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Silicon ring resonators on SOI substrates are well known and widely studied devices for silicon photonics-based systems. They are commonly used in datacom and highperformance computing for wavelength multiplexing, modulation and spectral filters. They can be tuned to the desired frequency with resistive heaters, which is the primary power budget of the device. In this work, backside cavities have been successfully etched in the bulk of the SOI substrate below ring resonators to improve heat trapping within the silicon rings. Simulations show that those backside cavities improve significantly heat confinement and minimizes locally heat losses due to conduction in the Si substrate. All the processes used in this study are compatible with the standard silicon photonics interposer process flow. A 72% power consumption reduction for a $10\ \mu\mathrm{m}$ diameter ring resonator on SOI has been achieved with a backside opening of $100\ \mu\mathrm{m}$ deep and $40\ \mu\mathrm{m}$ diameter, in good agreement with simulation results. Most importantly, the cavities opening did not impact the optical performances of the ring. Dynamic behavior of the rings was also studied, and show that the presence of cavities increases the thermal switching time of the rings.

Rare-earth ion doped potassium yttrium double tungstate, RE: KY(WO4)(2), is a promising candidate for small, power-efficient, on-chip lasers and amplifiers. There are two major bottlenecks that complicate the realization of such devices. Firstly, the anisotropic thermal expansion coefficient of KY(WO4)(2) makes it challenging to integrate the crystal on glass substrates. Secondly, the crystal layer has to be, for example, < 1 mu m to obtain single mode, high refractive index contrast waveguides operating at 1550 nm. In this work, different adhesives and bonding techniques in combination with several types of glass substrates are investigated. An optimal bonding process will enable further processing towards the manufacturing of integrated active optical KY(WO4)(2) devices. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Ion-exchange on glass is one of the major technological platforms that are available to manufacture low-cost, high performance Planar Lightwave Circuits (PLC). In this paper, the principle of ion-exchanged waveguide realization is presented. Then a review of the main achievements observed over the last 30 years will be given. The focus is first made on devices for telecommunications (passive and active ones) before the application of ion-exchanged waveguides to sensors is addressed.

In the framework of High Performance Computing and Datacom, silicon photonics interposers propose an interesting approach, while providing new challenges. This paper demonstrates such an integration and focuses on TSV Mid integration impact on sensitive photonic structures such as ring modulators, focusing on two specific technological aspects: substrate thinning and TSV integration. It is shown that thinning down to 100 microns and integrating TSV do not impact photonic performances more than wafer level process variability. Finally, thanks to these results, 3D Si photonics design opportunities will be discussed.

The combination of edge coupling and a polarization rotator/splitter (PRS) device is an attractive way to achieve receiverside fiber coupling in a 400 Gbits/s connector via Coarse Wavelength Division Multiplexing (400G CWDM 8 MSA)1. This requires low-loss and polarization insensitivity over the O and E bands. We present a Si/SiN/polymer integrated photonic concept of such a system. Our simulated coupling system shows a loss between the input fiber and the fundamental TE mode in the silicon waveguide ranging from -0.8 dB to -1.4 dB for an arbitrary polarization state over the entire O and E bands.

The cointegration of optical and microfluidic functions on chemically resilient borosilicate glass to provide microfluidic chemical analyses is described. An evanescent wave sensing chip containing a fluid channel of 21 μL is implemented to carry out absorption spectroscopy measurements in the near-infrared range. Microchip packaging allows to perform remote analysis of harsh chemical solutions in confined environments. Detection of plutonium(VI) in aqueous 1 mol/L nitric acid solutions is achieved on solutions ranging from 0.05 to 0.13 mol/L. Results showcase the validity of the proposed approach by obtaining a sensor calibration curve and chip resilience to highly concentrated strong acids and radioactive elements. This proof-of-concept opens the path to optimized devices with a lower limit of detection.

Recently, dual mode lasers proved to be interesting sources for radio frequency generation at millimeter wave frequency and beyond, to be used in photonic RoF systems. As the optical modes can eventually be correlated, such sources associate the simplicity of heterodyning technique with the frequency stability. Still, most architectures require active frequency control loop to reach communication requirements to limit frequency drift, and reduce the phase noise of the generated carrier. In this communication, we propose the use of a free running dual mode laser integrated on glass for radio frequency generation. The device is fabricated on an ion-exchanged co-doped Erbium Ytterbium substrate to emit in the C-band. We demonstrate that this device is able to generate an ultra-narrow spectrum radio-frequency carrier, reaching 600Hz spectral linewidth without control loop nor thermal stabilization. As a proof of concept, the device proposed in this work produces a radio frequency at 6.1 GHz which has been evaluated as an electrical carrier in radio transmission experiments. Data rates of several Gbps using complex modulation formats such from BPSK to 64QAM have been successfully tested. The results are compliant with communications standards requirements, validating the use of such a source in Radio over Fibre (RoF) systems. This paper first presents the glass dual-mode laser design, followed by the characterization of the generated carrier to finally present the radio over fiber results.

