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Advances in neural prosthetic technologies demand ever increasing novelty in material composition to enhance the mechanical and electrochemical properties of existing microelectrode arrays. Conductive polymers present advantages such as mechanical flexibility, outstanding biocompatibility, remarkable electrical properties and, most of all, cellular agreement. However, for long-term chronic applications, they fall short in their electrochemical endurance and mechanical adhesion to their substrate materials. Multiple electrochemical approaches have been investigated to improve the adherence of Poly(3,4-ethylenedioxythiophene) (PEDOT) to underlying metallic thin films. In this work, an electrochemical treatment of diazonium salt on platinum microelectrodes is incorporated as an electrochemical adhesion promoter for PEDOT and it is further combined with using the highly microporous geometry of Platinum Grey (Pt-Grey); a technology developed by Second Sight Medical Products Inc (SSMP). The intertwined mechanical integration of Pt-Grey and PEDOT molecules together with the covalent binding agency of diazonium salt demostrate a composite coating technology with long-term stability of more than 452 days while providing >70× enhancement to the interfacial capacitive impedance.

A cortical visual prosthetic system bypasses the components of the visual pathway, which may be damaged due to injury or disease, by directly stimulating the visual cortex; therefore, cortical visual prostheses promise the capability of restoring a form of vision to patients who cannot benefit from other types of visual neural stimulators. A high data rate, multielectrode, implantable device, such as that utilized for a cortical visual prosthesis, requires continuous power provided by an external telemetry unit, which is nonnegligible, given the number of stimulating electrodes and the stimulation rate necessary to avoid flickering visual percepts. This aspect motivates the need to develop models and methods that aid the development of such devices by assessing their compliance with electromagnetic safety standards. In this paper, the electromagnetic safety assessment of a cortical visual prosthetic system is considered, and the solutions employed to numerically treat the computational complexities associated with it are discussed. The specifics of the implementation of an actual visual cortical implant are discussed, and the parameters of such an implant are used as a test case to determine whether IEEE and ICNIRP electromagnetic standards are met in what can be considered a typical embodiment of the prosthesis. Results show that, for the considered implant, such a system meets IEEE and ICNIRP safety standards, thus enabling further development of similar neurorehabilitative devices.

The goal of this project is to build a miniaturized, user-friendly cytometry setup (Datta et al. in Microfluidic platform for education and research. COMS, Baton Rouge, 2008; Frische et al. in Development of an miniaturized flow cytometry setup for visual cell inspection and sorting. Baton Rouge, Project Report, 2008) by combining a customized, microfluidic device with visual microscope inspection to detect and extract specific cells from a continuous sample flow. We developed a cytological tool, based on the Coulter particle counter principle, using a microelectrode array patterned on a borosilicate glass chip as electrical detection set-up which is fully embedded into a polymeric multi-layer microfluidic stack. The detection takes place between pairs of coplanar Cr/Au microelectrodes by sensing an impedance change caused by particles continuously carried within a microfluidic channel across the detection area under laminar flow conditions. A wide frequency range available for counting provides information on cell size, membrane capacitance, cytoplasm conductivity and is potentially of interest for in-depth cell diagnostic e.g. to detect damaged or cancerous cells and select them for extraction and further in-depth analysis.

Integration of electronic wiring with microfluidic chips is an important process as it allows electrical interactions with the fluidic media, for example required for resistive and capacitive sensing. It is also necessary in order to implement various actuation and control mechanisms such as pumping, electrophoresis and temperature control. Typically electrical wire traces are added to microfabricated fluidic chips using metal deposition processes that are carried out after the fluidic chip has been fabricated. The process for adding the wiring is complicated and is limited to select metals that can be deposited by evaporation or sputtering. We present a single step method for integrating electrical wires into polymer microfluidic chips that are fabricated by a hot embossing process. This process can flexibly embed any kind of commercially available metal wire with a microfluidic chip and the wiring may be integrated to come into surface contact with the fluid or may be embedded in close proximity to (but insulated from)the fluid paths for example for local heating purposes. This method significantly reduces total processing time and is thus a valuable method for wire integration into polymer chips. We demonstrate two applications—a microelectrolysis chip and a heater chip that were fabricated using this methodology. The design, fabrication process and the initial test results are presented.

