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Growth studies and optical properties of Zn1−xCdxO films grown by metal-organic chemical-vapor deposition
- Source :
- Journal of Vacuum Science and Technology A, Journal of Vacuum Science and Technology A, American Vacuum Society, 2011, 29 (3), pp.03A114. ⟨10.1116/1.3567960⟩, Journal of Vacuum Science & Technology A, Journal of Vacuum Science & Technology A, 2011, 29 (3), pp.03A114. ⟨10.1116/1.3567960⟩
- Publication Year :
- 2011
- Publisher :
- HAL CCSD, 2011.
-
Abstract
- International audience; Heteroepitaxial growths of Zn1−xCdxO films were performed on R-oriented sapphire substrates by metal-organic chemical-vapor deposition. The authors carried out secondary ion mass spectrometry analysis, scanning electron microscopy, photoluminescence, and ellipsometric measurements to investigate the incorporation of cadmium in the layers, as well as its influence on the optical properties. Compositions up to 5.5% Cd were obtained, tuning the photoluminescence emission from 3.36 (ZnO) to 3.1 eV and increasing the refractive index at 600 nm from 1.94 to 2.
- Subjects :
- 010302 applied physics
Photoluminescence
Materials science
Scanning electron microscope
Analytical chemistry
02 engineering and technology
Surfaces and Interfaces
Chemical vapor deposition
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Surfaces, Coatings and Films
Secondary ion mass spectrometry
Ellipsometry
0103 physical sciences
Sapphire
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
Deposition (phase transition)
Metalorganic vapour phase epitaxy
0210 nano-technology
Subjects
Details
- Language :
- English
- ISSN :
- 07342101
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science and Technology A, Journal of Vacuum Science and Technology A, American Vacuum Society, 2011, 29 (3), pp.03A114. ⟨10.1116/1.3567960⟩, Journal of Vacuum Science & Technology A, Journal of Vacuum Science & Technology A, 2011, 29 (3), pp.03A114. ⟨10.1116/1.3567960⟩
- Accession number :
- edsair.doi.dedup.....93b93f532e1161f5508502f11975e66c
- Full Text :
- https://doi.org/10.1116/1.3567960⟩