Performance degradations of Silicon Photonics (SP) high speed photodetector represent a major issue for the reliability of these devices. An explanation of these degradations is presented based on both electrical characterization and device modelling. The observed degradations of both dark current and responsivity can indeed be modeled by a single carrier lifetime degradation, attributed to an increase of the surface recombination rate, impacting an unexpected large contribution of diffusion in the photocurrent. The results obtained with this model are experimentally confirmed by extracting the activation energy of the dark current, before and after stress. The improved physical understanding of the degradation is expected to lead to shorter test protocols for SP devices.

International audience; Optical waveguides, where propagating modes inter- act with a magnetized magneto-optical layer, show non-reciprocal properties such as mode conversion, phase shift and absorption. These properties are essential in order to make an efficient integrated isolator. In this paper, we explain how a well-calibrated polarimetric setup can be used to measure all the magneto-optical characteristics of a waveguide, in order to advance towards well- controlled integrated optical isolators.

Understanding the origin and protocols to induce performance degradations of silicon photonics high speed photodetector represent a major issue for the qualification of the reliability of these devices. Using advanced characterization technics, it is shown that the dark current, the photonic current and the cut-off frequency of the photodiode can be degraded during voltage stress of 106 s, which could ultimately induce some significant device performance drift and failure. An explanation of these degradations is presented based on both electrical characterization and device modelling. The observed degradations of both dark current and responsivity can indeed be modeled by a single carrier lifetime degradation, attributed to an increase of the surface recombination rate, impacting an unexpected large contribution of carrier diffusion in the photocurrent. The results obtained with this model are experimentally confirmed by extracting the activation energy of the dark current, before and after stress. The improved physical understanding of the degradation is expected to lead to shorter test protocols for silicon photonics devices.

International audience; In this paper, we study the capacity of glass integrated optics DFB lasers to generate millimeter wave and terahertz frequencies. We present the different technological parameters that can be adjusted to generate frequencies up to 8.8THz by photomixing two free running DFB lasers on glass. The impact of each parameter is explicitly demonstrated using simulations and experimental measurements.

In this paper, the reliability of germanium photodiodes of the PIC25G technology for silicon photonic applications is experimentally studied. Using advanced characterization technics, it is shown that the dark current, the photonic current and the cut-off frequency of the photodiode can be degraded during voltage stress of 106 s, which could ultimately induce some device performance drift. The causes of these degradations are presently attributed to interface defects between germanium and SiO 2 , until more detailed investigation are pursued.

In this paper, we report the generation of millimeter-wave carriers using two free-running DFB lasers on Erbium doped glass emitting at 1.5μm. Carriers with ultra-narrow linewidth are generated. For the generated signals, the thermal tunability is studied and the optical and electrical powers variations of the signals are measured to be ±0.3dB and ±5dB for lasers temperatures between 10°C and 70°C.

International audience

In this Letter, the impact of thermal coupling between two glass laser cavities on a heterodyned signal for millimeter-wave frequency generation is presented. In addition to a narrow heterodyne linewidth estimated to be lower than 1 kHz, the frequency drift is reduced to ±16.5 ppm/7 s. The signal quality is also evaluated by performing data transmission, respecting communication standards at 60 GHz using complex modulation formats.

International audience; In this paper, we present an optofluidic device made by combining a chemical etching procedure with ion-exchange to build microchannels in a glass substrate along with optical waveguides. The device is used to measure the concentration of plutonium (VI) in a solution of nitric acid by the infrared absorption spectroscopy technique. Light confined in waveguides interacts with the fluid by means of the evanescent part of the fundamental mode, over a length of 2 cm. Care is devoted to the device assembly (in particular by means of low-temperature molecular bonding) and pigtailing with optical fibers, so that the device can be put in a commercial microfluidic chip holster. The packaged device has proven to be sturdy enough so that it can be used inside of a nuclearized glove box. First measurements have been done by means of plutonium (VI) in a nitric acid solution.

