
2020

27. A Weak Form Nonlinear Model for Thermal Sensitivity of Love Wave Mode on Layered Structures

Author

Sami Hage-Ali, Tao Han, Qiaozhen Zhang, Yang Yang, Omar Elmazria, Harshad Mishra, Shanghai Jiao Tong University [Shanghai], Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), and ANR-18-CE42-0004,SAWGOOD,Dispositifs sans fils étirables à ondes acoustiques de surface : vers des capteurs passifs multifonctionnels imprimés sur la peau(2018)

Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Materials science, Acoustics and Ultrasonics, Interdigital transducer, Love wave, Constitutive equation, Mechanics, thermal sensitivity, frequency temperature characteristic, 01 natural sciences, Piezoelectricity, Stress (mechanics), Resonator, Nonlinear system, 0103 physical sciences, Boundary value problem, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010301 acoustics, Instrumentation, third-order constants
Abstract

A precise theoretical model for the thermal sensitivity of Love wave mode is significant in the structure design, temperature compensation, and the prediction of thermal behavior. This article proposes a weak form nonlinear model to calculate the thermal sensitivity of Love waves on arbitrary layered structures. The third-order material constants, as well as the thermal stress and strain tensors between the substrate, electrodes, and wave-guiding layer, are considered in the model. The $9 \times 9$ effective elastic and the $3 \times 9$ effective piezoelectric matrixes are imported into the nonlinear constitutive equations and boundary conditions using weak form expressions. A temperature-compensated Love wave mode resonator on a layered ZnO/interdigital transducer (IDT)/quartz structure is obtained. The theoretical model is verified through the comparison of experimental and analytical results. The model is beneficial for the design of Love wave devices and sensors.

Published
2020

28. Intrinsic versus shape anisotropy in micro-structured magnetostrictive thin films for magnetic surface acoustic wave sensors

Author

Omar Elmazria, Nicolas Tiercelin, Karine Dumesnil, Sami Hage-Ali, Vincent Polewczyk, Olivier Bou Matar, Abdelkrim Talbi, Sebastien Petit Watelot, Michel Hehn, Hamid M'Jahed, Harshad Mishra, Daniel Lacour, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire International associé sur les phénomènes Critiques et Supercritiques en électronique fonctionnelle, acoustique et fluidique (LIA LICS/LEMAC), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 (IEMN), Centre National de la Recherche Scientifique (CNRS)-Université de Lille-Université Polytechnique Hauts-de-France (UPHF)-Ecole Centrale de Lille-Université Polytechnique Hauts-de-France (UPHF)-Institut supérieur de l'électronique et du numérique (ISEN), ANR-15-IDEX-04-LUE,LUE,Lorraine Université d'Excellence(2016), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)

Subjects
Materials science, magnetic, micromagnetics, 02 engineering and technology, 01 natural sciences, 0103 physical sciences, General Materials Science, Electrical and Electronic Engineering, Anisotropy, saw sensors, Civil and Structural Engineering, 010302 applied physics, Condensed matter physics, Surface acoustic wave, Magnetostriction, Acoustic wave, 021001 nanoscience & nanotechnology, Condensed Matter Physics, micro-structured thin films, Atomic and Molecular Physics, and Optics, Magnetic field, Magnetic anisotropy, Mechanics of Materials, Magnet, Signal Processing, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Surface acoustic wave sensor, 0210 nano-technology, shape-effects
Abstract

International audience; This work aims at studying the interaction between surface acoustic waves (SAW) and micro-structured magnetostrictive layers under a magnetic field with a perspective to develop magnetic field sensors. The impact of the competition between the strong intrinsic magnetic anisotropy of the magnetic material and the shape anisotropy of the interdigitated transducer (IDT) fingers introduced by the micro-structuration is investigated. Therefore, the macroscopic and microscopic magnetic properties of the IDT and their influence on the magneto-acoustic response are studied. A SAW resonator with the IDTs made of the magnetostrictive thin film was elaborated and the magnetic surface acoustic wave (MSAW) response under a magnetic field was performed and discussed. Depending on the energy balance, the anisotropy gets modified and a correlation with the MSAW sensitivity to an externally applied magnetic field is made.

