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Hybrid E-beam lithography and process improvement for nanodevice fabrication
- Source :
- Proceedings of SPIE; October 2020, Vol. 11518 Issue: 1 p115180U-115180U-10, 11402831p
- Publication Year :
- 2020
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11518
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs54507648
- Full Text :
- https://doi.org/10.1117/12.2572868