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LiGA Research and Service at CAMD

Authors :
Zhong Geng Ling
Yohannes M. Desta
Yoonyoung Jin
Varshni Singh
Jost Goettert
Proyag Datta
Source :
Journal of Physics: Conference Series. 34:912-918
Publication Year :
2006
Publisher :
IOP Publishing, 2006.

Abstract

Since 1995 CAMD has been offering exposure services, so called print shop for a variety of users interested in making precision High-Aspect-Ratio Microstructures (HARMST) for various application. Services have been expanded beyond only the print shop service in recent years and now include x-ray mask fabrication, substrate preparation for PMMA and SU- 8 resists, electroplating, finishing and molding. Metallic and polymeric parts are now routinely fabricated for precision engineering, micro-fluidic and micro-optic applications. This paper presents a brief overview of the actual status of LiGA services provided at CAMD including ongoing research efforts and examples of LiGA components for different applications.

Details

ISSN :
17426596 and 17426588
Volume :
34
Database :
OpenAIRE
Journal :
Journal of Physics: Conference Series
Accession number :
edsair.doi...........19fd38e8f0625a89e98314596d7581e0
Full Text :
https://doi.org/10.1088/1742-6596/34/1/151