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Your search keyword '"Hans Peter Sperlich"' showing total 13 results

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1. Impact of the contacting scheme on I-V measurements of metallization-free silicon heterojunction solar cells

2. Microwave PE CVD reactor and process for industrial high throughput fabrication of aluminum oxide layers for solar cell applications

3. Single side passivated contact technology exceeding 22.5% with industrial production equipment

4. High throughput and enhanced PECVD passivation tool concepts for improved PERC cells

5. PECVD-AlOx/SiNx passivation stacks on wet chemically oxidized silicon: Constant voltage stress investigations of charge dynamics and interface defect states

6. PECVD-AlOx/SiNx Passivation Stacks on Silicon: Effective Charge Dynamics and Interface Defect State Spectroscopy

7. On the Trade-Off between Industrially Feasible Silicon Surface Preconditioning Prior to Interface Passivation and Iron Contaminant Removal Effectiveness

8. Wet Chemical Oxidation of Silicon Surfaces Prior to the Deposition of All-PECVD AlOx/a-SiNx Passivation Stacks for Silicon Solar Cells

9. On the impact of interfacial SiO x ‐layer on the passivation properties of PECVD synthesized aluminum oxide

10. Phosphorous doped SOG as a pre-metal-dielectric for sub-50nm technology nodes

11. Investigating the Role of Stress in SOG-filled Shallow-Trench-Isolation Structures of sub-70 nm Device

12. Optimizing the Interface of Spin-on Oxide and the Active Area of Transistor in Sub70nm DRAM Structures For Better Electrical Performance

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