In this paper, an integrated passively Q-switched DBR laser made in glass integrated optics technology is designed, fabricated and investigated. The laser, operating at 1030 nm wavelength, is formed by an ion-exchanged single mode waveguide realized in an Ytterbium doped phosphate glass. The feedback is provided by a DBR structure made of a Fiber Bragg Grating and a dielectric mirror. The Q-switched behavior is obtained by hybridizing the saturable absorber on the waveguides, so that it interacts with the evanescent part of the guided field. The saturable absorber we use is a bis(4-dimethylaminodithiobenzil)nickel (BDN) dye incorporated in a polymeric film. Using this structure, we were able to demonstrate a Q-switched operation for several BDN concentrations, allowing to vary the pulse duration and the repetition rate of the device. Moreover, we report a very narrow 372 MHz wide emission spectrum while in Q-switched regime.

International audience; In order to enhance electro-optical system-in-package capabilities for silicon photonics, a cost effective fabrication process for optical waveguides integration on thin glass substrate interposer is demonstrated. Firstly, a femtosecond laser ablation coupled with a hydrofluoric acid etching is developed to create micro grooves at the glass surface. Secondly, a dry film lamination followed by chemical mechanical planarization is achieved to define surface optical waveguides by filling the micro channels. Physical characterizations of the fabricated waveguides are performed using optical and scanning electron microscopy. Finally, optical mode profile and loss characterizations confirm the optical functionality of waveguides which prove to be multimodal at 1550 nm.

International audience

National audience; Dans cette contribution, nous présentons un dispositif optofluidique réalisé en combinant un procédé de gravure humide pour la fabrication de micro-canaux sur verre avec des guides d’onde obtenus par échange d’ions. Le principe de mesure choisi est l’absorptiométrie infra-rouge en exploitant le couplage par onde évanescente entre un mode guidé et le fluide. Une attention particulière a été dédiée à la mise en boîtier avec un capot assemblé par collage moléculaire, afin de rendre compatible le dispositif fabriqué avec un support microfluidique commercial. De même, les fibres d’injection et de récupération de la lumière ont été collées à la puce et fixées à un support mécanique. La robustesse du capteur et sa flexibilité ont permis de réaliser les premiers tests en introduisant la puce en boîte à gants nucléarisée, avec des solutions d’acide nitrique radioactives contenant du plutonium (VI).

International audience; In this paper we demonstrate the monolithic integration of a fully CMOS compatible hybrid DBR laser on the backside of a SOI wafer. This innovative approach allowed implementing CMOS compatible electric interconnects and optical sources on a same chip. The optical characterizations confirm the single wavelength behavior of the realized devices which present a SMSR higher than 35 dB and can be tuned over 4 nm, opening the route to a fully integrated optical transceiver on a Si platform.

National audience; Le battement optique entre deux lasers DFB réalisés sur un même substrat de verre par échange d'ions permet de générer des fréquences porteuses jusqu'à 300 GHz extrêmement stables.

International audience; Research in nuclear safety and fuel reprocessing has led to a surging need for novel chemical analysis tools with reduced analyte and effluent volumes. Recent technological advances for the elaboration and packaging of glass optofluidic co - integrated sensors have opened up the way for said analysis in harsh environments. We discuss a sensor engineering approach for the construction of an integrated absorption spectrometer with an ion-exchange core. Pu(VI) oxidation state exhibits a major absorption peak at a wavelength of 831 nm with a molar absorption coefficient of 545 L.mol-1.cm-1. An evanescent waveguiding sensing structure that allows guided fluid/light interaction is investigated in order to provide absorption spectroscopy measurements. The work presented consists of optical simulations as well as experimental measurements. Waveguide engineering with respects to modal transmission, field/fluid interaction coefficient Γ and device losses is presented. The simulations are carried out by computing ion-exchanged waveguide refractive index distribution and using it in mode solver software. Device optical characterization and bench tests are carried out to verify approach viability. First device measurements of a neodymium absorption peak in nuclear manipulation conditions are displayed.

International audience

International audience; Micromachining techniques enable the fabrication of innovative lab-on-a-chip. Following the trend in chemical and biological analysis, the use of microsystems also appears compelling in the nuclear industry. The volume reduction of radioactive solutions is especially attractive in order to reduce the workers radiation exposition in the context of off-line analysis in spent nuclear fuel reprocessing plants. We hence present the development of an opto-fluidic sensor combining microfluidic channels for fluid transportation and integrated optics for detection. With the aim of achieving automated microanalysis with reduced response time the sensor is made compatible with a commercial microfluidic holder. Therefore the chip is connected to computer controlled pumps and electrovalves thanks to capillary tubing. In this paper we emphasis on the fluid handling capacities of the opto-fluidic sensor.