Published
2019

29. Direct integration of SAW resonators on industrial metal for structural health monitoring applications

Author

Cecile Floer, Sergei Zhgoon, Baptiste Paulmier, Prince Mengue, Sami Hage-Ali, Omar Elmazria, and Florian Bartoli

Subjects
Resonator, Materials science, Mechanics of Materials, Signal Processing, General Materials Science, Direct integration of a beam, Structural health monitoring, Electrical and Electronic Engineering, Condensed Matter Physics, Engineering physics, Atomic and Molecular Physics, and Optics, Civil and Structural Engineering
Abstract

Surface acoustic wave (SAW) sensors are very promising for structural health monitoring (SHM) applications as they have the advantages of being robust, passive (batteryless), remotely interrogated (wireless) and can even be packageless. This paper describes ultralow-profile SAW resonators that can be directly fabricated and integrated on metallic parts in industrial facilities. They are based on piezoelectric thin films (ZnO) which are directly sputtered on polished industrial titanium (Ti) and stainless steel. With this approach, no sensor glue-bonding to the target is needed, and measurement errors related to this step are avoided. Demonstrator devices have been studied numerically and experimentally. The structural properties of the ZnO thin films were characterized through x-ray diffraction and atomic force microscopy. A preferred orientation (002) was achieved with a roughness of 50 nm on the top surface. Resonators were microfabricated and their functional parameters (i.e. resonance frequency, quality factor and electromechanical coupling) were extracted through impedance measurements and fitted with a Butterworth-van Dyke model. By increasing applied temperatures (up to 450 °C) and the strain (up to 1800 μϵ), a linear decrease of the resonance frequency has been shown. A temperature coefficient of frequency of −46.4 ppm °C−1 and a good strain sensitivity (1.49 ppmμϵ−1) were obtained, thus making the structure promising as a high temperature and strain sensing element in industrial SHM applications.

Published
2021

30. Wireless Multifunctional Surface Acoustic Wave Sensor for Magnetic Field and Temperature Monitoring

Author

Prince Mengue, Daniel Lacour, Harshad Mishra, Michel Hehn, Sami Hage-Ali, Sébastien Petit-Watelot, Yang Yang, Omar Elmazria, Cecile Floer, Tao Han, Shanghai Jiao Tong University [Shanghai], Institut Jean Lamour (IJL), and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS]Physics [physics], 010302 applied physics, Materials science, business.industry, Surface acoustic wave, 01 natural sciences, Temperature measurement, Industrial and Manufacturing Engineering, Magnetic field, Condensed Matter::Materials Science, symbols.namesake, Resonator, Love wave, Mechanics of Materials, 0103 physical sciences, symbols, Optoelectronics, General Materials Science, Surface acoustic wave sensor, Rayleigh wave, Rayleigh scattering, business, 010301 acoustics
Abstract

International audience; A one-port surface acoustic wave (SAW) resonator based on Co40–Fe40–B20/SiO2/ZnO/quartz multilayer structure and exhibiting a dual mode, Rayleigh and Love wave modes, is investigated to achieve a multifunctional sensor measuring both temperatures and magnetic fields. The Rayleigh wave mode of the resonator is used for temperature measurement with a temperature sensitivity of −37.9 ppm/°C, and the Love wave mode is used for magnetic field measurement. Co40-Fe40-B20 is the magnetic sensitive layer, and quartz crystal is the piezoelectric substrate. ZnO film is also a piezoelectric but considered here in combination with SiO2 as insulating layers and serves to control impedance matching and temperature dependence of the sensor. ZnO and SiO2 thicknesses are selected to realize temperature compensation for the Love wave mode and making this mode highly sensitive to magnetic fields and insensitive to temperatures. The magnetic field sensitivities of −170.4 kHz m−1 T−1 and −621.6 kHz m−1 T−1 are obtained respectively for the fundamental and the third harmonic of the Love wave mode. The proposed structure is beneficial to design reliable hybrid SAW magnetic field and temperature sensors

Published
2021

31. Wireless stretchable SAW sensors based on Z-cut lithium niobate

Author

Laurent Badie, Cecile Floer, Sergei Zhgoon, Louis Verzellesi, Sami Hage-Ali, and Omar Elmazria

Subjects
010302 applied physics, Materials science, business.industry, Surface acoustic wave, Lithium niobate, Substrate (electronics), 01 natural sciences, Temperature measurement, Flexible electronics, chemistry.chemical_compound, chemistry, 0103 physical sciences, Optoelectronics, Wireless, business, 010301 acoustics
Abstract

Surface acoustic wave devices are increasingly used as sensors, especially because they can be batteryless, wireless and packageless. With these features they become particularly interesting in the field of flexible electronics for the monitoring of the human body parameters. By combining a thinned lithium niobate Z-cut substrate to ultrathin and stretchable antennas, a remote temperature measurement has been demonstrated. The addition of two protective layers to obtain a packageless structure seems promising to achieve wireless temperature measurements on the skin.

