1. Surface morphology and photoluminescence studies of Sb-doped ZnO layers grown using MOCVD
- Author
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Nadia Haneche, Corinne Sartel, J. M. Laroche, Christèle Vilar, Vincent Sallet, François Jomard, Pierre Galtier, and Alain Lusson
- Subjects
Secondary ion mass spectrometry ,Photoluminescence ,Antimony ,chemistry ,Scanning electron microscope ,Doping ,Analytical chemistry ,chemistry.chemical_element ,Substrate (electronics) ,Chemical vapor deposition ,Metalorganic vapour phase epitaxy ,Condensed Matter Physics ,Electronic, Optical and Magnetic Materials - Abstract
ZnO and ZnO:Sb films were deposited using low pressure metal organic chemical vapor deposition on C- and R-oriented sapphire and O-polar ZnO substrates. Surface morphologies were studied using scanning electron microscopy. Whereas ZnO films grown on C-sapphire show a rough surface and hexagonal rods, the doped ZnO:Sb layers exhibit a relatively smoother surface, indicating a possible surfactant effect of antimony. The secondary ion mass spectrometry measurements permit to determine the antimony profile in the doped layers. Sb concentrations from 10 18 to 10 20 at/cm 3 were measured, depending on the growth conditions and substrate nature. Photoluminescence spectra exhibit donor-acceptor pair emission at 3.22 eV.
- Published
- 2010
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