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Direct Measurement of The Surface Potential of Micro-Patterned Self-Assembled Electrets for Mems Vibrational Energy Harvesters
- Source :
- 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS).
- Publication Year :
- 2022
- Publisher :
- IEEE, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
- Accession number :
- edsair.doi...........b01e2dca18ee86abcd5d0f51523eab9b
- Full Text :
- https://doi.org/10.1109/powermems56853.2022.10007570