1. Manufacturing of Sputtering Composite Targets Containing Phases of Co2FeSi or Co2MnSi Heusler Alloy
- Author
-
Yu. I. Chigirinskii, V. V. Sdobnyakov, V. P. Lesnikov, N. V. Sakharov, Yu. A. Dudin, Maksim Boldin, V. N. Trushin, G. V. Vazenmiller, A. A. Bobrov, O. A. Belkin, and E. S. Demidov
- Subjects
010302 applied physics ,Fabrication ,Materials science ,Physics and Astronomy (miscellaneous) ,business.industry ,Alloy ,Composite number ,02 engineering and technology ,engineering.material ,021001 nanoscience & nanotechnology ,01 natural sciences ,Pulsed laser deposition ,Sputtering ,0103 physical sciences ,Cavity magnetron ,engineering ,Optoelectronics ,Deposition (phase transition) ,Thin film ,0210 nano-technology ,business - Abstract
The paper presents a method for manufacturing mechanically strong sputtering composite targets containing the phase of the Co2FeSi or Co2MnSi Heusler alloy of the stoichiometric composition, which can be used for fabrication of spin electronic devices by high-frequency magnetron deposition and pulsed laser deposition of thin films.
- Published
- 2018