Author: "Matthias F. Koch" - Searchworks@Jio Institute Digital Library Search Results

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1. Novel polymer design for ultra-low stress material for advanced packaging applications

Author: Frank Meyer, Matthias F. Koch, Kenichi Nishikawa, Gregor Larbig, and Katsuo Taniguchi
Published: 2023
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2. Advancing high resolution photolithography with hybrid polymers for wafer-scale manufacture of micro-optics and patterned passivation layers

Author: Matthias F. Koch, Maria Russew, Ludwig Scharfenberg, Andreas Benker, Arne Schleunitz, and Gabi Grützner
Published: 2023
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