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It is very natural to use silicon as a primary material for microelectronics. However, silicon application in nanophotonics is limited due to the indirect gap of its energy band structure. To improve the silicon emission properties, it can be combined with a plasmonic part. The resulting metal–dielectric (hybrid) nanostructures have shown their excellence compared to simple metallic dielectric nanostructures. Still, in many cases, the fabrication of such structures is time consuming and quite difficult. Here, for the first time, we demonstrate a single-step and lithography-free laser-induced dewetting of bi-layer nanoscale-thickness gold–silicon films supported by a glass substrate to produce hybrid nanoparticles. For obtaining hybrid nanoparticles, we study nonlinear photoluminescence by mapping their optical response and morphology by scanning electron microscopy. This method can be used for the fabrication of arrays of hybrid nanoparticles providing white-light photoluminescence with a good control of their microscopic sizes and position. The developed approach can be useful for a wide range of photonic applications including the all-optical data processing and storage where miniaturization down to micro- and nanoscale together with an efficiency increase is of high demand.

Fabrication of hybrid micro- and nanostructures with a strong nonlinear response is challenging and represents a great interest due to a wide range of photonic applications. Usually, such structures are produced by quite complicated and time-consuming techniques. This work demonstrates laser-induced hybrid metal-dielectric structures with strong nonlinear properties obtained by a single-step fabrication process. We determine the influence of several incident femtosecond pulses on the Au/Si bi-layer film on produced structure morphology. The created hybrid systems represent isolated nanoparticles with a height of 250–500 nm exceeding the total thickness of the Au-Si bi-layer. It is shown that fabricated hybrid nanostructures demonstrate enhancement of the SHG signal (up to two orders of magnitude) compared to the initial planar sample and a broadband photoluminescence signal (more than 200 nm in width) in the visible spectral region. We establish the correlation between nonlinear signal and phase composition provided by Raman scattering measurements. Such laser-induced structures have significant potential in optical sensing applications and can be used as components for different nanophotonic devices.