Search

Your search keyword '"Hideyuki Kayaguchi"' showing total 7 results
Start Over Author "Hideyuki Kayaguchi"
7 results on '"Hideyuki Kayaguchi"'

4. Observation of Surface Potential of Micropatterned Self-assembled Electrets for MEMS Vibrational Energy Harvesters.

Author

Daisuke Yamane, Kosuke Kawashima, Reiki Sugimoto, Ruichen Li, Hideyuki Kayaguchi, Keisuke Kurihara, Hisao Ishi, and Yuya Tanaka

Subjects
SURFACE potential, ELECTRETS, MICROFABRICATION
Abstract

In this paper, we present the observation results of the surface potential of micropattemed thick (> 1 pm) self-assembled electrets (SAEs) for MEMS vibrational energy harvesters (VEHs). To evaluate the surface potential of micropattemed SAEs, we propose and develop test devices with removable through-hole substrates corresponding to the moving electrodes of SAE-MEMS VEHs. In this study, SAEs are deposited simultaneously on two test devices with different through-hole spacings and on a reference flat substrate using the same vacuum evaporation process. The surface potential of SAEs is proportional to the film thickness, and when the film thickness of the SAE deposited on the flat substrate is 4.48 pm, the surface potential exceeds 200 V. At this time, in a test device where the average thickness of micropattemed SAEs is 3.08 pm, the measured surface potential is 68 V. In addition, it is experimentally observed that when micropattemed SAEs are formed using the through-hole structures, the microfabrication process causes the SAE pattern to spread wider than the through-hole dimensions, and the surface profiles are not flat. These findings provide useful insights for the design of SAE-MEMS VEHs using micropattemed SAEs with through-hole structures. [ABSTRACT FROM AUTHOR]

Published
2023
Full Text
View/download PDF

5. Electret-based vibrational energy generator composed of polar molecules for OLED

Author

Hideyuki Kayaguchi, Yuki Tazo, Noritaka Matsuura, Hisao Ishii, and Yuya Tanaka

Subjects
Vibration, Generator (circuit theory), Materials science, business.industry, Process (computing), OLED, Optoelectronics, Electret, Dielectric, Electric power, business, Diode
Abstract

Electret-based vibrational energy generators (E-VEGs) are of particular interest since they can generate electrical power from ambient vibration. A challenge is that the charging process is required for making the electret from a dielectric material, and the process is one of the main factors that determine the manufacturing costs of the device. Recently, by utilizing the spontaneous orientation of polar molecules, which have been used for organic light -emitting diodes, we realized a novel E-VEG that does not require any charging process. In this paper, the operation mechanism and stability of the device are discussed. We believe that the E- VEG using spontaneous orientation enables us to reduce the costs, leading to the device's mass commercialization.

Published
2021
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results