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AlN/Pt/LN-Y128 packageless acoustic wave temperature sensor
- Source :
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Institute of Electrical and Electronics Engineers, 2021, pp.1-1. ⟨10.1109/TUFFC.2021.3057269⟩
- Publication Year :
- 2021
- Publisher :
- HAL CCSD, 2021.
-
Abstract
- Batteryless, wireless, and packageless acoustic wave sensors are particularly desirable for harsh high-temperature environments. In this letter, an acoustic wave sensor based on a lithium niobate (Y + 128° cut, abbreviated LN-Y128) substrate with a buried platinum interdigital transducer (IDT) in an aluminum nitride (AlN) overlayer is investigated. Previously, it was demonstrated theoretically that due to the specific properties of LN-Y128, Rayleigh-type guided waves can propagate at the AlN/IDT(Pt)/LN-Y128 interface. Here, this structure is, for the first time, studied experimentally, including the growth and properties of the AlN layer onto irregular platinum IDTs. Both Shear Horizontal and Rayleigh-type waves have been identified after the AlN deposition and the velocities are consistent with the fitted SDA-FEM-SDA (a combination of finite element modeling with spectral domain analysis) simulations. Electrical measurements with a surface perturbation and temperature measurements show that the AlN/IDT(Pt)/LN-Y128 bilayer structure is promising as a packageless high-temperature sensor.
- Subjects :
- Materials science
Acoustics and Ultrasonics
Interdigital transducer
Lithium niobate
Substrate (electronics)
Nitride
01 natural sciences
Temperature measurement
Packageless
Overlayer
chemistry.chemical_compound
[SPI]Engineering Sciences [physics]
0103 physical sciences
Electrical measurements
Electrical and Electronic Engineering
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
010301 acoustics
Instrumentation
ComputingMilieux_MISCELLANEOUS
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph]
[PHYS]Physics [physics]
business.industry
temperature
Acoustic wave
guided acoustic wave
chemistry
Optoelectronics
business
Subjects
Details
- Language :
- English
- ISSN :
- 08853010
- Database :
- OpenAIRE
- Journal :
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Institute of Electrical and Electronics Engineers, 2021, pp.1-1. ⟨10.1109/TUFFC.2021.3057269⟩
- Accession number :
- edsair.doi.dedup.....b640943c5d4cbe86ede3d63f30a454d5