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Plasma Processing of Semiconductors
- Publication Year :
- 2013
-
Abstract
- Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
- Subjects :
- Electronics
Electrical engineering
Manufactures
Optical materials
Atoms
Molecules
Subjects
Details
- Language :
- English
- ISBNs :
- 9780792345671, 9789401064866, and 9789401158848
- Volume :
- 00336
- Database :
- eBook Index
- Journal :
- Plasma Processing of Semiconductors
- Publication Type :
- eBook
- Accession number :
- 2845480