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4. ZrO2 magnetron growth method and investigation of thin film growth.

Author

Igamov, B.D., Kamardin, A.I., Ergashov, Y., and Bekpulatov, I.R.

Subjects
*THIN films, *ENERGY dispersive X-ray spectroscopy, *MAGNETRONS, *CHEMICAL bonds, *MAGNETRON sputtering, *SCANNING electron microscopy
Abstract

In this study, the optimal modes of ZrO2 thin layer formation on the surface of Si(111)-type plate by magnetron sputtering were studied. (ZrO2/ Si) thin layer The morphology, microstructure and chemical composition of the samples were determined by scanning electron microscopy and energy dispersive X-ray spectroscopy using a Quanta 200 3D (FEI, Netherlands) microscope. The formation of chemical bonds of the thin layer was monitored using a Raman spectrometer. [ABSTRACT FROM AUTHOR]

Published
2024
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