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The Probe far-Infrared Mission for Astrophysics (PRIMA) is a proposed space observatory which will use arrays of thousands of kinetic inductance detectors (KIDs) to perform low- and moderate-resolution spectroscopy throughout the far-infrared. The detectors must have noise equivalent powers (NEPs) at or below 0.1 aW/sqrt(Hz) to be subdominant to noise from sky backgrounds and thermal noise from PRIMA's cryogenically cooled primary mirror. Using a Radio Frequency System on a Chip for multitone readout, we measure the NEPs of detectors on a flight-like array designed to observe at a wavelength of 210 microns. We find that 92% of the KIDs measured have an NEP below 0.1 aW/sqrt(Hz) at a noise frequency of 10 Hz., Comment: 7 pages, 7 figures

The next generation of rare-event searches, such as those aimed at determining the nature of particle dark matter or in measuring fundamental neutrino properties, will benefit from particle detectors with thresholds at the meV scale, 100-1000x lower than currently available. Quantum parity detectors (QPDs) are a novel class of proposed quantum devices that use the tremendous sensitivity of superconducting qubits to quasiparticle tunneling events as their detection concept. As envisioned, phonons generated by particle interactions within a crystalline substrate cause an eventual quasiparticle cascade within a surface patterned superconducting qubit element. This process alters the fundamental charge parity of the device in a binary manner, which can be used to deduce the initial properties of the energy deposition. We lay out the operating mechanism, noise sources, and expected sensitivity of QPDs based on a spectrum of charge-qubit types and readout mechanisms and detail an R&D pathway to demonstrating sensitivity to sub-eV energy deposits., Comment: 18 pages, 9 figures, 4 appendices

We report measurements characterizing the performance of a kinetic inductance detector array designed for a wavelength of 25 microns and very low optical background level suitable for applications such as a far-infrared instrument on a cryogenically cooled space telescope. In a pulse counting mode of operation at low optical flux, the detectors can resolve individual 25-micron photons. In an integrating mode, the detectors remain photon noise limited over more than six orders of magnitude in absorbed power from 70 zW to 200 fW, with a limiting NEP of 4.6 x 10^-20 W/rtHz at 1 Hz. In addition, the detectors are highly stable with flat power spectra under optical load down to 1 mHz. Operational parameters of the detector are determined including the efficiency of conversion of the incident optical power into quasiparticles in the aluminum absorbing element and the quasiparticle self-recombination constant., Comment: 35 pages, 18 figures

The PRobe far-Infrared Mission for Astrophysics (PRIMA) is under study as a potential far-IR space mission, featuring actively cooled optics, and both imaging and spectroscopic instrumentation. To fully take advantage of the low background afforded by a cold telescope, spectroscopy with PRIMA requires detectors with a noise equivalent power (NEP) better than $1 \times 10^{-19}$ W Hz$^{-1/2}$. To meet this goal we are developing large format arrays of kinetic inductance detectors (KIDs) to work across the $25-250$ micron range. Here we present the design and characterization of a single pixel prototype detector optimized for $210$ micron. The KID consists of a lens-coupled aluminum inductor-absorber connected to a niobium interdigitated capacitor to form a 2 GHz resonator. We have fabricated a small array with 28 KIDs, and we measure the performance of one of these detectors with an optical loading in the $0.01 - 300$ aW range. At low loading the detector achieves an NEP of $9\times10^{-20}$ W Hz$^{-1/2}$ at a 10 Hz readout frequency, and the lens-absorber system achieves a good optical efficiency. An extrapolation of these measurements suggest this detector may remain photon noise limited at up to 20 fW of loading, offering a high dynamic range for PRIMA observations of bright astronomical sources., Comment: revised submission to IEEE Transactions on Terahertz Science and Technology

Far-infrared (far-IR) astrophysics missions featuring actively cooled telescopes will offer orders of magnitude observing speed improvement at wavelengths where galaxies and forming planetary systems emit most of their light. The PRobe far-Infrared Mission for Astrophysics (PRIMA), which is currently under study, emphasizes low and moderate resolution spectroscopy throughout the far-IR. Full utilization of PRIMA's cold telescope requires far-IR detector arrays with per-pixel noise equivalent powers (NEPs) at or below 1 x 10-19 W/rtHz. We are developing low-volume Aluminum kinetic inductance detector (KID) arrays to reach these sensitivities. We will present on the development of our long-wavelength (210 um) array approach, with a focus on multitone measurements of our 1,008-pixel arrays. We measure an NEP below 1 x 10-19 W/rtHz for 73 percent of our pixels., Comment: 9 pages, 5 figures, 20th International Workshop on Low Temperature Detectors, submitted to the Journal of Low Temperature Physics