In this paper, the simulation, design and fabrication of a back-side coupling (BSC) concept for silicon photonics, which targets heterogeneous hybrid III-V/Si laser integration is presented. Though various demonstrations of a complete SOI integration of passive and active photonic devices have been made, they all feature multi-level planar metal interconnects, and a lack of integrated light sources. This is mainly due to the conflict between the need of planar surfaces for III-V/Si bonding and multiple levels of metallization. The proposed BSC solution to this topographical problem consists in fabricating lasers on the back-side of the Si waveguides using a new process sequence. The devices are based on a hybrid structure composed of an InGaAsP MQW active area and a Si-based DBR cavity. The emitted light wavelength is accordable within a range of 20 nm around 1.31μm thanks to thermal heaters and the laser output is fiber coupled through a Grating Coupler (GC). From a manufacturing point of view, the BSC approach provides not only the advantages of allowing the use of a thin-BOX SOI instead of a thick one; but it also shifts the laser processing steps and their materials unfriendly to CMOS process to the far back-end areas of fabrication lines. Moreover, aside from solving technological integration issues, the BSC concept offers several new design opportunities for active and passive devices (heat sink, Bragg gratings, grating couplers enhanced with integrated metallic mirrors, tapers…). These building boxes are explored here theoretically and experimentally.

The fabrication of on-chip optical isolators to protect integrated optical sources is one of the major challenges of research in integrated optics. Their operation principle is based on the control of the guided-wave polarization and the most common structures are composed of a polarization splitter, a non-reciprocal rotator based on the Faraday effect, and a reciprocal rotator. The reciprocal rotator is a device that rotates the wave polarization by 45°. This can be achieved by creating a relative phase shift between the waveguide’s two polarization eigen states or by twisting its optics axis thanks to an appropriate shaping of its core. In this work, we propose the design and simulation of a waveguide with optics axes tilted by 45° fabricated by two cascaded field-assisted ion exchanges on a glass substrate and an encapsulation. The dependences of the proposed design on process time, temperature, applied voltage and photolithography over-etching are investigated. The final device exhibits a 45.1° rotation of its optical axes and less than 5% variation on the C+L telecommunication band.

This paper deals with an experimental non-destructive technique for the measurement of polarization behavior of integrated optical waveguides. It is based on a high resolution polarimeter associated to an ellipsometric-type calibration which allows determining the full state of polarization of the output light. A magneto-optic perturbation is also added to generate TE/TM mode beating, whose spatial period is directly linked to the modal TE/TM birefringence. This equipment is first qualified by the measurement of modal birefringence in totally or partially buried ion exchanged waveguides. The results show that the value of the birefringence varies as a function of the diffusion aperture width or with the burying depth. By adding a magneto-optical cover layer, consisting in magnetic nanoparticles doped silica matrix obtained by a sol gel process 1, we evidence a huge increase of the beating magnitude and a decrease of the modal birefringence.

International audience; Advances in nuclear fuel reprocessing have led to a surging need for novel chemical analysis tools. In this paper, we present a packaged lab-on-chip approach with co-integration of optical and micro-fluidic functions on a glass substrate as a solution. A chip was built and packaged to obtain light/fluid interaction in order for the entire device to make spectral measurements using the photo spectroscopy absorption principle. The interaction between the analyte solution and light takes place at the boundary between a waveguide and a fluid micro-channel thanks to the evanescent part of the waveguide’s guided mode that propagates into the fluid. The waveguide was obtained via ion exchange on a glass wafer. The input and the output of the waveguides were pigtailed with standard single mode optical fibers. The micro-scale fluid channel was elaborated with a lithography procedure and hydrofluoric acid wet etching resulting in a 150±8 μm deep channel. The channel was designed with fluidic accesses, in order for the chip to be compatible with commercial fluidic interfaces/chip mounts. This allows for analyte fluid in external capillaries to be pumped into the device through micro-pipes, hence resulting in a fully packaged chip. In order to produce this co-integrated structure, two substrates were bonded. A study of direct glass wafer-to-wafer molecular bonding was carried-out to improve detector sturdiness and durability and put forward a bonding protocol with a bonding surface energy of γ>2.0 J.m-2. Detector viability was shown by obtaining optical mode measurements and detecting traces of 1.2 M neodymium (Nd) solute in 12±1 μL of 0.01 M and pH 2 nitric acid (HNO3) solvent by obtaining an absorption peak specific to neodymium at 795 nm.

