1. Fabrication of volcano structured Spindt-type field emitter arrays using Minimal Fab system
- Author
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Sommawan Khumpuang, Shiro Hara, Hidenori Mimura, Katsuhira Murakami, Yoichiro Neo, Yasuhito Gotoh, and Masayoshi Nagao
- Subjects
0209 industrial biotechnology ,Fabrication ,Materials science ,business.industry ,Semiconductor device fabrication ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Computer Science::Other ,020901 industrial engineering & automation ,Logic gate ,Chemical-mechanical planarization ,Hardware_INTEGRATEDCIRCUITS ,Optoelectronics ,Image sensor ,0210 nano-technology ,business ,Lithography ,Maskless lithography ,Common emitter - Abstract
The Minimal Fab system is suitable for low-volume multi-product manufacturing because of its very low initial investment cost. We fabricated volcano-structured Spindt-type field emitter arrays that can be driven in matrix mode for image sensor application by using hybrid process of Minimal Fab system and conventional semiconductor fabrication system. We fabricated 0.6-$\mu \text{m}$-size gated field emitter by using Minimal Maskless lithography system. The planarization using Minimal CMP is performed to prevent break down between matrix type electrode.
- Published
- 2018