Polymeric microfluidic chips are an enabling component for cost-effective, point of care analytical devices for pharmaceutical, agriculture, health, biological and medical applications. The microfluidic structures can be completed with active elements like pumps and valves as well as sensor components for more complex so called total analysis systems. Often, systems are designed as reader and disposable cartridge where the fluidic structures are simple devices that will be inserted into the reader, which executes the analytical protocol and displays the information in digital form, and disposed after completion of the analysis. In this paper, a hybrid fabrication approach was employed to build a polymeric microfluidic device, so-called sweatstick, suitable for collecting small, precise amounts (600 μl) of human sweat, which were further analyzed for the amount of calcium ions indicating bone mass loss. The device was assembled from different parts fabricated by ultra deep X-ray lithography, precision micro-milling, and molding. Surface treatment of liquid exposed surfaces by oxygen plasma ensures hydrophilic behavior and proper capillary action. Preliminary testing of the device was performed by collecting defined amounts of sweat simulant and determining the calcium ion content using a fluorescent technique. The results for low calcium ion concentration typical for human sweat were excellent and repeatable with variation less than 5% demonstrating the ability to perform indirect bone loss measurements.

Molding technologies associated with fabricating macro scale polymer components such as injection molding and hot embossing have been adapted with considerable success for fabrication of polymer microparts. While the basic principles of the process remain the same, the precision with which the processing parameters need to be controlled especially in the case of molding high aspect ratio (HAR) polymer microparts into polymer sheets is much greater than in the case of macro scale parts. It is seen that the bulk effects of the mold insert fixture and molding machine have a dominant influence on the molding parameters and that differences in material parameters such as the glass transition temperature (Tg) of polymer sheets are critical for the success and typically differ from sheet to sheet. This makes it very challenging to establish standard processing parameters for hot embossing of sheet polymers. In the course of this paper, a methodology for developing a hot embossing process for HAR microstructures based on known material properties and considering the cumulative behavior of mold, material, and machine will be presented. Using this method force–temperature–deflection curves were measured with the intent of fine tuning the hot embossing process. Tests were carried out for different materials using a dummy mold insert yielding information that could be directly transferred to the actual mold insert with minimum development time and no risk of damage to the actual microstructures.

Since 1995 CAMD has been offering exposure services, so called print shop for a variety of users interested in making precision High-Aspect-Ratio Microstructures (HARMST) for various application. Services have been expanded beyond only the print shop service in recent years and now include x-ray mask fabrication, substrate preparation for PMMA and SU- 8 resists, electroplating, finishing and molding. Metallic and polymeric parts are now routinely fabricated for precision engineering, micro-fluidic and micro-optic applications. This paper presents a brief overview of the actual status of LiGA services provided at CAMD including ongoing research efforts and examples of LiGA components for different applications.

Microfluidic is a field of considerable interest. While significant research has been carried out to develop microfluidic components, very little has been done to integrate the components into a complete working system. We present a flexible modular system platform that addresses the requirements of a complete microfluidic system. A microfluidic stack system is demonstrated with the layers of the stack being modular for specific functions. The stack and accompanying infrastructure provides an attractive platform for users to transition their design concepts into a working microfluidic system quickly with very little effort. The concept is demonstrated by using the system to carry out a chemilumiscence experiment. Details regarding the fabrication, assembly and experimental methods are presented.

In this paper, we report the first results from an in situ XANES experiment using a microreactor system for the wet chemical synthesis of Co nanoparticles. In this system, time resolution (in the order of milliseconds) is obtained by spatial resolution, i.e. by measuring spectra at various points along the microreactor.

Infectious diseases are a major global health burden accounting for approximately 15 million deaths annually, many from drug resistant pathogenic agents, with a significant number of cases occurring in developing countries.[1–7] In particular, the resurgence of tuberculosis (TB) has been accompanied by the rapid spread of multi-drug resistance TB (MDR-TB) resulting from Mycobacterium tuberculosis (Mtb) strains that fail to respond to the first-line drugs, rifampin and isoniazid. Currently

The fabrication and characterization of a novel cyclic olefin copolymer (COC) waveguide embedded in a poly(methyl methacrylate), PMMA, fluidic chip configured in a multi-channel format with an integrated monolithic prism for evanescent fluorescence excitation are reported. The fabrication approach allowed the embedded waveguide to be situated orthogonal to a series of fluidic channels within the PMMA wafer to sample fluorescent solutions in these channels using the evanescence properties of the waveguide. Construction of the device was achieved using several fabrication techniques including high precision micromilling, hot embossing and stenciling of a polymer melt to form the waveguide and coupling prism. A waveguide channel was fabricated in the fluidic chip's cover plate, also made from PMMA, and was loaded with a COC solution using a pre-cast poly(dimethylsiloxane), PDMS, stencil containing a prism-shaped recess. The PMMA substrate contained multiple channels (100 microm wide x 30 microm deep with a pitch of 100 microm) that were situated orthogonal to the waveguide to allow penetration of the evanescent field into the sampling solution. The optical properties of the waveguide in terms of its transmission properties and penetration depth of the evanescent field in the adjacent solution were evaluated. Finally, the device was used for laser-induced fluorescence evanescent excitation of a dye solution hydrodynamically flowing through multiple microfluidic channels in the chip and processed using a microscope equipped with a charge-coupled device (CCD) for parallel readout. The device and optical system were able to image 11 channels simultaneously with a limit-of-detection of 7.1 x 10(-20) mol at a signal-to-noise ratio of 2. The waveguide was simple to manufacture and could be scaled to illuminate much higher channel numbers making it appropriate for high-throughput measurements using evanescent excitation.