Future space-based far-infrared astrophysical observatories will require exquis-itely sensitive detectors consistent with the low optical backgrounds. The PRobe far-Infrared Mission for Astrophysics (PRIMA) will deploy arrays of thousands of superconducting kinetic inductance detectors (KIDs) sensitive to radiation between 25 and 265 $\mu$m. Here, we present laboratory characterization of prototype, 25 -- 80 $\mu$m wavelength, low-volume, aluminum KIDs designed for the low-background environment expected with PRIMA. A compact parallel plate capacitor is used to minimize the detector footprint and suppress TLS noise. A novel resonant absorber is designed to enhance response in the band of interest. We present noise and optical efficiency measurements of these detectors taken with a low-background cryostat and a cryogenic blackbody. A microlens-hybridized KID array is found to be photon noise limited down to about 50 aW with a limiting detector NEP of about $6.5 \times 10^{-19}~\textrm{W/Hz}^{1/2}$. A fit to an NEP model shows that our optical system is well characterized and understood down to 50 aW. We discuss future plans for low-volume aluminum KID array development as well as the testbeds used for these measurements., Comment: 8 pages, 4 figures, 20th International Workshop on Low Temperature Detectors, submitted to the Journal of Low Temperature Physics

Future generation of astronomical imaging spectrometers are targeting the far infrared wavelengths to close the THz astronomy gap. Similar to lens antenna coupled Microwave Kinetic Inductance Detectors (MKIDs), lens absorber coupled MKIDs are a candidate for highly sensitive large format detector arrays. However, the latter is more robust to misalignment and assembly issues at THz frequencies due to its incoherent detection mechanism while requiring a less complex fabrication process. In this work, the performance of such detectors is investigated. The fabrication and sensitivity measurement of several lens absorber coupled MKID array prototypes operating at 6.98 and 12 THz central frequencies is on-going., Comment: 2 pages, 2 figures, IRMMW-THz conference paper

We report on efforts to improve the speed of low-G far-infrared transition-edged-sensed bolometers. We use a fabrication process that does not require any dry etch steps to reduce heat capacity on the suspended device and measure a reduction in the detector time constant. However, we also measure an increase in the temperature-normalized thermal conductance (G), and a corresponding increase in the noise-equivalent power (NEP). We employ a new near-IR photon-noise technique using a near-IR laser to calibrate the frequency-domain multiplexed AC system and compare the results to a well-understood DC circuit. We measure an NEP white noise level of 0.8 aW/rtHz with a 1/f knee below 0.1 Hz and a time constant of 3.2 ms., Comment: 27 pages, 16 figures. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in J. Appl. Phys. 134 (9) and may be found at https://doi.org/10.1063/5.0157208

Remote submm-wave spectrometers have the capability of providing statistically significant numbers of isotopic composition measurements within the budget constraints of available planetary missions. This talk will present a mission and instrument concept that would enable an accurate measurement of the D/H ratio on not one but several dozens of comets in a four-year mission lifetime. The instrument would utilize advanced cryogenic detectors that would allow us to measure the abundance of the para and ortho spin states of water and its isotopologues. State of the art superconducting heterodyne receivers have been developed that provide detection sensitivities approaching the quantum limit in the 500 GHz frequency range enabling the measurement of D/H ratio on around 50 comets from an observatory stationed for example at the thermally benign Lagrange point L2.

Star light suppression technologies to find and characterize faint exoplanets include internal coronagraph instruments as well as external star shade occulters. Currently, the NASA WFIRST-AFTA mission study includes an internal coronagraph instrument to find and characterize exoplanets. Various types of masks could be employed to suppress the host star light to about 10 -9 level contrast over a broad spectrum to enable the coronagraph mission objectives. Such masks for high contrast internal coronagraphic imaging require various fabrication technologies to meet a wide range of specifications, including precise shapes, micron scale island features, ultra-low reflectivity regions, uniformity, wave front quality, achromaticity, etc. We present the approaches employed at JPL to produce pupil plane and image plane coronagraph masks by combining electron beam, deep reactive ion etching, and black silicon technologies with illustrative examples of each, highlighting milestone accomplishments from the High Contrast Imaging Testbed (HCIT) at JPL and from the High Contrast Imaging Lab (HCIL) at Princeton University. We also present briefly the technologies applied to fabricate laboratory scale star shade masks.

