1. Anisotropic textured silicon obtained by stain-etching at low etching rates
- Author
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Benjamín González-Díaz, F. Ben-Hander, Ricardo Guerrero-Lemus, José M. Martínez-Duart, C. Hernández-Rodríguez, and N. Marrero
- Subjects
Materials science ,Acoustics and Ultrasonics ,Macropore ,Silicon ,fungi ,Isotropy ,technology, industry, and agriculture ,chemistry.chemical_element ,Mineralogy ,macromolecular substances ,Condensed Matter Physics ,Porous silicon ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,stomatognathic system ,chemistry ,Etching (microfabrication) ,Surface roughness ,Composite material ,Anisotropy ,Luminescence - Abstract
The structure, luminescence and etching kinetics for porous silicon stain-etched at different temperatures are studied. The results reveal that for temperatures below 10 °C and for short etching times, a novel anisotropic structure based on surface roughness preferentially oriented in the 100 direction is observed. At temperatures higher than 10 °C or large etching times, typical macropores and mesopores with non-preferential pore wall orientation are detected. The luminescence spectra of the samples with preferential surface roughness orientation are red-shifted with respect to the samples with typical isotropic orientation. The results are interpreted in terms of average etching rates and pore growth. more...
- Published
- 2006
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