Published
2019

32. SAW RFID Devices Using Connected IDTs as an Alternative to Conventional Reflectors

Author

Sami Hage-Ali, Sergei Zhgoon, A. Shvetsov, Pascal Nicolay, Hugo Chambon, Omar Elmazria, and Cecile Floer

Subjects
Physics, Series (mathematics), business.industry, Interdigital transducer, 010401 analytical chemistry, Lithium niobate, 020206 networking & telecommunications, 02 engineering and technology, Substrate (electronics), 01 natural sciences, 0104 chemical sciences, chemistry.chemical_compound, Reflection (mathematics), Amplitude, Transmission (telecommunications), chemistry, 0202 electrical engineering, electronic engineering, information engineering, Optoelectronics, business, Coupling coefficient of resonators
Abstract

Remote interrogation of SAW ID-tags imposes a high coupling coefficient value ($\text{K}^{\mathbf {2}}$), which many of the most promising substrates for high temperature applications do not possess. In this paper, we propose and discuss an alternative configuration to the standard one. Here, we replaced the standard configuration, i.e. one interdigital transducer (IDT) and several disconnected reflectors, by a series of electrically connected IDTs. The goal is to increase the amplitude of the reflected signals, using direct transmission between IDTs instead of the reflection on passive reflectors. Numerical simulations show promising results. A test structure was also characterized experimentally. As a first step, the test structure was based on the well-known lithium niobate $128 ^{\circ}\mathrm {Y} -\mathrm {X}-$cut substrate. This concept will be extended to other substrates with lower $\text{K}^{\mathbf {2}}$ value, which should prove especially interesting for high temperature applications.

Published
2019

33. Stoichiometric Lithium Niobate Crystals: Towards Identifiable Wireless Surface Acoustic Wave Sensors Operable up to 600$^\circ$C

Author

Omar Elmazria, Jeremy Streque, Vincent Polewczyk, Edvard Kokanyan, Florian Bartoli, Sami Hage-Ali, Thierry Aubert, Ninel Kokanyan, Amine Taguett, Pascal Boulet, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institute for Physical Research of National Academy of Sciences of Armenia (IPR NAS RA), National Academy of Sciences of the Republic of Armenia [Yerevan] (NAS RA), IMPACT N4S, and ANR-15-IDEX-0004,LUE,Isite LUE(2015)

Subjects
Electromechanical coupling coefficient, Diffraction, Materials science, Surface acoustic waves, Microsensors, Lithium niobate, FOS: Physical sciences, Physics - Classical Physics, Applied Physics (physics.app-ph), 01 natural sciences, Resonator, symbols.namesake, chemistry.chemical_compound, 0103 physical sciences, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010301 acoustics, Instrumentation, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Condensed Matter - Materials Science, business.industry, 010401 analytical chemistry, Surface acoustic wave, Materials Science (cond-mat.mtrl-sci), Classical Physics (physics.class-ph), Physics - Applied Physics, 0104 chemical sciences, High-temperature sensors, Stoichiometric lithium niobate, chemistry, symbols, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Surface acoustic wave sensor, Raman spectroscopy, business, Stoichiometry
Abstract

Wireless surface acoustic wave (SAW) sensors constitute a promising solution to some unsolved industrial sensing issues taking place at high temperatures. Currently, this technology enables wireless measurements up to 600-700$^\circ$C at best. However, the applicability of such sensors remains incomplete since they do not allow identification above 400$^\circ$C. The latter would require the use of a piezoelectric substrate providing a large electromechanical coupling coefficient K 2 , while being stable at high temperature. In this letter, we investigate the potentiality of stoichiometric lithium niobate (sLN) crystals for such purpose. Raman spectroscopy and X-ray diffraction attest that sLN crystals withstand high temperatures up to 800$^\circ$C, at least for several days. In situ measurements of sLN-based SAW resonators conducted up to 600$^\circ$C show that the K 2 of these crystals remains high and stable throughout the whole experiment, which is very promising for the future achievement of identifiable wireless high-temperature SAW sensors.

Published
2019
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34. Corrections to 'Enhanced Performance Love Wave Magnetic Field Sensors With Temperature Compensation' [Oct 20 11292-11301]

Author

Daniel Lacour, Tao Han, Harshad Mishra, Sami Hage-Ali, Michel Hehn, Omar Elmazria, Prince Mengue, Hamid M'Jahed, Sébastien Petit-Watelot, and Yang Yang

Subjects
Physics, Love wave, Quantum electrodynamics, 010401 analytical chemistry, Electrical and Electronic Engineering, 01 natural sciences, Instrumentation, 0104 chemical sciences, Compensation (engineering), Volume (compression), Magnetic field
Abstract

In the above article [1] , by Yang et al. , published in IEEE Sensors Journal, volume 20, issue 19, pp. 11292–11301, in 2020, we would like to correct the coauthor Daniel Lacour’s biography on page 11300.

