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2. Morphology modifcation of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm

3. Silicon nitride photonics: large scale integration and applications

4. Removal of poly(methyl methacrylate) in diblock copolymers films studied by grazing incidence small‐angle X‐ray scattering

6. Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication

9. Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication.

10. Exploring strategies to contact 3D nano-pillars

15. Exploring Strategies to Contact 3D Nano-Pillars

16. Establishing a sidewall image transfer chemo-epitaxial DSA process using 193 nm immersion lithography

19. Spacer patterning lithography as a new process to induce block copolymer alignment by chemo-epitaxy

25. Pillars fabrication by DSA lithography: material and process options

27. p-type silicon doping profiling using electrochemical anodization.

29. A track process for solvent annealing of high-χ BCPs

30. Advanced surface affinity control for DSA contact hole shrink applications

31. Recent Achievements in Sub-10 nm DSA Lithography for Line/Space Patterning

33. Morphology of poly(lactide)‐block‐poly(dimethylsiloxane)‐block‐polylactide high‐χtriblock copolymer film studied by grazing incidence small‐angle X‐ray scattering

34. Process highlights to enhance directed self-assembly contact patterning performances

42. Probing Self-Assembly of Cylindrical Morphology Block Copolymer Using in Situ and ex Situ Grazing Incidence Small-Angle X-ray Scattering: The Attractive Case of Graphoepitaxy

43. Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

45. Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-block-poly(methylmethacrylate)

49. A track process for solvent annealing of high-χBCPs

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