ZrO2 magnetron growth method and investigation of thin film growth.

In this study, the optimal modes of ZrO2 thin layer formation on the surface of Si(111)-type plate by magnetron sputtering were studied. (ZrO2/ Si) thin layer The morphology, microstructure and chemical composition of the samples were determined by scanning electron microscopy and energy dispersive X-ray spectroscopy using a Quanta 200 3D (FEI, Netherlands) microscope. The formation of chemical bonds of the thin layer was monitored using a Raman spectrometer. [ABSTRACT FROM AUTHOR]