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Growth studies and optical properties of Zn1−xCdxO films grown by metal-organic chemical-vapor deposition

Authors :
Gilles Lerondel
Gaëlle Amiri
François Jomard
Vincent Sallet
Corinne Sartel
Alain Lusson
Pierre Galtier
J. M. Laroche
Nadia Haneche
Christèle Vilar
Christophe Couteau
Jenny Lin
Roy Aad
Groupe d'Etude de la Matière Condensée (GEMAC)
Université de Versailles Saint-Quentin-en-Yvelines (UVSQ)-Centre National de la Recherche Scientifique (CNRS)
Département Poudres et Matériaux Multi-Composants (P2MC-ENSMSE)
École des Mines de Saint-Étienne (Mines Saint-Étienne MSE)
Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-SPIN
Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO)
Institut Charles Delaunay (ICD)
Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)
Source :
Journal of Vacuum Science and Technology A, Journal of Vacuum Science and Technology A, American Vacuum Society, 2011, 29 (3), pp.03A114. ⟨10.1116/1.3567960⟩, Journal of Vacuum Science & Technology A, Journal of Vacuum Science & Technology A, 2011, 29 (3), pp.03A114. ⟨10.1116/1.3567960⟩
Publication Year :
2011
Publisher :
HAL CCSD, 2011.

Abstract

International audience; Heteroepitaxial growths of Zn1−xCdxO films were performed on R-oriented sapphire substrates by metal-organic chemical-vapor deposition. The authors carried out secondary ion mass spectrometry analysis, scanning electron microscopy, photoluminescence, and ellipsometric measurements to investigate the incorporation of cadmium in the layers, as well as its influence on the optical properties. Compositions up to 5.5% Cd were obtained, tuning the photoluminescence emission from 3.36 (ZnO) to 3.1 eV and increasing the refractive index at 600 nm from 1.94 to 2.

Details

Language :
English
ISSN :
07342101
Database :
OpenAIRE
Journal :
Journal of Vacuum Science and Technology A, Journal of Vacuum Science and Technology A, American Vacuum Society, 2011, 29 (3), pp.03A114. ⟨10.1116/1.3567960⟩, Journal of Vacuum Science & Technology A, Journal of Vacuum Science & Technology A, 2011, 29 (3), pp.03A114. ⟨10.1116/1.3567960⟩
Accession number :
edsair.doi.dedup.....93b93f532e1161f5508502f11975e66c
Full Text :
https://doi.org/10.1116/1.3567960⟩