A 2D scanner by surface and bulk micromachined vertical comb actuators.

Authors :: Piyawattanametha, W.
Patterson, P.R.
Dooyoung Hah
Toshiyoshi, H.
Wu, M.C.
Source :: 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682); 2003, p93-94, 2p
Publication Year :: 2003

Language :: English
ISBNs :: 9780780378308
Database :: Complementary Index
Journal :: 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682)
Publication Type :: Conference
Accession number :: 81339366
Full Text :: https://doi.org/10.1109/OMEMS.2003.1233483