In order for Magnetoresistive Biosensor technology to become a mainstream product for clinical and consumer use, several outstanding technical issues must be solved. This paper will focus on one of those issues, which is the need to adapt standard semiconductor packaging processes to fall within some biosensor fabrication process constraints. A set of materials and interconnection methods that meet these biosensor requirements are presented. The resulting architecture is compatible with laboratory assembly, but can be scaled up to small and medium manufacturing quantities by using larger 2-dimensional areas per production batch.

A 96-well solid-phase reversible immobilization (SPRI) reactor plate was designed to demonstrate functional titer plate-based microfluidic platforms. Nickel, large area mold inserts were fabricated using an SU-8 based, UV-LIGA technique on 150 mm diameter silicon substrates. Prior to UV exposure, the prebaked SU-8 resist was flycut to reduce the total thickness variation to less than 5 mum. Excellent UV lithography results, with highly vertical sidewalls, were obtained in the SU-8 by using an UV filter to remove high absorbance wavelengths below 350 nm. Overplating of nickel in the SU-8 patterns produced high quality, high precision, metal mold inserts, which were used to replicate titer plate-based SPRI reactors using hot embossing of polycarbonate (PC). Optimized molding conditions yielded good feature replication fidelity and feature location integrity over the entire surface area. Thermal fusion bonding of the molded PC chips at 150 degrees C resulted in leak-free sealing, which was verified in leakage tests using a fluorescent dye. The assembled SPRI reactor was used for simple, fast purification of genomic DNA from whole cell lysates of several bacterial species, which was verified by PCR amplification of the purified genomic DNA.

This paper presents the status and the operation conditions of the 1.3 GeV storage ring at the Center for Advanced Microstructures and Devices (CAMD). An overview of existing beamlines with their relevant parameters is given and four beamlines that came into operation over the last two years are discussed in some detail.

A highly parallel, polymerase chain reaction (PCR) multireactor platform is in high demand to satisfy the high throughput requirements for exploiting the accumulated genetic information from the Human Genome Project. By incorporating continuous flow PCR (CFPCR) devices in a polymer 96-well titer plate format, DNA amplification can be performed with steady-state temperature control and faster reaction speed at lower cost. Prior to the realization of a PCR multi-reactor platform, consisting of a sample delivery chip, a PCR multireactor chip, and a thermal cycler, optimization of the geometry for CFPCR devices in a titer plate-based PCR multi-reactor chip based on manufacturing feasibility is necessary. A prototype PCR multi-reactor chip was designed in a 96-well titer plate format with twelve different CFPCR configurations. High quality metallic, large area mold inserts (LAMIs) were fabricated using an SU-8 based UV-LIGA technique by overplating nickel in SU-8 electroplating templates. Micro molding of polycarbonate (PC) was done using hot embossing, resulting in good replication fidelity over the large surface area. Thermal fusion bonding of the molded PC chips using a custom-made bonding jig yielded acceptable sealing results. The manufacturability investigation throughout the design and the process sequence suggested that the microchannel walls require a minimum width of at least 20 μm and an aspect ratio of 2 for structural rigidity. An optimal CFPCR device for use in a PCR multi-reactor chip can be selected with a series of amplification experiments with the development of a thermal cycler.

A 96-well solid-phase reversible immobilization (SPRI) reactor in a micro molded, photo-activated polycarbonate (PPC) chip was designed, fabricated, and used to purify genomic DNA (gDNA) in a highly parallelized fashion. A SPRI reactor was designed to fit in a 96-well microtiter plate format with compatibility to the existing samples/reagents loading technologies. A high quality, metallic, large area mold insert (LAMI) was fabricated using a SU-8 based UV-LIGA technique. Micro molding of polycarbonate (PC) was done using hot embossing, resulting in good replication fidelity over the large surface area. The 96-well PPC-SPRI reactor, assembled by thermal fusion bonding, showed 100% efficiency for simple and fast purification of gDNA from whole cell lysates of bacterial species. The 96- well PPC-SPRI reactor will open up new avenues for low cost, disposable DNA sample purification in high throughput applications.

