1. A Unidirectional Transducer Design for Scaling GHz AlN-Based RF Microsystems.
- Author
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Lu, Ruochen, Link, Steffen, and Gong, Songbin
- Subjects
- *
ALUMINUM nitride , *TRANSDUCERS , *SIGNAL processing , *INSERTION loss (Telecommunication) , *DELAY lines , *RADIO frequency - Abstract
In this work, we present a novel unidirectional transducer design for frequency scaling aluminum nitride (AlN)-based radio frequency (RF) microsystems. The proposed thickness-field-excited single-phase unidirectional transducers (TFE-SPUDT) adopt 5/16 wavelength electrodes and, thus, enable efficient piezoelectric transduction with better frequency scalability. The design space of the TFE-SPUDT is theoretically explored and validated using the acoustic delay line (ADL) testbeds. The ADL testbeds with a large feature size of ${3}~\mu \text{m}$ show a center frequency of 1 GHz, a minimum insertion loss (IL) of 4.9 dB, and a fractional bandwidth (FBW) of 5.3%, significantly surpassing the IL and frequency scalability of the previously reported AlN transducers. The design approach can potentially contribute to various AlN-based RF microsystems for signal processing, physical sensing, optomechanical interaction, and quantum acoustic applications, and are readily extendable to other piezoelectric platforms. [ABSTRACT FROM AUTHOR]
- Published
- 2020
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