Despite the apparent benefits of bifacial modules, their application still suffers from a lack of visibility on the performance gain that they can actually provide. In this work, we consider the specific application of vertically oriented bifacial modules, notably for facade integration. We have developed a methodology to evaluate the annual electrical performance of bifacial modules based on three tools. First, a double illumination characterization setup is used in a solar simulator for comparing module architectures. Then, a reduced scale outdoor test bench allows us to evaluate bifacial module performance in a variety of configurations. Finally, a ray-tracing model validated with short-term outdoor data leads to the determination of the annual performance gain. This methodology allowed us to find optimal performance according to the most important parameters of application and module. Specifically, a module architecture using half-cut cells, a parallel cell interconnection, and textured glasses have been analyzed with respect to their influence on the resistive losses which increase in dual side illumination as well as to their influence on the effect of non- uniform and diffuse irradiance on the backside of the module. This work enabled us to give directions for innovative full-size module architectures.

International audience; Silicon photonics technology emerged as a promising solution to address the technical challenges related to 100 Gb/s and 400 Gb/s optical link. Enabling the development of silicon photonics products requires the development of optical passive libraries integrated within conventional CAD tools used in the CMOS design flow. The optimization and modeling of silicon photonics optical passive is therefore a key point that can be addressed by leveraging methodologies that have been previously set up for optimizing RF passive in CMOS and BiCMOS technologies. In this paper, the relevance of such an approach is evaluated: the combination of FDTD electromagnetic simulations and a Design Of Experiments (DOE) prototyping have been used for optimizing scalable Grating Couplers (GCs) targeting Wavelength-Division Multiplexing applications (WDM). The obtained models for the GC have been successfully qualified experimentally.

FR2998677B1, RU2654924C2, WO2014082988A1, CN104853844B, JP6216800B2, EP2925443B1; An optical waveguide including a first substrate incorporating a first optical guiding structure exposed at a surface of the first substrate, a second substrate incorporating a second optical guiding structure exposed at a surface of the second substrate, the two substrates being assembled superimposed by their surfaces such that the two optical guiding structures are facing each other and extend in a same direction. A channel is fitted between the first and the second guiding structure, directed along the direction, the channel having a cross-section with a large dimension substantially parallel to the surface of the first substrate and to the surface of the second substrate, enabling light to interact on a given distance with the fluid. Such a waveguide can, for example, find application to fluid analysis.

We study the miniaturization of Thermal Lens Spectrometry (TLS) towards Lab-on-chip integration in order to reduce the volume of fluid assays in nuclear process control. TLS is of great interest in this context since it combines the advantages of optical detection methods with an inherent suitability for small-scale samples. After validating the experimental principle in a classical thermal lens crossed-beam setup, we show the integration of a Young-interferometer with a microcapillary on a glass substrate, reducing the necessary sample size to 400 nl. The interferometer translates the photothermally induced refractive index change in the fluid to a phase shift of the fringe pattern, which can then be detected by a camera. Measurements of Co(II) in ethanol yield a detection limit of $c = 5 \times 10^{-4}$ M for the crossed-beam setup and $c = 6 \times 10^{-3}$ M for the integrated sensor. At an interaction length of 10 $\mu$ m, it detects a minimum absorbance of $K = 1.2 \times 10^{-4}$ in a probed volume of 14 pl.

In order to realize an integrated optical isolator, a new hybrid optical structure has been proposed. This structure is composed of an active magneto-optic garnet layer with a strong refractive index, transferred on a passive ion-exchanged glass waveguide. Given the thermal restraints relating to the stability of the glass waveguides, the process used to achieve this hybrid structure is composed of two main steps: firstly, good quality garnet films were grown by liquid phase epitaxy, then these active films were bonded successfully on glass wafer. According to modelling, the thickness of the garnet layer does not exceed 300 nm for maintaining a good confinement. Good wafer bondings on ion-exchanged glass waveguides are obtained.

