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Leveraging the advanced manufacturing capabilities of the semiconductor industry promises to help scale up silicon-based quantum processors by increasing yield, uniformity and integration. Recent studies of quantum dots fabricated on 300 mm wafer metal-oxide-semiconductor (MOS) processes have shown control and readout of individual spin qubits, yet quantum processors require two-qubit interactions to operate. Here, we use a 300 mm wafer MOS process customized for spin qubits and demonstrate coherent control of two electron spins using the spin-spin exchange interaction, forming the basis of an entangling gate such as $\sqrt{\text{SWAP}}$. We observe gate dephasing times of up to $T_2^{*}\approx500$ ns and a gate quality factor of 10. We further extend the coherence by up to an order of magnitude using an echo sequence. For readout, we introduce a dispersive readout technique, the radiofrequency electron cascade, that amplifies the signal while retaining the spin-projective nature of dispersive measurements. Our results demonstrate an industrial grade platform for two-qubit operations, alongside integration with dispersive sensing techniques.

Fast measurements of quantum devices is important in areas such as quantum sensing, quantum computing and nanodevice quality analysis. Here, we develop a superconductor-semiconductor multi-module microwave assembly to demonstrate charge state readout at the state-of-the-art. The assembly consist of a superconducting readout resonator interfaced to a silicon-on-insulator (SOI) chiplet containing quantum dots (QDs) in a high-$\kappa$ nanowire transistor. The superconducting chiplet contains resonant and coupling elements as well as $LC$ filters that, when interfaced with the silicon chip, result in a resonant frequency $f=2.12$ GHz, a loaded quality factor $Q=850$, and a resonator impedance $Z=470$ $\Omega$. Combined with the large gate lever arms of SOI technology, we achieve a minimum integration time for single and double QD transitions of 2.77 ns and 13.5 ns, respectively. We utilize the assembly to measure charge noise over 9 decades of frequency up to 500 kHz and find a 1/$f$ dependence across the whole frequency spectrum as well as a charge noise level of 4 $\mu$eV/$\sqrt{\text{Hz}}$ at 1 Hz. The modular microwave circuitry presented here can be directly utilized in conjunction with other quantum device to improve the readout performance as well as enable large bandwidth noise spectroscopy, all without the complexity of superconductor-semiconductor monolithic fabrication., Comment: Main: 8 pages, 4 figures. Supplementary: 4 pages, 7 figures

Spin qubits in quantum dots are a compelling platform for fault-tolerant quantum computing due to the potential to fabricate dense two-dimensional arrays with nearest neighbour couplings, a requirement to implement the surface code. However, due to the proximity of the surface gate electrodes, cross-coupling capacitances can be substantial, making it difficult to control each quantum dot independently. Increasing the number of quantum dots increases the complexity of the calibration process, which becomes impractical to do heuristically. Inspired by recent demonstrations of industrial-grade silicon quantum dot bilinear arrays, we develop a theoretical framework to mitigate the effect of cross-capacitances in 2x2 arrays of quantum dots, that can be directly extended to 2xN arrays. The method is based on extracting the gradients in gate voltage space of different charge transitions in multiple two-dimensional charge stability diagrams to determine the system's virtual voltages. To automate the process, we train an ensemble of regression models to extract the gradients from a Hough transformation of a stability diagram and validate the algorithm on simulated and experimental data of a 2x2 quantum dot array. Our method provides a completely automated tool to mitigate the effect of cross capacitances, which could be used to study cross capacitance variability across QDs in large bilinear arrays, Comment: 11 pages, 11 figures

We report fast charge state readout of a double quantum dot in a CMOS split-gate silicon nanowire transistor via the large dispersive interaction with microwave photons in a lumped-element resonator formed by hybrid integration with a superconducting inductor. We achieve a coupling rate $g_0/(2\pi) = 204 \pm 2$ MHz by exploiting the large interdot gate lever arm of an asymmetric split-gate device, $\alpha=0.72$, and by inductively coupling to the resonator to increase its impedance, $Z_\text{r}=560~\Omega$. In the dispersive regime, the large coupling strength at the double quantum dot hybridisation point produces a frequency shift comparable to the resonator linewidth, the optimal setting for maximum state visibility. We exploit this regime to demonstrate rapid dispersive readout of the charge degree of freedom, with a SNR of 3.3 in 50 ns. In the resonant regime, the fast charge decoherence rate precludes reaching the strong coupling regime, but we show a clear route to spin-photon circuit quantum electrodynamics using hybrid CMOS systems., Comment: Accepted manuscript