Published
2021

35. Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications

Author

Thierry Aubert, Jeremy Streque, Philippe Pigeat, Natalya F. Naumenko, Pascal Boulet, Jaafar Ghanbaja, Sami Hage-Ali, A. Redjaïmia, Florian Bartoli, Omar Elmazria, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), National University of Science and Technology (MISIS), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), and CentraleSupélec-Université de Lorraine (UL)

Subjects
Electromechanical coupling coefficient, Materials science, SAW sensors, 02 engineering and technology, Nitride, lcsh:Chemical technology, Epitaxy, 01 natural sciences, Biochemistry, [SPI.MAT]Engineering Sciences [physics]/Materials, Analytical Chemistry, Sputtering, 0103 physical sciences, lcsh:TP1-1185, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Electrical and Electronic Engineering, Thin film, Instrumentation, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], 010302 applied physics, business.industry, Sputter deposition, 021001 nanoscience & nanotechnology, Atomic and Molecular Physics, and Optics, ScAlN thin films, Full width at half maximum, hetero-epitaxial films, Sapphire, Optoelectronics, sputtering, 0210 nano-technology, business
Abstract

Scandium aluminum nitride (ScxAl1-xN) films are currently intensively studied for surface acoustic waves (SAW) filters and sensors applications, because of the excellent tradeoff they present between high SAW velocity, large piezoelectric properties and wide bandgap for the intermediate compositions with an Sc content between 10 and 20%. In this paper, the growth of Sc0.09Al0.91N and Sc0.18Al0.82N films on sapphire substrates by sputtering method is investigated. The plasma parameters were optimized, according to the film composition, in order to obtain highly-oriented films. X-ray diffraction rocking-curve measurements show a full width at half maximum below 1.5&deg, Moreover, high-resolution transmission electron microscopy investigations reveal the epitaxial nature of the growth. Electrical characterizations of the Sc0.09Al0.91N/sapphire-based SAW devices show three identified modes. Numerical investigations demonstrate that the intermediate compositions between 10 and 20% of scandium allow for the achievement of SAW devices with an electromechanical coupling coefficient up to 2%, provided the film is combined with electrodes constituted by a metal with a high density.

Published
2020

36. Study of Cr-Si Electrodes on Langasite Surface Acoustic Wave Resonators for High Temperature Sensing

Author

Streque, J., Soussou, M. A., Florian Bartoli, Sami Hage-Ali, Thierry Aubert, Thomas Mazingue, Marc Lomello, Omar Elmazria, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire SYstèmes et Matériaux pour la MEcatronique (SYMME), Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry]), Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), and Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, ComputingMilieux_MISCELLANEOUS, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience

Published
2018

37. AlN/ZnO/LiNbO 3 Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications

Author

M. Moutaouekkil, Florian Bartoli, Omar Elmazria, Cecile Floer, Olivier Bou Matar, Philippe Pigeat, Sami Hage-Ali, Sergei Zhgoon, Harshad Mishra, Thierry Aubert, Abdelkrim Talbi, Stefan Mc Murtry, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), National Research University, Moscow Power Engineering Institute, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), ANR-18-CE42-0004,SAWGOOD,Dispositifs sans fils étirables à ondes acoustiques de surface : vers des capteurs passifs multifonctionnels imprimés sur la peau(2018), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), ACKNOWLEDGMENTThe authors would like to thank L. Badie, G. Lengaigne, and F. Montaigne from Minalor platform, Institut Jean Lamour, Nancy, France, for their help in the microfabrication., and This work was supported in part by the Direction Générale de l’Armement, in part by the Région Grand-Est, in part by the European funds FEDER, in part by the French PIA project 'Lorraine Université d’Excellence' under Grant ANR-15-IDEX-04-LUE, and in part by the Ministry of Science and Education of Russian Federation under Grant 8.6108.2017/6.7.

Subjects
Materials science, Acoustics and Ultrasonics, Temperature sensing, Acoustics, Lithium niobate, Structure (category theory), 02 engineering and technology, Particle displacement, Acoustic wave, 021001 nanoscience & nanotechnology, 01 natural sciences, Condensed Matter::Materials Science, chemistry.chemical_compound, symbols.namesake, chemistry, 0103 physical sciences, symbols, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Surface acoustic wave sensor, Electrical and Electronic Engineering, Rayleigh wave, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, 010301 acoustics, Instrumentation
Abstract

International audience; Surface acoustic wave (SAW) sensors find their application in a growing number of fields. This interest stems in particular from their passive nature and the possibility of remote interrogation. Still, the sensor package, due to its size, remains an obstacle for some applications. In this regard, packageless solutions are very promising. This paper describes the potential of the AlN/ZnO/LiNbO3 structure for packageless acoustic wave sensors. This structure, based on the waveguided acoustic wave principle, is studied numerically and experimentally. According to the COMSOL simulations, a wave, whose particle displacement is similar to a Rayleigh wave, is confined within the structure when the AlN film is thick enough. This result is confirmed by comprehensive experimental tests, thus proving the potential of this structure for packageless applications, notably temperature sensing. Index Terms-Surface acoustic wave SAW, temperature sensor, waveguiding layer acoustic wave WLAW, packageless, low-profile.

