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Study of the Stability of a Number of Molecular Impurities in Monosilane
- Source :
- Russian Journal of Applied Chemistry. 92:476-481
- Publication Year :
- 2019
- Publisher :
- Pleiades Publishing Ltd, 2019.
-
Abstract
- Chromatography-mass-spectrometry was used to examine the stability of admixtures of C1−C7 hydrocarbons, fluorine and chlorinated derivatives of hydrocarbons, alkyl derivatives of silane, homologs of monosilane, and siloxanes in monosilane in its storage in molybdenum-glass ampules and stainless-steel cylinders. It was found that, in the case of storage in glass ampules, the concentration of ethylene and tetrafluoroethylene admixtures decreases and that of ethyl silane and disilane increases. When monosilane is stored in a stainless steel cylinder, the concentration of the acetylene admixture it contains changes.
- Subjects :
- chemistry.chemical_classification
Ethylene
General Chemical Engineering
Inorganic chemistry
chemistry.chemical_element
02 engineering and technology
General Chemistry
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
Silane
0104 chemical sciences
chemistry.chemical_compound
chemistry
Acetylene
Impurity
Fluorine
Tetrafluoroethylene
Disilane
0210 nano-technology
Alkyl
Subjects
Details
- ISSN :
- 16083296 and 10704272
- Volume :
- 92
- Database :
- OpenAIRE
- Journal :
- Russian Journal of Applied Chemistry
- Accession number :
- edsair.doi...........9e6a588b1c1f99262c69f7d25a439b8b