High-sensitivity transition-edge-sensed bolometers: improved speed and characterization with AC and DC bias

We report on efforts to improve the speed of low-G far-infrared transition-edged-sensed bolometers. We use a fabrication process that does not require any dry etch steps to reduce heat capacity on the suspended device and measure a reduction in the detector time constant. However, we also measure an increase in the temperature-normalized thermal conductance (G), and a corresponding increase in the noise-equivalent power (NEP). We employ a new near-IR photon-noise technique using a near-IR laser to calibrate the frequency-domain multiplexed AC system and compare the results to a well-understood DC circuit. We measure an NEP white noise level of 0.8 aW/rtHz with a 1/f knee below 0.1 Hz and a time constant of 3.2 ms.
Comment: 27 pages, 16 figures. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in J. Appl. Phys. 134 (9) and may be found at https://doi.org/10.1063/5.0157208