Fabrication of volcano structured Spindt-type field emitter arrays using Minimal Fab system

The Minimal Fab system is suitable for low-volume multi-product manufacturing because of its very low initial investment cost. We fabricated volcano-structured Spindt-type field emitter arrays that can be driven in matrix mode for image sensor application by using hybrid process of Minimal Fab system and conventional semiconductor fabrication system. We fabricated 0.6-$\mu \text{m}$-size gated field emitter by using Minimal Maskless lithography system. The planarization using Minimal CMP is performed to prevent break down between matrix type electrode.