Published
2018

38. AlN/GaN/Sapphire heterostructure for high-temperature packageless acoustic wave devices

Author

Hamid M'Jahed, M. Moutaouekkil, Sergei Zhgoon, Abdelkrim Talbi, Thierry Aubert, Jeremy Streque, Philippe Pigeat, Florian Bartoli, Sami Hage-Ali, Omar Elmazria, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université Mohammed Premier [Oujda], National Research University, Moscow Power Engineering Institute, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), and Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN)

Subjects
Materials science, SAW, 02 engineering and technology, High-temperature, 01 natural sciences, Packageless Sensor, law.invention, [SPI]Engineering Sciences [physics], law, 0103 physical sciences, Lamination, Scattering parameters, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010301 acoustics, Instrumentation, Deposition (law), business.industry, Metals and Alloys, Heterojunction, Acoustic wave, TCF, 021001 nanoscience & nanotechnology, Condensed Matter Physics, WLAW, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, Sapphire, Optoelectronics, 0210 nano-technology, business, Temperature coefficient, Layer (electronics)
Abstract

International audience; — Surface acoustic waves (SAW) technology is very promising to achieve wireless sensors able to operate in high temperature environments up to possibly 1000°C. However, there is currently a bottleneck related to the packaging of such sensors. The current high-temperature packaging solutions can withstand 600°C at most. This limitation could be overtaken by the development of packageless devices, based on the waveguiding layer acoustic waves (WLAW) principle. In such devices, the acoustic wave is confined inside an inner layer and is then isolated from undesired surface perturbations like dust deposition. In this paper, we investigate the performance of an AlN/IDT/GaN/Sapphire WLAW device used as a temperature sensor able to operate up to 500°C. After validating a room-temperature GaN material constant set with basic SAW measurements performed on IDT/GaN/Sapphire structure, the AlN/IDT/GaN/Sapphire device is simulated to determine the optimal relative thicknesses of AlN and GaN films in order to obtain a good wave confinement. Based on these calculations, an experimental WLAW device is performed and electrically characterized. The full wave confinement is experimentally confirmed by the lamination of an acoustic absorber on top of the device: no change in the scattering parameters was observed. The WLAW device is then electrically characterized between the ambient temperature and 500°C. A temperature coefficient of frequency (TCF) value of-34.6 ppm/°C is obtained, demonstrating the potential of the WLAW AlN/IDT/GaN/Sapphire structure as a packageless temperature sensor. Finally, the theoretical TCF of the AlN/IDT/GaN/Sapphire structure was numerically calculated by changing the material constants of AlN, GaN and Sapphire according to the temperature coefficients available in the literature. The theoretical and experimental data were found in good accordance.

Published
2018

39. AlN/ZnO/LiNbO

Author

Cecile, Floer, Sami, Hage-Ali, Sergei, Zhgoon, Mohammed, Moutaouekkil, Florian, Bartoli, Harshad, Mishra, Stefan, Mc Murtry, Philippe, Pigeat, Thierry, Aubert, Olivier, Bou Matar, Abdelkrim, Talbi, and Omar, Elmazria

Abstract

Surface acoustic wave sensors find their application in a growing number of fields. This interest stems in particular from their passive nature and the possibility of remote interrogation. Still, the sensor package, due to its size, remains an obstacle for some applications. In this regard, packageless solutions are very promising. This paper describes the potential of the AlN/ZnO/LiNbO

Published
2018

40. Experimental Study of Multilayer Piezo-magnetic SAW Delay Line for Magnetic Sensor

Author

Daniel Lacour, Keltouma Ait Aissa, Sébastien Petit-Watelot, Michel Hehn, Sami Hage-Ali, Abdelkrim Talbi, Omar Elmazria, and Meriem Elhosni

Subjects
Materials science, SAW, Magnetic SAW sensor, business.industry, General Medicine, Acoustic wave, Line (electrical engineering), Magnetic field, Layered structure, Condensed Matter::Materials Science, In plane, Acoustic wave propagation, Optics, Electronic engineering, Perpendicular, business, Layer (electronics), Engineering(all)
Abstract

This communication describes an experimental study of multilayer piezo-magnetic acoustic wave devices used as sensors of external magnetic fields applied in plane, parallel or perpendicular to the direction of the acoustic wave propagation direction. The considered device consists of a layered structure Mag/ZnO/IDT/LNY-128, Mag being the sensitive magnetoelastic layer. Two magnetoelastic films are investigated as sensitive layers: Ni and CoFeB. Their sensitivities to the magnetic field intensity and direction are measured and compared.

