1. Study of the Stability of a Number of Molecular Impurities in Monosilane
- Author
-
A. Yu. Sozin, A. P. Kotkov, A. D. Bulanov, N. D. Grishnova, A. I. Skosyrev, O. Yu. Chernova, M. N. Matveeva, T. G. Sorochkina, O. Yu. Troshin, and V. A. Krylov
- Subjects
chemistry.chemical_classification ,Ethylene ,General Chemical Engineering ,Inorganic chemistry ,chemistry.chemical_element ,02 engineering and technology ,General Chemistry ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,Silane ,0104 chemical sciences ,chemistry.chemical_compound ,chemistry ,Acetylene ,Impurity ,Fluorine ,Tetrafluoroethylene ,Disilane ,0210 nano-technology ,Alkyl - Abstract
Chromatography-mass-spectrometry was used to examine the stability of admixtures of C1−C7 hydrocarbons, fluorine and chlorinated derivatives of hydrocarbons, alkyl derivatives of silane, homologs of monosilane, and siloxanes in monosilane in its storage in molybdenum-glass ampules and stainless-steel cylinders. It was found that, in the case of storage in glass ampules, the concentration of ethylene and tetrafluoroethylene admixtures decreases and that of ethyl silane and disilane increases. When monosilane is stored in a stainless steel cylinder, the concentration of the acetylene admixture it contains changes.
- Published
- 2019