1. Elastic properties of a-C:N:H films
- Author
-
Chengbing Wang, Shengrong Yang, Hongxuan Li, and Junyan Zhang
- Subjects
Transmission electron microscopes -- Usage ,Carbon compounds -- Mechanical properties ,Carbon compounds -- Electric properties ,Nitrides -- Electric properties ,Nitrides -- Mechanical properties ,Fourier transform spectroscopy -- Usage ,Diamond films -- Electric properties ,Physics - Abstract
Hydrogenated carbon nitride films with which elastic recovery are prepared by dual dc-rf plasma enhanced chemical vapor deposition. It is found that hydrogen atoms are mainly incorporated to s[p.sup.3] carbon atoms and reduce the dimension of cross-linking 3D network in C[N.sub.x]:H films.
- Published
- 2007