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LiGA Research and Service at CAMD
- Source :
- Journal of Physics: Conference Series. 34:912-918
- Publication Year :
- 2006
- Publisher :
- IOP Publishing, 2006.
-
Abstract
- Since 1995 CAMD has been offering exposure services, so called print shop for a variety of users interested in making precision High-Aspect-Ratio Microstructures (HARMST) for various application. Services have been expanded beyond only the print shop service in recent years and now include x-ray mask fabrication, substrate preparation for PMMA and SU- 8 resists, electroplating, finishing and molding. Metallic and polymeric parts are now routinely fabricated for precision engineering, micro-fluidic and micro-optic applications. This paper presents a brief overview of the actual status of LiGA services provided at CAMD including ongoing research efforts and examples of LiGA components for different applications.
Details
- ISSN :
- 17426596 and 17426588
- Volume :
- 34
- Database :
- OpenAIRE
- Journal :
- Journal of Physics: Conference Series
- Accession number :
- edsair.doi...........19fd38e8f0625a89e98314596d7581e0
- Full Text :
- https://doi.org/10.1088/1742-6596/34/1/151