Published
2015

41. Control of the magnetic response in magnetic field SAW sensors

Author

Omar Elmazria, S. Petit Watelot, Hamid M'Jahed, Vincent Polewczyk, Harshad Mishra, Abdelkrim Talbi, Michel Hehn, Sami Hage-Ali, Daniel Lacour, Karine Dumesnil, O. Bou Matar, Yannick Dusch, Nicolas Tiercelin, Cecile Floer, and M. Moutaouekkil

Subjects
010302 applied physics, Materials science, Field (physics), Magnetoresistance, Plane (geometry), Acoustics, 010401 analytical chemistry, Surface acoustic wave, 01 natural sciences, 0104 chemical sciences, Magnetic field, Resonator, 0103 physical sciences, Electrode, Perpendicular
Abstract

Surface acoustic wave devices including magnetic materials have been shown to be useful to build up magnetic sensors. In the resonator geometry, we take advantage of the shape of the electrodes to engineer the response of the device. We studied theoretically and experimentally the response when the field is applied in the device plane, perpendicular to the electrode length. We show that the field range of measure can be adapted, for the same material, by changing either the thickness of the electrodes or their width.

Published
2017

42. AlN/ZnO/LiNbO3 packageless structure as a low-profile sensor for on-body applications

Author

Olivier Bou Matar, Stefan Mc Murtry, Thierry Aubert, M. Moutaouekkil, Abdelkrim Talbi, Cecile Floer, Omar Elmazria, Sami Hage-Ali, Florian Bartoli, Sergei Zhgoon, Harshad Mishra, Philippe Pigeat, Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), National Research University, Moscow Power Engineering Institute, Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), and Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN)

Subjects
010302 applied physics, Materials science, business.industry, Surface acoustic wave, 02 engineering and technology, Acoustic wave, Conformable matrix, 021001 nanoscience & nanotechnology, 01 natural sciences, Resonator, 0103 physical sciences, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Wireless, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business, Layer (electronics), ComputingMilieux_MISCELLANEOUS
Abstract

Surface acoustic wave (SAW) devices are widely used as filters or resonators for mobile communications or radars applications. However, the velocity of the wave can be very sensitive to physical parameters of the environment (temperature, strain…), which allows the device to be used as a sensor. SAW devices are passive (batteryless) and wireless, but are often bulky due to the package. To dramatically reduces their profile, it is possible to use a Wave-guiding Layer Acoustic Wave (WLAW) structure, which consists of a low velocity layer between two higher velocity layers. These structures have the potential to be ultra-thin and conformable and thus could be used for flexible on-body biomedical applications. This work investigates the AlN/ZnO/LiNbO 3 structure as a candidate for a WLAW temperature sensor.

Published
2017

43. Notice of Removal: SAW resonators for magnetic field sensing with (TbCo2/FeCo) multilayered IDTs as sensitive layer

Author

Sami Hage-Ali, Karine Dumesnil, M. Moutaouekkil, Omar Elmazria, Vincent Polewczyk, Nicolas Tiercelin, Cecile Floer, Harshad Mishra, Abdelkrim Talbi, and Michel Hehn

Subjects
Resonator, Nuclear magnetic resonance, Transducer, Materials science, business.industry, Optoelectronics, Magnetostriction, Substrate (electronics), Acoustic wave, business, Layer (electronics), Line (electrical engineering), Magnetic field
Abstract

In previous studies [1,2] we have shown the possibility to realize wireless magnetic SAW sensors with a delay line configuration using layered structures. SAW devices in resonator configuration with Ni interdigital transducers (IDT) on the substrate were also investigated by Kadota et al. [3]. The physical phenomena behind sensor behavior is still unclear and the interpretation of the results is not fully in line with the proposed theoretical models. This work aims to understand the physics and the interaction between acoustic waves and magnetostrictive layers under magnetic fields. Here, we investigate multilayer (LiNbO3/(TbCo2/FeCo)) SAW structures with different geometries and configurations.

Published
2017

45. Notice of Removal: AlN/GaN/spphire as promising structure for wireless, batteryless and packageless acoustic wave sensors for high temperature applications

Author

M. Moutaouekkil, Florian Bartoli, Sami Hage-Ali, Omar Elmazria, Serguei Zhgoon, Abdelkrim Talbi, and Thierry Aubert

Subjects
Work (thermodynamics), Materials science, business.industry, Context (language use), Gallium nitride, 02 engineering and technology, Acoustic wave, Atmospheric temperature range, 021001 nanoscience & nanotechnology, Engineering physics, chemistry.chemical_compound, chemistry, Sapphire, Miniaturization, Wireless, 0210 nano-technology, business
Abstract

Waveguiding layer acoustic waves (WLAW) technology is considered as a packageless solution for extreme miniaturization of acoustic wave devices. WLAW solution is also original and suitable for high-temperature applications. Indeed, the achievement of a stable high-temperature packaging still constitutes a technological lock, in particular regarding sealing performance. In this context, we consider AlN/GaN/Sapphire as a promising WLAW structure for high-temperature applications. Indeed, the high-temperature stability of these three materials was previously demonstrated. However, in order to develop fully operational WLAW sensors based on this layered structure, it is necessary to have a better knowledge of the behaviour of each constitutive material with respect to the temperature. Consequently, the aim of this work is to experimentally validate GaN and AlN elastic constants sets in a large temperature range, which is a prerequisite to make the design of WLAW sensors according to the targeted performance.