The slide presentation reviews quasiparticle experiment. It includes information on the experiement set-up, tunneling, dwell time,kinetic theory, and temperature dependence.

Direct imaging and characterization of exo-solar terrestrial planets require coronagraphic instruments capable of suppressing star light to 10-10. Pupil shaping masks have been proposed and designed1 at Princeton University to accomplish such a goal. Based on Princeton designs, free standing (without a substrate) silicon masks have been fabricated with lithographic and deep etching techniques. In this paper, we discuss the fabrication of such masks and present their physical and optical characteristics in relevance to their performance over the visible to near IR bandwidth.

Metal emitter structures in a class of developmental InP-based high-speed heterojunction bipolar transistors (HBTs) have been redesigned to have T-shaped cross sections. T-cross-section metal features have been widely used in Schottky diodes and high-electron-mobility transistors, but not in HBTs. As explained, the purpose served by the present T cross-sectional shapes is to increase fabrication yields beyond those achievable with the prior cross-sectional shapes.

According to a proposal, a phenomenon associated with excitation of quasiparticles in certain superconducting quantum devices would be exploited as a means of detecting photons with exquisite sensitivity. The phenomenon could also be exploited to perform medium-resolution spectroscopy. The proposal was inspired by the observation that Coulomb blockade devices upon which some quantum logic gates are based are extremely sensitive to quasiparticles excited above the superconducting gaps in their leads. The presence of quasiparticles in the leads can be easily detected via the charge states. If quasiparticles could be generated in the leads by absorption of photons, then the devices could be used as very sensitive detectors of electromagnetic radiation over the spectral range from x-rays to submillimeter waves. The devices in question are single-Cooper-pair boxes (SCBs), which are mesoscopic superconducting devices developed for quantum computing. An SCB consists of a small superconducting island connected to a reservoir via a small tunnel junction and connected to a voltage source through a gate capacitor. An SCB is an artificial two-level quantum system, the Hamiltonian of which can be controlled by the gate voltage. One measures the expected value of the charge of the eigenvectors of this quantum system by use of a radio-frequency single-electron transistor. A plot of this expected value of charge as a function of gate voltage resembles a staircase that, in the ideal case, consists of steps of height 2 e (where e is the charge of one electron). Experiments have shown that depending on the parameters of the device, quasiparticles in the form of "broken" Cooper pairs present in the reservoir can tunnel to the island, giving rise to steps of 1 e. This effect is sometimes called "poisoning." Simulations have shown that an extremely small average number of quasiparticles can generate a 1-e periodic signal. In a device according to the proposal, this poisoning would be turned to advantage. Depending on the wavelength, an antenna or other component would be used to couple radiation into the reservoir, wherein the absorption of photons would break Cooper pairs, thereby creating quasiparticles that, in turn, would tunnel to the island, creating a 1-e signal. On the basis of conservative estimates of device parameters derived from experimental data and computational simulations that fit the data, it has been estimated that the noise equivalent power of a device according to the proposal could be as low as 6 10(exp -22) W/Hz(exp 1/2). It has also been estimated that the spectroscopic resolution (photon energy divided by increment of photon energy) of such a device in visible light would exceed 100.

Occulting focal plane masks for the Terrestrial Planet Finder Coronagraph (TPF-C) could be designed with continuous gray scale profile of the occulting pattern such as 1-sinc2 on a suitable material or with micron-scale binary transparent and opaque structures of metallic pattern on glass. We have designed, fabricated and tested both kinds of masks. The fundamental characteristics of such masks and initial test results from the High Contrast Imaging Test bed (HCIT) at JPL are presented.

Based on preliminary experiments and results with a binary 1-sinc mask in the HCIT early in August 2004, we planned for a detailed experiment to compare the performance of HEBS and Binary masks under nearly identical conditions in the HCIT. This report details the design and fabrication of the masks, simulated predictions, and experimental results.

Direct-write electron-beam lithography has proven to be a powerful technique for fabricating a variety of micro- and nano-optical devices. Binary E-beam lithography is the workhorse technique for fabricating optical devices that require complicated precision nano-scale features. We describe a bi-layer resist system and virtual-mark height measurement for improving the reliability of fabricating binary patterns. Analog E-beam lithography is a newer technique that has found significant application in the fabrication of diffractive optical elements. We describe our techniques for fabricating analog surface-relief profiles in E-beam resist, including some discussion regarding overcoming the problems of resist heating and charging. We also describe a multiple-field-size exposure scheme for suppression of field-stitch induced ghost diffraction orders produced by blazed diffraction gratings on non-flat substrates.