1. Metal/insulator/semiconductor contacts for ultimately scaled CMOS nodes: projected benefits and remaining challenges
- Author
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Maud Vinet, H. Grampeix, Emmanuel Dubois, Magali Gregoire, Emmanuel Nolot, Yves Morand, Magali Tessaire, J. Borrel, Guillaume Rodriguez, Fabrice Nemouchi, Louis Hutin, Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), STMicroelectronics [Grenoble] (ST-GRENOBLE), Jiang, YL, Qu, XP, Ru, GP, Li, BZ, and Laboratoire commun STMicroelectronics-IEMN T4
- Subjects
010302 applied physics ,Materials science ,business.industry ,Insulator (electricity) ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Engineering physics ,[SPI]Engineering Sciences [physics] ,Semiconductor ,CMOS ,0103 physical sciences ,Electronic engineering ,Hardware_INTEGRATEDCIRCUITS ,Metal insulator ,0210 nano-technology ,business - Abstract
International audience; In this paper, some key fundamental aspects of Metal / Insulator / Semiconductor contacts as well as practical issues occurring with their implementation are reviewed in order to fully comprehend the opportunities and limitations of this approach.
- Published
- 2016