Published
2017

46. Unipolar and Bipolar High-Magnetic-Field Sensors Based on Surface Acoustic Wave Resonators

Author

Abdelkrim Talbi, S. Petit Watelot, Harshad Mishra, Michel Hehn, Karine Dumesnil, O. Bou Matar, Yannick Dusch, Sami Hage-Ali, Nicolas Tiercelin, Omar Elmazria, Hamid M'Jahed, François Montaigne, Vincent Polewczyk, M. Moutaouekkil, Daniel Lacour, Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire International associé sur les phénomènes Critiques et Supercritiques en électronique fonctionnelle, acoustique et fluidique (LIA LICS/LEMAC), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 (IEMN), Centre National de la Recherche Scientifique (CNRS)-Université de Lille-Université Polytechnique Hauts-de-France (UPHF)-Ecole Centrale de Lille-Université Polytechnique Hauts-de-France (UPHF)-Institut supérieur de l'électronique et du numérique (ISEN), ANR-15-IDEX-04-LUE,LUE,Lorraine Université d'Excellence(2016), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
010302 applied physics, Surface acoustic wave resonators, Materials science, Acoustics, Surface acoustic wave, Measure (physics), General Physics and Astronomy, Magnetostriction, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Magnetic field, Transducer, Ferromagnetism, 0103 physical sciences, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Surface acoustic wave sensor, 0210 nano-technology
Abstract

International audience; While surface acoustic wave (SAW) sensors have been used to measure temperature, pressure, strains, and low magnetic fields, the capability to measure bipolar fields and high fields is lacking. In this paper, we report magnetic surface acoustic wave sensors that consist of interdigital transducers made of a single magnetostrictive material, either Ni or TbFe 2 , or based on exchange-biased (Co=IrMn) multilayers. By controlling the ferromagnet magnetic properties, high-field sensors can be obtained with unipolar or bipolar responses. The issue of hysteretic response of the ferromagnetic material is especially addressed, and the control of the magnetic properties ensures the reversible behavior in the SAW response.

Published
2017

47. Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Author

Abdelkrim Talbi, Omar Elmazria, Daniel Lacour, Olivier Bou-Matar, Sébastien Petit-Watelot, Frederic Sarry, L. Bouvot, Meriem Elhosni, Sergei Zhgoon, Keltouma Ait Aissa, Sami Hage-Ali, Michel Hehn, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), National Research University, Moscow Power Engineering Institute, Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 (IEMN), Centre National de la Recherche Scientifique (CNRS)-Université de Lille-Université Polytechnique Hauts-de-France (UPHF)-Ecole Centrale de Lille-Université Polytechnique Hauts-de-France (UPHF)-Institut supérieur de l'électronique et du numérique (ISEN), IMPACT N4S, ANR-15-IDEX-04-LUE,LUE,Lorraine Université d'Excellence(2016), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), ANR-15-IDEX-0004,LUE,Isite LUE(2015), Moscow Power Engineering Institute (MPEI), and Ecole Centrale de Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université Polytechnique Hauts-de-France (UPHF)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Subjects
Materials science, SAW, Acoustics, 02 engineering and technology, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Resonator, magnetic field sensor, 0103 physical sciences, FEM Modeling, Sensitivity (control systems), Electrical and Electronic Engineering, [PHYS.COND]Physics [physics]/Condensed Matter [cond-mat], Instrumentation, 010302 applied physics, [PHYS]Physics [physics], [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], [PHYS.PHYS]Physics [physics]/Physics [physics], business.industry, multilayer, Surface acoustic wave, Metals and Alloys, Magnetostriction, Structural engineering, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Piezoelectricity, Finite element method, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Magnetic field, [SPI.TRON]Engineering Sciences [physics]/Electronics, Transducer, wireless, 0210 nano-technology, business
Abstract

International audience; This study describes the numerical implementation of accurate and fully coupled physical models in order to investigate the sensitivity of Surface Acoustic Wave (SAW) devices using the magnetoelas-tic interaction with an external magnetic field. The model was first validated using experimental data previously published by Kadota et al. obtained with SAW resonators based on quartz substrates and nickel Inter Digital Transducers (IDTs). The model was then used to optimize the geometry of a new magnetostrictive-piezoelectric layered structure (Ni/ZnO/IDT/LiNbO 3), regarding its sensitivity to the magnetic field intensity. The optimized structure was designed and fabricated and experimental results show a good correlation with the numerical modeling. Simulations also show that if alumina is used instead of ZnO, the Ni/Al 2 O 3 /IDT/LiNbO 3 structure exhibits a sensitivity that is 9 times higher than the one based on ZnO.

