Search

Your search keyword '"Ryu, Hyuk Ju"' showing total 10 results
Start Over Author "Ryu, Hyuk Ju"
10 results on '"Ryu, Hyuk Ju"'

5. Effect of thin V insertion layer into Ta film on the performance of Ta diffusion barrier in Cu metallization

Author

Kwak, Joon Seop, Baik, Hong Koo, Kim, Jong-Hoon, Lee, Sung-Man, Ryu, Hyuk Ju, and Je, Jung Ho

Subjects
Tantalum -- Research, Copper -- Research, Electrodiffusion -- Research, Physics
Abstract

The impact of a thin V insertion layer into Ta film with/without ion bombardment on Ta diffusion barrier performance in Cu metallization was studied to increase the failure temperature of Ta diffusion barrier for Cu. Results showed that the insertion of the thin V layer into the Ta film enhanced barrier characteristics substantially when the Ta/V/Ta diffusion barrier was deposited with ion bombardment.

Published
1999

10. Phonon Transport and Thermoelectricity in Silicon Nanostructures

Author

Ryu, Hyuk Ju, Ritz, Clark, Klein, Levente, Hamann, Hendrik, Lagally, Max G., and Eriksson, Mark

Abstract

We present both experimental results and a compact model on nanoscale thermal transport in the vicinity of a hot spot in silicon. Effective-local-temperature measurements on the nanoscale are influenced by localized heating effect and a thermal interface resistance, as well as by the spreading resistance in silicon. Ballistic phonon transport is observed for nanoheaters where the interface thermal resistance contribution can be minimized. Thermoelectricity in silicon nanostructures is investigated as a possible route to convert thermal energy into electricity.

Published
2008

Catalog

Books, media, physical & digital resources
See catalog results