High throughput and enhanced PECVD passivation tool concepts for improved PERC cells

PERC (Passivated Emitter and Rear Cell) technology has been established as a new standard in silicon PV cell manufacturing whereby the deposition of the aluminum oxide (AlOx)/silicon nitride (SiNx) rear-side passivation stack is mainly performed by inline PECVD equipment. Simultaneously the industrial price pressure for cell and module manufactures increase by lower module prices. Thus further reductions of production costs per watt peak (Wp) are required. For this reason manufacturing equipment with higher throughput as well as a lower OPEX (operational expenditure) combined with high tool uptime and yield keeps being mandatory. PV tool suppliers are focused on developing new tool generations to meet those requirements by also supporting new cell technology improvements at once. Beside wet chemistry, diffusion and metallization tools especially new high quality and high-throughput passivation concepts for enhanced PERC (PERC+ [4]) cells are necessary. This paper shows results on Meyer Burgers new PECVD passivation equipment for enhanced PERC}+ cells including technologies like selective emitter and emitter oxidation. Those new passivation concepts can be applied for only rear side (MAiA ® 6.1) and even both sides (FABiA ® 4.1) of a PERC+ cell with throughputs up to 6000W/h and excellent deposition uniformity and quality.