Published
2016

48. A Millimeter-Wave Microstrip Antenna Array on Ultra-Flexible Micromachined Polydimethylsiloxane (PDMS) Polymer

Author

Ronan Sauleau, Philippe Pernod, Vladimir Preobrazhensky, Sami Hage-Ali, Ph. Coquet, Nicolas Tiercelin, Hiroyuki Fujita, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Institut d'Électronique et des Technologies du numéRique (IETR), Nantes Université (NU)-Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 (IEMN), Centre National de la Recherche Scientifique (CNRS)-Université de Lille-Université Polytechnique Hauts-de-France (UPHF)-Ecole Centrale de Lille-Université Polytechnique Hauts-de-France (UPHF)-Institut supérieur de l'électronique et du numérique (ISEN), Institut d'Electronique et de Télécommunications de Rennes (IETR), Université de Nantes (UN)-Université de Rennes 1 (UR1), Department of Physics, Osaka University [Osaka], Université de Nantes (UN)-Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)

Subjects
chemistry.chemical_classification, Materials science, Polydimethylsiloxane, business.industry, 020206 networking & telecommunications, 02 engineering and technology, Polymer, 021001 nanoscience & nanotechnology, 7. Clean energy, [SPI.ELEC]Engineering Sciences [physics]/Electromagnetism, chemistry.chemical_compound, Microstrip antenna, Membrane, Electric power transmission, chemistry, Extremely high frequency, 0202 electrical engineering, electronic engineering, information engineering, Optoelectronics, Millimeter, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Electrical and Electronic Engineering, 0210 nano-technology, business, Microwave
Abstract

The use of Polydimethylsiloxane (PDMS), an ultra flexible polymer, as a substrate for the realization of reconfigurable microwave devices in the 60-GHz band is presented. As bulk PDMS is demonstrated to be lossy at millimeter waves, membrane-supported devices are considered. A new reliable and robust technological process has been developped to micromachine membrane-supported transmission lines and microstrip antenna arrays. It is shown that transmission lines printed on 20-µm thick membranes exhibit similar performances as bulk substrates commonly used at millimeter-wave frequencies. A microstrip antenna array has been also designed and fabricated to demonstrate the feasibility of directive antennas supported by large membranes. Promising applications for mechanical beam-steering, beam forming and frequency tunable antennas are expected.

Published
2009

49. Potential of Al2O3/GaN/Sapphire layered structure for high temperature SAW sensors

Author

Laetitia Lefevre, Ouarda Legrani, Sami Hage-Ali, Meriem Elhosni, Omar Elmazria, Sergei Zhgoon, Thierry Aubert, Hamza Mersni, National Research University, Moscow Power Engineering Institute, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Laboratoire SYstèmes et Matériaux pour la MEcatronique (SYMME), and Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])

Subjects
[PHYS]Physics [physics], Materials science, business.industry, Gallium nitride, 02 engineering and technology, Acoustic wave, 021001 nanoscience & nanotechnology, 01 natural sciences, Finite element method, Displacement (vector), Layered structure, Harmonic analysis, [SPI]Engineering Sciences [physics], chemistry.chemical_compound, chemistry, 0103 physical sciences, Sapphire, Optoelectronics, 0210 nano-technology, business, 010301 acoustics, Layer (electronics)
Abstract

International audience; This paper describes the investigation of the potential of packageless structures for acoustic wave sensor applications based on Al2O3/IDT/GaN/Sapphire structure. The finite elements modeling predicts the possibility of acoustically isolated waveguiding layer acoustic wave (WLAW) to propagate inside this structure with very low displacement at the top surface of the topmost Al2O3 layer. This layer serves as a protecting layer against oxidation of internal layers as well as an acoustically isolating layer, providing a mean for packageless packaging of this structure. The modeling results get confirmation in experiments with the precursor IDT/GaN/Sapphire structure thus supporting hopes on the predicted correct operation of the final Al2O3/IDT/GaN/Sapphire structure.

Published
2015

50. Inkjet-printed elastomeric millimeter-wave devices

Author

Sami Hage-Ali, Philippe Pernod, Aliénor Togonal, Sébastien Pacchini, Philippe Coquet, and Nicolas Tiercelin

Subjects
Materials science, business.industry, Extremely high frequency, Optoelectronics, business, Elastomer
Published
2014

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