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4. Fabrication of photonic waveguides in sulfide chalcogenide glasses by selective wet-etching.

Author

Su, L., Rowlands, C. J., Lee, T. H., and Elliott, S. R.

Subjects
*WAVEGUIDES, *PHOTORESISTS, *SULFIDES, *CHALCOGENIDES, *MICROELECTRONICS
Abstract

A selective wet-etching method for micro-fabricating As2S3 glass ridge waveguides, using CS2 solution with iodine as an oxidising reactant, has been developed. The proposed method is based on photo-induced changes in chalcogenide glasses, and therefore can be free of photomasks and photoresists. The optical properties of such etched ridge waveguides have been tested and they exhibit a more than 2 dB/cm loss reduction compared to laser direct-written channel waveguides. [ABSTRACT FROM AUTHOR]

Published
2008
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