1. Surface- and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators
- Author
-
Piyawattanametha, W, Patterson, P R, Hah, D, Toshiyoshi, H, and Wu, Ming C
- Subjects
angular vertical comb (AVC) actuators ,confocal microscopy two-dimensional (2-D) scanner ,electrostatic force actuators ,laser beam steering ,micromirror ,optical coherence tomography (OCT) ,scanner - Abstract
In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-micromachining process (Multi-User MEMS Processes-MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabrication process. The surface-micromachining provides versatile mechanical design and electrical interconnect while the bulk micromachining offers high-aspect ratio structures leading to flat mirrors and high-force, large-displacement actuators. The scanner achieves dc mechanical scanning ranges of +/- 6.2 degrees (at 55 Vdc) and +/- 4.1 degrees (at 50 Vdc) for the inner and outer gimbals, respectively. The resonant frequencies are 315 and 144 Hz for the inner and the outer axes, respectively. The 1-mm-diameter mirror has a radius of curvature of over 50 cm.
- Published
- 2005