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A Unidirectional Transducer Design for Scaling GHz AlN-Based RF Microsystems.
- Source :
-
IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control . Jun2020, Vol. 67 Issue 6, p1250-1257. 8p. - Publication Year :
- 2020
-
Abstract
- In this work, we present a novel unidirectional transducer design for frequency scaling aluminum nitride (AlN)-based radio frequency (RF) microsystems. The proposed thickness-field-excited single-phase unidirectional transducers (TFE-SPUDT) adopt 5/16 wavelength electrodes and, thus, enable efficient piezoelectric transduction with better frequency scalability. The design space of the TFE-SPUDT is theoretically explored and validated using the acoustic delay line (ADL) testbeds. The ADL testbeds with a large feature size of ${3}~\mu \text{m}$ show a center frequency of 1 GHz, a minimum insertion loss (IL) of 4.9 dB, and a fractional bandwidth (FBW) of 5.3%, significantly surpassing the IL and frequency scalability of the previously reported AlN transducers. The design approach can potentially contribute to various AlN-based RF microsystems for signal processing, physical sensing, optomechanical interaction, and quantum acoustic applications, and are readily extendable to other piezoelectric platforms. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 08853010
- Volume :
- 67
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control
- Publication Type :
- Academic Journal
- Accession number :
- 143495528
- Full Text :
- https://doi.org/10.1109/TUFFC.2020.2968245