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Manufacturing of Sputtering Composite Targets Containing Phases of Co2FeSi or Co2MnSi Heusler Alloy
- Source :
- Technical Physics. 63:1002-1005
- Publication Year :
- 2018
- Publisher :
- Pleiades Publishing Ltd, 2018.
-
Abstract
- The paper presents a method for manufacturing mechanically strong sputtering composite targets containing the phase of the Co2FeSi or Co2MnSi Heusler alloy of the stoichiometric composition, which can be used for fabrication of spin electronic devices by high-frequency magnetron deposition and pulsed laser deposition of thin films.
- Subjects :
- 010302 applied physics
Fabrication
Materials science
Physics and Astronomy (miscellaneous)
business.industry
Alloy
Composite number
02 engineering and technology
engineering.material
021001 nanoscience & nanotechnology
01 natural sciences
Pulsed laser deposition
Sputtering
0103 physical sciences
Cavity magnetron
engineering
Optoelectronics
Deposition (phase transition)
Thin film
0210 nano-technology
business
Subjects
Details
- ISSN :
- 10906525 and 10637842
- Volume :
- 63
- Database :
- OpenAIRE
- Journal :
- Technical Physics
- Accession number :
- edsair.doi...........57e84c6e3b0bd8bb0f8457be809b3fd3