1. Plasma Processing of Semiconductors
- Author
-
P.F. Williams and P.F. Williams
- Subjects
- Electronics, Electrical engineering, Manufactures, Optical materials, Atoms, Molecules
- Abstract
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
- Published
- 2013