1. Small ozone generator fabricated from low-temperature co-fired ceramics
- Author
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Barbara Malič, Darko Belavic, Kostja Makarovic, Janez Holc, Franci Kovač, and Andreja Benčan
- Subjects
Ozone ,Materials science ,Fabrication ,02 engineering and technology ,01 natural sciences ,chemistry.chemical_compound ,0103 physical sciences ,Ceramic ,Electrical and Electronic Engineering ,Ozone generator ,010302 applied physics ,business.industry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Atomic and Molecular Physics, and Optics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,chemistry ,visual_art ,Electrode ,visual_art.visual_art_medium ,Optoelectronics ,Millimeter ,Electric discharge ,0210 nano-technology ,business ,Voltage - Abstract
Purpose The purpose of this study is the design, fabrication and evaluation of a miniature ozone generator using the principle of electric discharge are presented. Design/methodology/approach The device was fabricated using a low-temperature co-fired ceramics (LTCC) technology, by which a multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimeter scales was realized. Findings The developed ozone generator with the dimensions of 63.6 × 41.8 × 1.3 mm produces approximately 1 vol. % of ozone in oxygen flow of 15 ml/min, at an applied voltage of 7 kV. Originality/value A miniature ozone generator, manufactured in LTCC technology, produces high amount of ozone and more than it is described in the available references or in datasheets of commercial devices of similar size.
- Published
- 2021