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Fabrication of photonic waveguides in sulfide chalcogenide glasses by selective wet-etching.
- Source :
-
Electronics Letters (Institution of Engineering & Technology) . 3/27/2008, Vol. 44 Issue 7, p472-474. 3p. 1 Black and White Photograph, 1 Graph. - Publication Year :
- 2008
-
Abstract
- A selective wet-etching method for micro-fabricating As2S3 glass ridge waveguides, using CS2 solution with iodine as an oxidising reactant, has been developed. The proposed method is based on photo-induced changes in chalcogenide glasses, and therefore can be free of photomasks and photoresists. The optical properties of such etched ridge waveguides have been tested and they exhibit a more than 2 dB/cm loss reduction compared to laser direct-written channel waveguides. [ABSTRACT FROM AUTHOR]
- Subjects :
- *WAVEGUIDES
*PHOTORESISTS
*SULFIDES
*CHALCOGENIDES
*MICROELECTRONICS
Subjects
Details
- Language :
- English
- ISSN :
- 00135194
- Volume :
- 44
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Electronics Letters (Institution of Engineering & Technology)
- Publication Type :
- Academic Journal
- Accession number :
- 31416899
- Full Text :
- https://doi.org/10.1049/el:20080510