A method of collecting and delivering single or precise numbers of cells to assess the feasibility of capturing very rare circulating tumor cells for human breast cancer diagnosis and monitoring was developed. A PMMA device was assembled with minimal assembly variation using passive alignment. Thermoplastic fusion bonding was optimized to yield minimal deformation of the microfluidic channel. UV modification and an anti-epithelial cell adhesion molecule (anti-EpCAM) functionalization process were used to generate capture surfaces and maximized by control experiment. Single or precise numbers of target cells were collected using a cell collecting capillary tube and a hemacytometer and delivered into the microchannel without any loss. Cells from one of the human breast cancer cell lines, the MCF-7 cell line (ATCC, Manassas, VA) which strongly overexpresses EpCAM, were successfully captured on the anti-EpCAM coated microchannel surfaces. Successful capture of early stage breast cancer cells in whole blood may be feasible with further optimization of the microchannel geometry and flow velocity through the microfluidic device.

The objective of this effort was to fabricate a waveguide integrated in a polymer microfluidic chip in order to deliver excitation light to fluorescent probes contained in a fluidic channel. Instead of exciting the volume at a certain point along a fluidic channel, the goal herein was to excite all the probes contained along the length of the fluidic channel. An air-waveguide structure was designed and integrated into a polymer microfluidic chip. Fabrication of the microfluidic chip was carried out by double-sided hot embossing of poly methyl methacrylate (PMMA) in sheet form. The efficacy of the waveguide was evaluated by coupling light from a laser into it and testing the fluorescence intensity from dye contained in the microfluidic channel. The results demonstrate illumination of the entire length of the microfluidic channel with excitation wavelength light from the waveguide. Details of the design, fabrication process and initial experimental results are presented in the course of this paper.

Highly parallelized biochemical analysis is a significant step toward achieving high throughput processing of patient samples for diagnosis and treatment monitoring. The standard microtiter plate is used to carry out multiple reactions for high throughput screening. By incorporating polymer microfluidic devices at each well in the microtiter plate format, the capability of the format could be significantly enhanced for high throughput processing of large numbers of biochemical samples in a cost-effective manner. Low cost replication of the microtiter plates is done using micro molding techniques, so microfabrication technology for making large area mold inserts (LAMIs) containing microfluidic devices at each well of a microtiter plate format is needed. A large area mold insert (LAMI) in the footprint of the standard microtiter plate was fabricated using an SU-8 based UV-LIGA technique. Excellent lithography results, with vertical sidewalls, were obtained by utilizing flycutting to minimize SU-8 film thickness variation and a UV filter for attenuating high absorbance UV wavelengths. Overplating of nickel in the SU-8 polymeric molds was used to make high quality metallic mold inserts with vertical sidewalls. Micro molding of polycarbonate (PC) was done using hot embossing, resulting in good replication fidelity over the large surface area. Thermal fusion bonding of the molded PC chips yielded good sealing results and the developed polymer microfluidic platforms showed good fluidic uniformity.Copyright © 2006 by ASME

For connecting polymeric, modular microfluidic devices, precise, passive alignment structures can prevent infinitesimal motions between the devices and minimize misalignment of the devices. The motion and constraint of passive alignment structures were analyzed for the design of assembly features using screw theory. A combination of three v-groove and sphere joints constrained all degrees of freedom of the two mating plates without over-constraint. To validate the designed passive alignment scheme, hot embossing experiments were conducted using a micromilled brass mold insert, containing alignment features. Prototype alignment structures have dimensional variation. The alignment accuracy of the stacked polymeric plates was estimated by the mismatches between alignment marks of two plates. The mismatches ranged from 28 μm to 70 μm.Copyright © 2006 by ASME

Currently, a disproportionate amount of optical module costs is attributable to the packaging and testing operations.. Consequently, future products will require significant design and manufacturing improvements to overcome these cost barriers. Optical packaging from a macroscopic viewpoint can be reduced to a few principal challenges, namely optical coupling efficiencies, bonding technologies (including hermeticity), thermal management, electrical performance, an manufacturability, which entails the ease of assembly and amenability to automation. These challenges are common whether the optical systems are free space or guided wave optical packages. We address optical efficiencies, thermal management, bonding and manufacturability. The use of silicon optical bench as a platform is used to address manufacturability both in free space optics and guided wave optics. Passive alignment enables submicron accuracies and reduces the over-all assembly steps while reducing assembly complexity. Numerical and closed form simulations are used extensively to model the optical, thermal, and mechanical performance of the package design.