Ion-exchange technology on glass has been successfully used for more than 20 years to realize dependable and low-cost passive and active integrated optic devices on silicate or phosphate glasses for the optical telecommunication systems operating around λ = 1.5 μm. However, the recent developments of integrated optics instruments for astronomical interferometers or biological sensors have required an increase of the devices operation range towards the mid-infrared. For these reasons, we present in this paper the development and the realization of single-mode waveguides by means of a binary ion-exchange on a germanate glass (BGA-G115 form Kigre Inc.) which transparency window reaches λ = 4 μm. A complete study of the silver ion diffusion in this glass matrix has been performed allowing the determination of silver and sodium ion diffusion coefficients as well as the value of the maximum refractive index change. Using these data, simulations were carried-out showing that an ion-exchange of 90 min in a 0.03AgNO 3 –0.97NaNO 3 molten salt at a temperature of 330 °C would allow the realization of single-mode channel waveguides at λ = 1.55 μm. To demonstrate this on BGA-G115, a specific technological process based on the deposition of a polysilicon masking layer has been implemented. Single-mode channel waveguides, with a 2.5 μm diffusion window width, have thus been realized and characterized at the wavelength of 1.55 μm. Modal size has been measured to be 10 ± 1 μm × 7 ± 1 μm for propagation losses of 1.2 ± 0.5 dB/cm for a 2 ± 0.1 cm long device.

One of the technological challenges of direct observation of extra-solar planets by nulling interferometry is the development of a modal filter operating from 6 to 20 μm. In the present paper a candidate technology for the fabrication of such modal filters is presented: Integrated Optics. A solution based on all-telluride buried channel waveguides is considered. In the proposed waveguides, vertical guiding of light is achieved by a 15 μm-thick Te 83 Ge 17 core film deposited onto a lower-index Te 75 Ge 15 Ga 10 substrate, and covered by a 15 μm-thick Te 76 Ge 24 superstrate. Horizontal guiding of light is obtained by modifying the geometry of the core layer by ion beam etching. As this stage, all-telluride buried channel waveguide prototypes demonstrate light guiding and transmission from 2 to 20 μm. The validity of the technology and the good quality of the fabrication process, in particular the input and output facets surface finish are thus confirmed. These results consolidate the potential of Te-based integrated optics components for nulling interferometry.

Er-doped and Er/Yb-codoped glasses have a key role in the production of lasers and amplifiers for optical communication systems and eye-safe sensors operating at wavelengths around 1550 nm. Ion-exchanged waveguides on Er/Yb-codoped phosphate glass allow implementing quite compact and efficient active devices. Unfortunately, these wafers are not compatible with the integration of passive functions since unpumped erbium ions absorb 1550 nm signal. Hence, an efficient monolithic co-integration of passive and active optical functions requires hybridizing doped and undoped glasses. In this paper, we present the realization of a fully encapsulated three-dimensional distributed feedback (DFB) hybrid laser obtained by the wafer bonding of two ion-exchanged substrates. On the first one, an undoped silicate glass, a selectively buried channel core waveguide is made by a Ag + /Na + exchange and a field-assisted burial. A Bragg grating is then etched on the wafer surface. On the second wafer, an Er/Yb-codoped phosphate glass, a slab core waveguide is obtained by a Ag + /Na + exchange. The two wafers are finally bonded together yielding to a DFB laser: the interaction between the guided light and the doped glass provides the amplification, while the Bragg grating supplies the feedback. With this fully encapsulated device, (420±15) µW laser emission has been observed at 1534 nm for (390±20) mW injected pump power, while its input and output are totally insulated from the doped wafer.

Ion-exchange can be used to locally increase the refractive index of a glass, thus allowing the fabrication of optical waveguides. This technology has been used for decades to obtain passive and active devices. In particular, integrated Q-switched lasers have been recently achieved. The high optical power from pulsed lasers in combination with the light confinement of waveguides allows designing devices for nonlinear applications. For example, nonlinear phenomena is recognized as an essential mechanism of spectral broadening needed for the realization of supercontinuum laser sources. In this paper we investigate the power handling capabilities of waveguides made by ion-exchange. First, the fabrication technology based on the Ag + /Na + exchange will be briefly presented for surface and buried waveguides. Both types of waveguides are then designed in order to minimize their effective area. These waveguides are fabricated, their damage threshold and effective area are characterized, 4.8±0.5 μm 2 and 14.2±1.4 μm 2 effective area are reached for surface and buried waveguides respectively. Their ability to handle high optical power density, 25±13 GW/cm 2 and 65±39 GW/cm 2 respectively is assessed and the main cause for optical damage in silver ion-exchanged waveguides is investigated.