The objective of this work was to develop a thermally-driven bimetallic actuator for application in high temperature environments. The actuator was designed to drive distributed air flow control valves in a gas turbine combustor. The valves control localized cooling air flows in response to rises in temperature, leading to more uniform and complete combustion. The actuator is a passive thermo-mechanical device formed from bimorph elements concatenated in a recurve architecture to obtain the required forces and deflections. An electroplating process for depositing an Invar-like alloy in deep recess was developed and used in the fabrication of prototypes. Fabrication of additional prototypes and testing are continuing.

In this paper, we present a quasi-three-dimensional micro-fluidic device that has been constructed using the LIGA technology at CAMD. The idea is centered in the modular construction of molded plastic devices. A primary master template was patterned into SU-8 and PMMA, from which we made a reversed insertion mold by electroplating Nickel on it. Chips were patterned by hot embossing and the complex structure was obtained by stacking one layer on top of the other. Alignment marks were placed in each different layer to allow the accurate positioning of the structures. Each layer is a 2-dimensional micro-fluidic system and liquids can go from one level to another level, back and forth, producing this almost three-dimensional behavior. This work aims to introduce concepts and features that will be a step towards a complete modularization of micro-fluidic devices.

A high throughput, multi-well (96) polymerase chain reaction (PCR) platform, based on a continuous flow (CF) mode of operation, was developed. Each CFPCR device was confined to a footprint of 8 × 8 mm2, matching the footprint of a well on a standard micro-titer plate. While several CFPCR devices have been demonstrated, this is the first example of a high-throughput multi-well continuous flow thermal reactor configuration. Verification of the feasibility of the multi-well CFPCR device was carried out at each stage of development from manufacturing to demonstrating sample amplification. The multi-well CFPCR devices were fabricated by micro-replication in polymers, polycarbonate to accommodate the peak temperatures during thermal cycling in this case, using double-sided hot embossing. One side of the substrate contained the thermal reactors and the opposite side was patterned with structures to enhance thermal isolation of the closely packed constant temperature zones. A 99 bp target from a λ-DNA template was successfully amplified in a prototype multi-well CFPCR device with a total reaction time as low as ~5 min at a flow velocity of 3 mm s−1 (15.3 s cycle−1) and a relatively low amplification efficiency compared to a bench-top thermal cycler for a 20-cycle device; reducing the flow velocity to 1 mm s−1 (46.2 s cycle−1) gave a seven-fold improvement in amplification efficiency. Amplification efficiencies increased at all flow velocities for 25-cycle devices with the same configuration.

Mixed-scale nano- and microfluidic networks were fabricated in thermoplastics using simple and robust methods that did not require the use of sophisticated equipment to produce the nanostructures. High-precision micromilling (HPMM) and photolithography were used to generate mixed-scale molding tools that were subsequently used for producing fluidic networks into thermoplastics such as poly(methyl methacrylate), PMMA, cyclic olefin copolymer, COC, and polycarbonate, PC. Nanoslit arrays were imprinted into the polymer using a nanoimprinting tool, which was composed of an optical mask with patterns that were 2-7 µm in width and a depth defined by the Cr layer (100 nm), which was deposited onto glass. The device also contained a microchannel network that was hot embossed into the polymer substrate using a metal molding tool prepared via HPMM. The mixed-scale device could also be used as a master to produce a polymer stamp, which was made from polydimethylsiloxane, PDMS, and used to generate the mixed-scale fluidic network in a single step. Thermal fusion bonding of the cover plate to the substrate at a temperature below their respective T(g) was accomplished by oxygen plasma treatment of both the substrate and cover plate, which significantly reduced thermally induced structural deformation during assembly: ∼6% for PMMA and ∼9% for COC nanoslits. The electrokinetic transport properties of double-stranded DNA (dsDNA) through the polymeric nanoslits (PMMA and COC) were carried out. In these polymer devices, the dsDNA demonstrated a field-dependent electrophoretic mobility with intermittent transport dynamics. DNA mobilities were found to be 8.2 ± 0.7 × 10(-4) cm(2) V(-1) s(-1) and 7.6 ± 0.6 × 10(-4) cm(2) V(-1) s(-1) for PMMA and COC, respectively, at a field strength of 25 V cm(-1). The extension factors for λ-DNA were 0.46 in PMMA and 0.53 in COC for the nanoslits (2-6% standard deviation).